89 results about "Interdigitated electrode" patented technology

An integrated pressure and temperature hydrogel array sensor, which comprises: a plurality of sensing array units arranged in an array. Each sensing array unit comprises interdigitated electrodes (101) and a hydrogel layer (102) covering the surface of the interdigitated electrodes (101), wherein the hydrogel layer (102) is fixed to the interdigitated electrodes (101) by means of photocuring, and the hydrogel layer (102) is in intimate contact with the surface of the interdigitated electrodes (101); the interdigitated electrodes (101) are two coplanar nested interdigitated electrodes prepared on a flexible circuit board; the hydrogel layer (102) is a hydrogel layer having variations in crosslink density and height; and the hydrogel layer (102) comprises a high-crosslink-density hydrogel region (102a) and a low-crosslink-density hydrogel region (102b). A flexible sensing structure based on photocurable hydrogel that features an arrayed electrode design can simultaneously monitor variations in a pressure signal and a temperature signal by means of an array module acquisition system. Further disclosed is a preparation method for an integrated pressure and temperature hydrogel array sensor.

A three-dimensional (3D) microelectrode array device for in vitro electrophysiological applications includes a substrate and micro vias extending from the bottom face to the top face of the substrate. A microneedle at each micro via extends from the bottom face upward beyond the top face and forms a hypodermic microneedle array on the top face. Metallic traces on the bottom face interconnect the hypodermic microneedles to form the 3D microelectrode array. A microheater is positioned on the bottom face of the substrate. Microfluidic ports may be formed at the substrate. Interdigitated electrodes may be formed at the substrate.

This invention provides a surface acoustic wave (SAW) filter, comprising a piezoelectric layer and interdigitated electrodes. The interdigitated electrodes are disposed on the piezoelectric layer and include at least a first metal layer and a second metal layer stacked together. The first metal layer is made of platinum or an alloy with platinum as the main component, and the second metal layer is made of aluminum or an alloy with aluminum as the main component. By setting the material of the second metal layer to aluminum or an alloy with aluminum as the main component, the uniformity of metal coverage of the electrode structure can be effectively improved, avoiding excessive local resistance or structural defects caused by poor coverage. Setting the material of the first metal layer to platinum or an alloy with platinum as the main component provides reliable support for the second metal layer, reducing the risk of deformation or corrosion of the aluminum layer in subsequent processes. By using a stacked structure of two complementary materials for the interdigitated electrodes, both structural miniaturization and improved overall electrical performance and structural reliability of the interdigitated electrodes are achieved.

This invention discloses an MSM interdigitated wideband ultraviolet photodetector and its fabrication method, belonging to the field of semiconductor technology. The detector includes: a substrate; an AlN nucleation layer on the substrate surface; a heterostructure on the surface of the AlN nucleation layer away from the substrate, wherein the heterostructure includes GaN, GaON, and Ga2O3 layers stacked sequentially from bottom to top; and interdigitated electrodes on the surface of the Ga2O3 layer away from the substrate. This invention introduces a GaON layer between the Ga2O3 and GaN heterojunctions. This GaON layer acts as a lattice buffer layer, effectively releasing the lattice mismatch stress between Ga2O3 and GaN, significantly improving the interface quality of the heterojunction, and enhancing the separation and collection efficiency of charge carriers, thus significantly improving the overall performance of the MSM interdigitated ultraviolet photodetector.

A surface acoustic wave (SAW) device includes: a piezoelectric layer; an interdigitated electrode structure located on the piezoelectric layer; a wiring layer located on the piezoelectric layer and electrically connected to the interdigitated electrode structure; an interconnect layer located on the wiring layer; bumps located on the interconnect layer; and a metallization structure located between the interconnect layer and the bumps, electrically connecting the interconnect layer and the bumps and preventing material from the bumps from penetrating into the interconnect layer. The metallization structure on the interconnect layer prevents the bumps from directly contacting the interconnect layer, instead connecting them electrically through the metallization structure. This prevents the material of the bumps from fusing with the material of the interconnect layer and intruding into the device, thus preventing semiconductor device failure and improving the performance of the semiconductor device. Furthermore, the metallization structure's location between the bumps and the interconnect layer enhances the adhesion between the bumps and the interconnect layer.

