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64results about How to "Improve ESD protection capability" patented technology

High-voltage electronic static discharge (ESD) protection device with positive-negative (PN) junction auxiliary trigger silicon controlled rectifier-laterally diffused metal oxide semiconductor (SCR-LDMOS) structure

The invention discloses a high-voltage electronic static discharge (ESD) protection device with a positive-negative (PN) junction auxiliary trigger silicon controlled rectifier-laterally diffused metal oxide semiconductor (SCR-LDMOS) structure. The high-voltage ESD protection device comprises a P-type substrate, wherein a buried oxygen layer is arranged on the P-type substrate, a shift region is arranged on the buried oxygen layer, an N-buffer region, a P region and a P-body region are sequentially arranged on the shift region from left to right, a first drain heavily-doping N+ region and a first drain heavily-doping P+ region are sequentially arranged in the N-buffer region from left to right, a second source heavily-doping N+ region, a second source heavily-doping P+ region and a third source heavily-doping P+ region are sequentially arranged in the P-body region from left to right, and the P region and the second source heavily-doping P+ region are connected through a wire. When a drain of the ESD protection device encounters a positive ESD pulse, a reverse bias PN junction is used for helping improving the hole carrier concentration before trigger starting, and a trigger voltage V<t1> is reduced; and moreover, with the introduction of the reverse bias PN junction into the device, the positive and negative feedback effect of a parasitic SCR can be effectively prevented, thus, the maintaining voltage V<h> of the device can be effectively increased, and the latch-up effect of the device is prevented.
Owner:ANHUI LONGXINWEI TECH CO LTD

Method for improving ESD protection device uniform conduction

The invention discloses a method for improving even conduction of an ESD protection device. The method is suitable for characteristic improvement of an electrostatic discharge (ESD) protection device in an integrated circuit, wherein, an MOS transistor is provided with a plurality of finger-shaped components which are connected with each other in parallel, and each of the finger-shaped component is respectively connected with a parasitic triode in parallel, and a collector electrode (i.e., a drain electrode of the MOS transistor) of each parasitic triode is coupled with an operating potential terminal or an I/O terminal of the integrated circuit by a common drain line; an emitter electrode (i.e., a source electrode of the MOS transistor) of the parasitic triode is connected with a common ground potential terminal together with a gate electrode and a substrate of the MOS transistor. The method is characterized in that: the substrate terminal of the MOS transistor is also serially connected with a high-resistance apparatus in the ESD protection device, and the substrate terminal of the MOS transistor is further coupled to the common ground potential terminal together with the source electrode and the gate electrode, which can reduce trigger voltage of Gated_MOSFET, causes a large-sized protection device to be more evenly conducted, improves the ESD protection capability of the device, and further reduces the circuit design area and lower the development cost.
Owner:HEJIAN TECH SUZHOU

Electrostatic discharge protection structure based on SOI process

ActiveCN111403379AAvoid concentrationEliminate breakdown and burnoutTransistorSolid-state devicesSalicidePower flow
The invention discloses an electrostatic discharge protection structure based on an SOI process. The electrostatic discharge protection structure comprises an SOI substrate and an ESD protection device located on the SOI substrate. The ESD protection device comprises a first conductive area, a second conductive area and a third conductive area, wherein the first conductive area, the second conductive area and the third conductive area are located on the same plane, and the third conductive area makes contact with the first conductive area and the second conductive area respectively. A first electrode is formed on the first conductive area, a second electrode is formed on the second conductive area, a silicide barrier layer is arranged above the third conductive area, and the first electrode and the second electrode are isolated by the silicide barrier layer. According to the invention, the first electrode and the second electrode are isolated through the silicide barrier layer, and when ESD impact occurs, the parasitic triode is conducted to discharge ESD current, so a protected circuit is protected. According to the electrostatic discharge protection structure, an ESD current canbe enabled to flowto a deeper region, and the electrostatic discharge protection capability of the device can be effectively improved.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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