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63results about How to "Enhanced ESD robustness" patented technology

Electronic static discharge (ESD) protection device with bidirectional silicon controlled rectifier (SCR) structure embedded with interdigital N-channel metal oxide semiconductor (NMOS)

An electronic static discharge (ESD) protection device with a bidirectional silicon controlled rectifier (SCR) structure embedded with an interdigital N-channel metal oxide semiconductor (NMOS) can be applied to an ESD protection circuit of an on-chip integrated circuit (IC) and mainly comprises a P substrate, a P epitaxial layer, a first N pit, a P pit, a second N pit, a first N+ injection region, a first P+ injection region, a second N+ injection region, a third N+ injection region, a second P+ injection region, a fourth N+ injection region, a fifth N+ injection region, a third P+ injection region, a sixth N+ injection region, a plurality of poly-silicon gates, a plurality of thin gate oxide layers and a plurality of shallow isolation grooves. On one hand, under the positive and negative ESD pulse effects, an ESD current discharge path with a symmetric structure and complete same electrical property exists in the device, the ESD current discharge ability of the device can be improved, and bidirectional protection of an ESD pulse is achieved; and on the other hand, the interdigital NMOS composed of an NMOS M<1> and an NMOS M<2> and a parasitic P pit resistor form a resistance-capacitance coupling current path, so that the ESD robustness of the device is enhanced, the current density in an SCR current conduction path is reduced, the conduction resistance of the SCR is increased, and the maintaining voltage is increased.
Owner:JIANGNAN UNIV

Bidirectional ESD protection anti-latch-up device of holosymmetric dual-grid-control-diode triggering SCR structure

The invention discloses a bidirectional ESD protection anti-latch-up device of a holosymmetric dual-grid-control-diode triggering SCR structure, and the device can be used for improving the capabilityof an IC chip in resisting ESD. The device mainly consists of a P substrate, a P epitaxial part, a first N well, a P well, a second N well, a first N+ injection region, a first P+ injection region, asecond N+ injection region, a second P+ injection region, a third N+ injection region, a third P+ injection region, a fourth N+ injection region, a first polysilicon gate, a first thin gate oxide layer covering the first polysilicon gate, a second polysilicon gate, and a second thin gate oxide layer covering the second polysilicon gate. The device has a resistance-capacitance coupling auxiliary triggering path under the action of ESD stress, does not need an additional layout area, also can make the most of the advantages of low triggering voltage of a resistance-capacitance coupling circuitand the short start time, and shortens the voltage hysteresis amplitude of the device. In addition, the device also employs the conduction characteristics of the gate control diodes, improves the potential of a parasitic well resistor of the N well, and speeds up the starting of a current releasing path of the SCR structure. Moreover, the device has two ESD current releasing paths and a holosymmetric structure, facilitates the improvement of the ESD robustness of the device, and can achieve the bidirectional protection of ESD.
Owner:JIANGNAN UNIV

High-voltage electronic static discharge (ESD) protection device with positive-negative (PN) junction auxiliary trigger silicon controlled rectifier-laterally diffused metal oxide semiconductor (SCR-LDMOS) structure

The invention discloses a high-voltage electronic static discharge (ESD) protection device with a positive-negative (PN) junction auxiliary trigger silicon controlled rectifier-laterally diffused metal oxide semiconductor (SCR-LDMOS) structure. The high-voltage ESD protection device comprises a P-type substrate, wherein a buried oxygen layer is arranged on the P-type substrate, a shift region is arranged on the buried oxygen layer, an N-buffer region, a P region and a P-body region are sequentially arranged on the shift region from left to right, a first drain heavily-doping N+ region and a first drain heavily-doping P+ region are sequentially arranged in the N-buffer region from left to right, a second source heavily-doping N+ region, a second source heavily-doping P+ region and a third source heavily-doping P+ region are sequentially arranged in the P-body region from left to right, and the P region and the second source heavily-doping P+ region are connected through a wire. When a drain of the ESD protection device encounters a positive ESD pulse, a reverse bias PN junction is used for helping improving the hole carrier concentration before trigger starting, and a trigger voltage V<t1> is reduced; and moreover, with the introduction of the reverse bias PN junction into the device, the positive and negative feedback effect of a parasitic SCR can be effectively prevented, thus, the maintaining voltage V<h> of the device can be effectively increased, and the latch-up effect of the device is prevented.
Owner:ANHUI LONGXINWEI TECH CO LTD