This invention discloses a pressure sensor based on gradient resistance, possessing both wide measurement range and high sensitivity. From bottom to top, it comprises: a lower encapsulation layer; interdigitated electrodes attached to the upper surface of the lower encapsulation layer; a high-resistance sensing layer, which is a flat layer without any microstructures; a low-resistance sensing layer, the surface of which has a 5×5~6×6 hemispherical microstructure, the hemispherical microstructure surface being connected to the high-resistance sensing layer; and an upper encapsulation layer, which is disposed opposite to the lower encapsulation layer. This invention also discloses a method for fabricating a pressure sensor based on gradient resistance, possessing both wide measurement range and high sensitivity. This method constructs a two-layer structure consisting of a high-resistance flat sensing layer and a low-resistance hemispherical microstructure sensing layer, utilizing the current transfer mechanism caused by the dynamic change in the interlayer contact area of ​​the two sensing layers under pressure.

A surface acoustic wave resonator (100) comprises a layered substrate including a carrier substrate (110) and a dielectric layer (112) having a low acoustic velocity. Another dielectric layer (122) is disposed on a piezoelectric layer (113) and interdigitated electrodes (131, 132) having an acoustic velocity lower than the acoustic velocity of the carrier substrate (110) and a positive temperature coefficient of frequency.

The invention provides a filter forming method, which comprises the following steps of: providing a substrate; continuously depositing an electrode metal layer and a multifunctional metal layer on the substrate; etching the multifunctional metal layer to form an initial mass block; and etching the initial mass block, the electrode metal layer and the multifunctional metal layer at the same time to obtain a plurality of interdigital electrodes which are arranged in a crossed manner and mass blocks arranged on the interdigital electrodes. According to the embodiment of the invention, the interdigital electrode and the mass block can be manufactured at the same time only through one-time continuous metal deposition and two-time etching, and the production process is simplified; meanwhile, in combination with the application of a self-alignment process, the lamination precision requirement between the mass block and the interdigital electrode is effectively ensured.

This invention discloses a method and system for detecting the strongest Rayleigh acoustic current in immobilized microdroplets. Specifically, it involves: calculating the acoustic current suppression coefficient through experimental quantitative testing to establish a quantitative mapping relationship between acoustic current intensity and droplet contact angle; utilizing an electrowetting structure composed of interdigitated electrodes, a dielectric layer, and a hydrophobic layer to actively regulate the droplet contact angle through an applied voltage; and dynamically adjusting the applied voltage in real time by monitoring the droplet vibration amplitude, particle velocity, and contact angle through a collaborative control program to maintain the acoustic current intensity at its strongest. This invention also provides a detection system for implementing the above method, including an indium tin oxide transparent interdigitated electrode substrate, a lead zirconate titanate piezoelectric transducer, a laser Doppler vibrometer, a microscope, and a collaborative control module. This invention can maximize and dynamically maintain the Rayleigh acoustic current intensity in immobilized microdroplets, significantly accelerating the solid-liquid interface mass transfer process, and is applicable to biochemical analysis fields such as rapid immunoassay and biological particle mixing.

This application discloses a surface acoustic wave (SAW) resonator, filter, and electronic device, relating to the field of resonators. The SAW resonator includes: a piezoelectric substrate; interdigitated electrodes located on one side surface of the piezoelectric substrate; the interdigitated electrodes include first and second fingers alternately arranged along a first direction, the first and second fingers extending along a second direction, the first and second directions intersecting in a plane parallel to the piezoelectric substrate; a first groove is formed in the surface of the piezoelectric substrate between adjacent first and second fingers; two reflective gratings are disposed on the same side surface of the piezoelectric substrate as the interdigitated electrodes; in the first direction, the interdigitated electrodes are located between the two reflective gratings; the reflective gratings include multiple third fingers arranged sequentially along the first direction; a second groove is formed in the surface of the piezoelectric substrate between adjacent third fingers. The technical solution of this application can improve the steepness of the filter in the transition band.

