150 results about "Interdigitated electrode" patented technology

The invention discloses a pressure detection system, and relates to the technical field of intelligent wearing, and the pressure detection system comprises 1) a flexible substrate layer which is used for fitting skin and sensing external tiny pressure changes; the micro-column array layer is composed of a plurality of micro-column structures and used for amplifying and conducting the pressure change sensed by the flexible substrate layer; the flexible gel sensing layer is used for receiving the pressure transmitted by the micro-column array layer and generating an electric signal; 4) a packaging layer; an interdigital electrode layer is arranged in the flexible gel sensing layer, an electric signal of the flexible gel sensing layer changes along with the change of external pressure, and the detection of a pressure electric signal is realized through the interdigital electrode layer. By means of the design, high-sensitivity response to tiny pressure changes can be achieved, micro-pressure signals are remarkably amplified, meanwhile, the problem of hysteresis effect generally existing in traditional silica gel or metal film materials is solved, and therefore the response speed of the sensor is greatly increased.

An integrated pressure and temperature hydrogel array sensor, which comprises: a plurality of sensing array units arranged in an array. Each sensing array unit comprises interdigitated electrodes (101) and a hydrogel layer (102) covering the surface of the interdigitated electrodes (101), wherein the hydrogel layer (102) is fixed to the interdigitated electrodes (101) by means of photocuring, and the hydrogel layer (102) is in intimate contact with the surface of the interdigitated electrodes (101); the interdigitated electrodes (101) are two coplanar nested interdigitated electrodes prepared on a flexible circuit board; the hydrogel layer (102) is a hydrogel layer having variations in crosslink density and height; and the hydrogel layer (102) comprises a high-crosslink-density hydrogel region (102a) and a low-crosslink-density hydrogel region (102b). A flexible sensing structure based on photocurable hydrogel that features an arrayed electrode design can simultaneously monitor variations in a pressure signal and a temperature signal by means of an array module acquisition system. Further disclosed is a preparation method for an integrated pressure and temperature hydrogel array sensor.

The present invention generally relates to a lanthanum oxide (La2O3)-reduced graphene oxide (rGO) nanocomposite-based humidity sensor device designed for high-performance detection across a wide relative humidity range of 11-95%. The sensor comprises an interdigitated electrode (IDE) substrate featuring a plurality of electrodes patterned on an insulating base. A sensing layer composed of a nanocomposite of La2O3 and rGO in the ratio of (x)La2O3+(1−x)rGO, where x ranges from 0.1 to 0.3, is deposited on the IDE using a drop-casting method. The slurry used for deposition includes ethanol as a solvent, and the coated substrate is subjected to mild heating at 60° C. to 80° C. for 1 to 2 hours to enhance adhesion and uniformity. The IDEs, made of gold, silver, or their composition, are connected to external leads interfaced with a measurement unit that enables real-time monitoring and quantification of humidity changes in the surrounding environment.

A three-dimensional (3D) microelectrode array device for in vitro electrophysiological applications includes a substrate and micro vias extending from the bottom face to the top face of the substrate. A microneedle at each micro via extends from the bottom face upward beyond the top face and forms a hypodermic microneedle array on the top face. Metallic traces on the bottom face interconnect the hypodermic microneedles to form the 3D microelectrode array. A microheater is positioned on the bottom face of the substrate. Microfluidic ports may be formed at the substrate. Interdigitated electrodes may be formed at the substrate.

This invention provides a surface acoustic wave (SAW) filter, comprising a piezoelectric layer and interdigitated electrodes. The interdigitated electrodes are disposed on the piezoelectric layer and include at least a first metal layer and a second metal layer stacked together. The first metal layer is made of platinum or an alloy with platinum as the main component, and the second metal layer is made of aluminum or an alloy with aluminum as the main component. By setting the material of the second metal layer to aluminum or an alloy with aluminum as the main component, the uniformity of metal coverage of the electrode structure can be effectively improved, avoiding excessive local resistance or structural defects caused by poor coverage. Setting the material of the first metal layer to platinum or an alloy with platinum as the main component provides reliable support for the second metal layer, reducing the risk of deformation or corrosion of the aluminum layer in subsequent processes. By using a stacked structure of two complementary materials for the interdigitated electrodes, both structural miniaturization and improved overall electrical performance and structural reliability of the interdigitated electrodes are achieved.