Semiconductor devices and methods to enhance electrostatic discharge (ESD) robustness, latch-up, and hot carrier immunity

ActiveUS20180247929A1High latch-up immunityEnhanced life expectancyTransistorThyristorSalicideEngineering
The present disclosure relates to non-planar ESD protection devices. The present disclosure provides a device structure and method of fabricating the structure that is essentially immune to latch-up and possess high ESD robustness and reliability. In an aspect, the present disclosure provides a mixed silicidation and selective epitaxy (epi) FinFET processes for latch-up immunity together with ESD robustness, thereby allowing achievement of ESD efficient parasitic structures together with latch-up immune and reliable functional devices. The present disclosure provides a dual silicidation scheme where ESD protection element(s) have fins that are partially silicided, and functional devices have fins that are fully silicided. The present disclosure also provides a hybrid contact and junction profile scheme where ESD protection element(s) have fins that are partially silicided with or without deep junctions depending on their application, and functional devices have fins that are fully silicided with the silicide edge crossing the junction. On the other hand, a dual Epi scheme is implemented such that ESD protection elements have fins with Epi contact, and functional devices have fins that are fully silicided without Epi (raised S/D) contact.
Owner:INDIAN INSTITUTE OF SCIENCE

Bidirectional high-voltage ESD protection device of full-symmetric LDMOS triggered SCR structure

The invention discloses a bidirectional high-voltage ESD protection device of a full-symmetric LDMOS triggered SCR structure, and belongs to the field of electrostatic discharge protection and surge resistance of integrated circuits. The protection device is mainly composed of a P substrate, a deep N well, a first P well, an N well, a second P well, a first P + injection region, a first N + injection region, a first polysilicon gate, a first thin gate oxide layer, a first field oxide isolation region, a second P + injection region, a second field oxide isolation region, a second polysilicon gate, a second thin gate oxide layer, a second N + injection region and a third P + injection region. The two NLDMOSs are embedded to form an auxiliary trigger SCR current path in which the on-state NLDMOS and the off-state NLDMOS are connected in series. The voltage withstanding capability of the device is improved, so that the device meets the ESD protection requirement of a high-voltage power supply domain, the ESD robustness of the device is enhanced, the discharge efficiency of the device in unit area is improved, the carrier concentration of a base region in a parasitic SCR structure is reduced, and the maintaining voltage of the device is improved.
Owner:JIANGNAN UNIV

ESD protection device of IGBT structure and with high maintaining voltage

An ESD protection device of an IGBT structure and with a high maintaining voltage can be used in an on-chip IC high-voltage ESD protection circuit. The ESD protection device is mainly composed of a P substrate, a high-voltage N well, an N well, a P well, a first P+ injection region, a second P+ injection region, an N+ injection region, a third P+ injection region, a fourth P+ injection region, a metal anode, a metal cathode, a polycrystalline silicon gate, a thin gate oxide layer and a plurality of field oxide isolation regions. According to the ESD protection device of the IGBT structure, under the action of high-voltage ESD pulses, on one hand, a current discharge path with a PNPN structure is formed by the third P+ injection region, the N well, the high-voltage N well, the P well and the N+ injection region, thereby improving failure current of the device and enhancing ESD robustness of the device; and on the other hand, another current discharge path with a parasitic PNP triode and a parasitic resistor being connected in series is formed by the third P+ injection region, the N well, the fourth P+ injection region, the first P+ injection region, the P well and the second P+ injection region, thereby improving the maintaining voltage of the device and enhancing anti-latch capability of the device.
Owner:JIANGNAN UNIV
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