A method for preparing niobium carbide (MXene) micro supercapacitors using a spray coating method includes the following steps: Using an HCl-LiF mixture as an etchant, a few-layer Nb₂CT is prepared by hydrothermal reaction at 180℃ for 24 hours. x MXene dispersion; a spray mask with a hollowed-out interdigitated pattern is prepared using laser marking; the mask is adhered to a flexible substrate and placed on a 200℃ heating platform, with a spraying pressure of 0.2-0.5 MPa and a nozzle distance of 10-20 cm, and the dispersion is uniformly sprayed onto the hollowed-out areas of the mask. By controlling the number of spray passes, a binder-free patterned interdigitated electrode is directly formed; a PVA / H2SO4 gel electrolyte is prepared and coated onto the electrode surface, and after encapsulation, a flexible micro supercapacitor is obtained. This invention has a simple and controllable process, and the resulting device has high capacity, excellent flexibility, and long cycle stability, making it suitable for wearable electronic devices.

This invention relates to a method for preparing and applying a ternary heterostructure nanosheet of tungsten diselenide / tin diselenide / tin monoselenide, belonging to the field of gas sensor technology. The invention discloses a ternary heterostructure nanosheet of tungsten diselenide / tin diselenide / tin monoselenide and its application as a sensing material in a highly selective and sensitive flexible NO2 gas sensor. The invention utilizes a liquid-phase growth method, using SnSe2 nanosheets, ammonium tungstate, and diphenyldiselenoether as raw materials, and varying reaction conditions such as temperature, reaction time, and raw material content to prepare the ternary heterostructure nanosheet of tungsten diselenide / tin diselenide / tin monoselenide. Subsequently, these nanosheets are sprayed onto interdigitated electrodes and dried to form a film, thus preparing a chemielectric resistive gas sensor capable of detecting low concentrations of nitrogen dioxide gas at room temperature. It not only possesses high sensitivity and selectivity but can also be applied to flexible NO2 gas sensing.

The invention discloses a floating type multi-parameter water quality monitoring microsystem and a preparation method thereof, and belongs to the technical field of water quality monitoring. The water quality monitoring microsystem sequentially comprises a functional floating carrier substrate, a flexible circuit module and an insulating packaging layer from bottom to top, the flexible circuit module comprises a flexible insulating dielectric layer, a planar spiral inductance coil is arranged on the upper surface of the flexible insulating dielectric layer, and a plurality of interdigital electrodes are arranged on the lower surface of the flexible insulating dielectric layer; each interdigital electrode is connected with the planar spiral inductance coil to form an LC resonant circuit of which the working frequencies are not overlapped; the surfaces of the interdigital electrodes are coated with ion sensitive membranes respectively; a through detection window is formed in the position, corresponding to the interdigital electrode, of the functionalized floating carrier substrate, so that the interdigital electrode can be directly contacted with a water body to be detected below through the detection window; and the insulating packaging layer completely covers the planar spiral inductance coil. The system can be used for monitoring water quality, and has the advantages of good real-time performance, high detection precision and the like.

This invention discloses a chemiluminescence gas sensor based on polyoxometalates (POMs), and relates to its fabrication method and application. The sensor is suitable for detecting ammonia at room temperature. The gas sensor includes an adapter base and a sensing element, wherein the sensing element consists of interdigitated electrodes and a sensitive material loaded on the electrode surface. This sensitive material is a composite material of POMs and SnO2. POMs, as excellent electron acceptors, possess good redox properties, thermal stability, and photosensitivity. When combined with SnO2, they can effectively suppress electron-hole recombination, thereby significantly improving the gas-sensing performance of the semiconductor material. Compared with existing technologies, the sensor provided by this invention exhibits high response characteristics to ammonia at room temperature, while also demonstrating excellent selectivity and repeatability.

This utility model relates to a sensing device for analyzing the degree of aging and degradation of liquid or paste-like materials and the impurity content in the materials, and a wind power generation device. The sensing device includes: a vibration unit, which includes a crystal oscillator that applies shear vibration to the materials under an excitation voltage; a sensing unit, which includes at least one sensor composed of interdigitated electrodes arranged on the vibration unit to detect changes in the dielectric properties of the materials under shear vibration; and a calculation unit, which is communicatively connected to the vibration unit and the sensing unit, respectively. The calculation unit receives and processes a first signal from the vibration unit and a second signal from the sensing unit, and determines the aging and degradation of the materials and the impurity content in the materials based on the first and second signals.

The utility model provides a kind of integrated pressure-sensing heating film, include structure: flexible dielectric layer;The interdigitated electrode layer of attachment in the dielectric layer one side, the interdigitated electrode respectively leads out electric property, a electrode electrically grounded, another root adds voltage;The electrode array layer of attachment in the dielectric layer other side, evenly distribute in flexible dielectric layer each area and lead to port, respectively test each area and the potential difference change of ground electrode in interdigitated electrode layer;PPTC film layer is attached on the interdigitated electrode layer, and realize surface heating by the potential difference of the interdigitated electrode conduction;Heat-conducting insulating film layer is respectively attached on the PPTC film layer and the electrode array layer.The utility model compactly integrates self-limiting temperature heating function PPTC device and capacitive pressure sensor, flexible and foldable, heating function and area pressure monitoring function integration degree is high, help the safety and light weight of power battery.

This invention provides a composite nanofiber membrane for detecting C3F6, a component of C4F7N gas decomposition, as well as its preparation method and sensor. The composite nanofiber membrane comprises a polymer nanofiber substrate and a metal-organic framework dispersed within the polymer nanofiber substrate. The metal-organic framework is MIL-101(M), where M represents a metal element, including at least one of Cr, Cu, and lanthanides. The composite nanofiber membrane is coated on the surface of an interdigitated electrode, serving as a sensor for detecting C3F6 gas. The sensor of this invention can generate a response within 25 seconds and still exhibits a certain sensitivity (above 3%) to 10 ppm of C3F6 gas, meeting the requirements for high sensitivity and rapid response in the detection of C3F6, a decomposition product of C4F7N gas.

High throughput interleaved electrode tab manufacturing processes are provided. A method is disclosed that includes depositing a first strip of active material for a battery on a conductive foil, the first strip having a first edge and an opposing second edge, depositing a second strip of active material for a battery on a conductive foil, where the second strip has a first edge and an opposing second edge, a first edge of the second strip is spaced a distance from a second edge of the first strip for the active material of the battery, a first plurality of tabs extending in a first direction away from the second edge of the first strip is formed in the conductive foil, and a second plurality of tabs extending in a second direction away from the first edge of the second strip is formed in the conductive foil.

The invention discloses a low-power-consumption detection methane sensor and a detection method thereof, and belongs to the technical field of methane detection. The invention aims to realize room-temperature low-power-consumption detection of methane gas. An Au interdigital electrode is prepared on the upper surface of a polyimide film substrate through a chemical deposition method, a sensing area of the Au interdigital electrode is uniformly coated with a Pd-doped NH2-C3N4 / CoAl-LDHs nano sensing material layer, and the leading-out end of the Au interdigital electrode is connected with a horizontal pasting pin header; the double-row female header, the resistance acquisition chip, the Bluetooth module and the battery are sequentially mounted on a bottom plate of the rectangular cavity of the copper-clad laminate from left to right, one end of the double-row female header is connected with the resistance acquisition chip, and the resistance acquisition chip is connected with the Bluetooth module; the ultraviolet lamp is mounted on a top plate of the rectangular cavity of the copper-clad laminate; the horizontally-pasted pin header is connected with the other end of the double-row female header, and the battery is used for overall power supply of the methane sensor with the low-power-consumption detection function. The low-power-consumption detection of methane is realized.

An aerosol-generating device (120) for dielectrically heating an aerosol-forming substrate (110) is provided. The device (120) includes an oscillating circuit (150) and an electrode arrangement coupled to the oscillating circuit. The electrode arrangement forms a load capacitor for dielectrically heating the aerosol-forming substrate. The electrode arrangement includes first electrodes that intersect each other.

The invention discloses a methane sensor for room temperature detection and a detection method thereof, and belongs to the technical field of methane detection. The problem that a methane sensor is high in working temperature is solved. A glass fiber epoxy resin composite substrate, an Au interdigital electrode, an Ag-doped NH2-C3N4 / CoAl-LDO nano sensing material layer and double rows of pin headers form a device I; the support, the double-row female header, the battery, the ultraviolet lamp, the resistance acquisition chip and the Bluetooth module form a device II; the double-row female header, the resistance acquisition chip, the Bluetooth module and the battery are sequentially mounted on a bottom plate of the support from left to right, one end of the double-row female header is connected with the resistance acquisition chip, and the resistance acquisition chip is connected with the Bluetooth module; the ultraviolet lamp is mounted on a top plate of the support; the device I is placed below the ultraviolet lamp, the double-row pin header of the device I is connected with the other end of the double-row female header, and the battery acts on the whole power supply of the methane sensor for room temperature detection.

The present disclosure relates to electromagnetic side-channel countermeasures. Embodiments herein relate to countermeasures against electromagnetic (EM) probing attacks on voltage regulators (VRs) of cryptographic circuits. In one aspect, the clamping strength of a VR (e.g., a switched-capacitor VR) is dynamically and randomly modulated. The VR can include switches for transferring charge, where the switches can include multiple sub-switches in parallel, and the number of active switches is randomly changed to randomize EM emissions. In another aspect, the capacitors of a VR are formed in a metal routing layer (e.g., a top metal layer) of an integrated circuit package, where the capacitors have interdigitated electrodes that cancel current in and out of the electrodes, thereby reducing EM emissions. In another aspect, a resonant VR includes circuitry for detecting changes in current or voltage that are related to changes in its resonant frequency due to being subjected to EM probing.

This application provides a flexible nitrogen dioxide gas sensor based on tungsten disulfide and its fabrication method. The sensor includes a flexible substrate, a flexible electrode, and a tungsten disulfide sensitive film. The flexible electrode is disposed on the same plane of the flexible substrate, and the source and drain adopt an arrayed interdigitated electrode structure. The tungsten disulfide sensitive film covers the channel region between the source and drain, and there is a gap between it and the gate. When a gate voltage is applied, the gate modulates the carrier concentration in the tungsten disulfide channel of the tungsten disulfide sensitive film through a lateral electric field, thereby adjusting the sensitivity to nitrogen dioxide detection. The fabrication process is simplified, and high sensitivity, fast recovery, and flexible wearable adaptation are achieved simultaneously without material modification or external assistance.

A sensor assembly for detecting a presence of an analyte includes a detector and a microheater. The detector includes an electrode layer including interdigitated electrodes and nanofibers that are formed of a fiber material exhibiting an electrical signal that changes based on exposure to the analyte. The microheater is coupled to the detector and includes a heating element that is capable of heating at least a portion of the detector to a temperature that reduces a quantity of water molecules in a region proximate the nanofibers.

This invention discloses an intelligent bone implant for electric field-regulated bone growth and a method for preparing the implant. The surface of the intelligent bone implant for electric field-regulated bone growth has at least one coating structure, which includes, from bottom to top: a bottom electrode layer, a piezoelectric material layer, a top electrode layer, an insulating material layer, interdigitated electrodes, and an encapsulation coating layer; the bottom electrode layer and the top electrode layer are both connected to the interdigitated electrodes. The intelligent bone implant for electric field-regulated bone growth of this invention achieves the beneficial effects of promoting bone growth and accelerating the recovery and functional reconstruction of skeletal structure.

This invention discloses a terahertz water quality detection chip based on phase change materials and its detection method. The detection chip comprises a substrate, interdigitated electrodes, and a phase change film. The interdigitated electrodes are disposed on the substrate, and a microstructure array is arranged between the interdigitated electrodes. The phase change film covers the interdigitated electrodes and the microstructure array. The area covered by the phase change film serves as a droplet sample loading area. The phase change film transforms between an amorphous and crystalline state, thus being suitable for two detection modes. The phase change film is a thin film formed by GST phase change material, which is a compound formed by the combination of Ge, Sb, and Te elements. The above-mentioned detection chip excites the GST phase change material to generate a photoconductive effect through terahertz radiation, and utilizes the high conductivity of pollutants in water to modulate the local terahertz field. It uses the change in photocurrent with particle concentration to form a quantitative detection relationship, thereby significantly improving the sensitivity of water quality detection while reducing the size of the detection equipment.

A hydrogen sulfide sensor includes a substrate, a par of interdigitated electrodes disposed on the substrate, and a homogeneous polyaniline sensing film disposed on the pair of interdigitated electrodes and having electrical conductivity that depends upon a concentration of hydrogen sulfide. A method for detecting hydrogen sulfide includes for each sensor of a plurality of sensors: generating a signal if said sensor is exposed to a sample of hydrogen sulfide having density greater than or equal to a hydrogen sulfide detection threshold of said sensor, wherein the plurality of sensors has a respective plurality of hydrogen sulfide detection limits that span a detection range. A method for forming a hydrogen sulfide sensor includes dissolving a polyaniline polymer and a metal-chloride salt in an organic solvent to form a solution, and spin-coating the solution to form a homogeneous sensing film disposed on a pair of interdigitated electrodes disposed on a substrate.

This invention discloses a surface acoustic wave (SAW) device, filter, and fabrication method using a locally convex piezoelectric thin film structure, relating to the field of integrated circuit technology. The device includes an interdigitated electrode layer and a piezoelectric thin film. A convex piezoelectric thin film structure is disposed above the piezoelectric thin film along the propagation direction of the SAW. The interdigitated electrode layer is disposed above the piezoelectric thin film and forms a bridge-like structure with the convex piezoelectric thin film structure. The convex piezoelectric thin film structure is fabricated using a pulsed laser deposition process, or by an etching process. This device significantly suppresses the excitation of lateral heterogeneous modes, thereby improving the passband performance of the device.

A surface acoustic wave resonator device having an interdigital electrode region including a first peripheral region, a first end region, a central region, a second end region, and a second peripheral region arranged in sequence in a first direction, and including: an interdigital transducer disposed on a piezoelectric substrate and including a plurality of interdigital electrodes, the plurality of interdigital electrodes are located in the interdigital electrode area and comprise first interdigital electrodes and second interdigital electrodes which extend in the first direction and are alternately arranged in the second direction intersecting with the first direction; an intermediate layer disposed on the piezoelectric substrate and covering the interdigital transducer; the sound velocity adjusting layer is arranged on the side, away from the piezoelectric substrate, of at least part of the middle layer; and a passivation layer disposed on a side of the intermediate layer away from the piezoelectric substrate, in which the sound velocity adjustment layer is located in the central region, overlaps portions of the plurality of interdigital electrodes located in the central region in a direction perpendicular to the main surface of the piezoelectric substrate, and is configured to change a sound velocity of the central region.

This invention discloses an apparatus and method for photocuring anti-counterfeiting label films based on surface acoustic wave (SAW) manipulation. Interdigitated electrodes and a forming frame are placed on the upper surface of a piezoelectric substrate. The hollow portion in the middle of the forming frame serves as a forming chamber for placing photosensitive resin and particles. The particles are dispersed within the photosensitive resin. An ultraviolet (UV) light source is located below the piezoelectric substrate. The method includes inputting an external electrical signal into the interdigitated electrodes, which causes SAW waves to be generated in the piezoelectric substrate. The SAW waves drive the particles to converge at the troughs of the SAW waves. UV light emitted from the UV light source is projected onto the photosensitive resin, causing the photosensitive resin at the UV light projection location to solidify. The solidified photosensitive resin is then removed from the forming chamber as the anti-counterfeiting label film. This invention enables the manufacture of anti-counterfeiting label films with different particle patterning features and shapes, and features physical non-cloning, ease of operation, simple equipment, and strong encryption.