The invention discloses a triboelectricity-variable reluctance hybrid power generation device and system of a bearing structure, the triboelectricity-variable reluctance hybrid power generation device of the bearing structure comprises a support frame, a rotating shaft, a rolling shaft, a friction power generation assembly and a variable reluctance power generation assembly, the friction power generation assembly comprises a dielectric ring and an interdigital electrode plate, the dielectric ring is annularly arranged on a retainer of the rotating shaft, the interdigital electrode plate surrounds the periphery of the rotating shaft and is connected with the supporting frame, the dielectric ring and the interdigital electrode plate are adjacent and opposite, the variable reluctance power generation assembly comprises a magnet coil and a gear-shaped nut, the gear-shaped nut is arranged on the rotating shaft in a sleeving mode, and convex teeth are arranged on the peripheral surface of the gear-shaped nut; the multiple magnet coils are arranged in the circumferential direction of the supporting frame at intervals, and the multiple magnet coils surround the periphery of the gear-shaped nut. According to the friction electricity-variable reluctance hybrid power generation device of the bearing structure, in-situ self-sensing of the running state of the bearing can be achieved, the structure is compact, and external power supply equipment and related wiring do not need to be arranged.

This invention discloses an MSM interdigitated wideband ultraviolet photodetector and its fabrication method, belonging to the field of semiconductor technology. The detector includes: a substrate; an AlN nucleation layer on the substrate surface; a heterostructure on the surface of the AlN nucleation layer away from the substrate, wherein the heterostructure includes GaN, GaON, and Ga2O3 layers stacked sequentially from bottom to top; and interdigitated electrodes on the surface of the Ga2O3 layer away from the substrate. This invention introduces a GaON layer between the Ga2O3 and GaN heterojunctions. This GaON layer acts as a lattice buffer layer, effectively releasing the lattice mismatch stress between Ga2O3 and GaN, significantly improving the interface quality of the heterojunction, and enhancing the separation and collection efficiency of charge carriers, thus significantly improving the overall performance of the MSM interdigitated ultraviolet photodetector.

A surface acoustic wave (SAW) device includes: a piezoelectric layer; an interdigitated electrode structure located on the piezoelectric layer; a wiring layer located on the piezoelectric layer and electrically connected to the interdigitated electrode structure; an interconnect layer located on the wiring layer; bumps located on the interconnect layer; and a metallization structure located between the interconnect layer and the bumps, electrically connecting the interconnect layer and the bumps and preventing material from the bumps from penetrating into the interconnect layer. The metallization structure on the interconnect layer prevents the bumps from directly contacting the interconnect layer, instead connecting them electrically through the metallization structure. This prevents the material of the bumps from fusing with the material of the interconnect layer and intruding into the device, thus preventing semiconductor device failure and improving the performance of the semiconductor device. Furthermore, the metallization structure's location between the bumps and the interconnect layer enhances the adhesion between the bumps and the interconnect layer.

This invention discloses a pressure sensor based on gradient resistance, possessing both wide measurement range and high sensitivity. From bottom to top, it comprises: a lower encapsulation layer; interdigitated electrodes attached to the upper surface of the lower encapsulation layer; a high-resistance sensing layer, which is a flat layer without any microstructures; a low-resistance sensing layer, the surface of which has a 5×5~6×6 hemispherical microstructure, the hemispherical microstructure surface being connected to the high-resistance sensing layer; and an upper encapsulation layer, which is disposed opposite to the lower encapsulation layer. This invention also discloses a method for fabricating a pressure sensor based on gradient resistance, possessing both wide measurement range and high sensitivity. This method constructs a two-layer structure consisting of a high-resistance flat sensing layer and a low-resistance hemispherical microstructure sensing layer, utilizing the current transfer mechanism caused by the dynamic change in the interlayer contact area of ​​the two sensing layers under pressure.

A surface acoustic wave resonator (100) comprises a layered substrate including a carrier substrate (110) and a dielectric layer (112) having a low acoustic velocity. Another dielectric layer (122) is disposed on a piezoelectric layer (113) and interdigitated electrodes (131, 132) having an acoustic velocity lower than the acoustic velocity of the carrier substrate (110) and a positive temperature coefficient of frequency.

The invention discloses a flexible all-inorganic piezoelectric vibration sensor and a preparation method thereof. The piezoelectric sensor is characterized in that the used flexible substrate is a fluorine crystal mica substrate, the used functional material is an inorganic piezoelectric film, and the electrode structure is an interdigital electrode. The sensor has bendable flexibility and excellent vibration response, and can be applied to a wearable health monitoring system.

The invention provides a filter forming method, which comprises the following steps of: providing a substrate; continuously depositing an electrode metal layer and a multifunctional metal layer on the substrate; etching the multifunctional metal layer to form an initial mass block; and etching the initial mass block, the electrode metal layer and the multifunctional metal layer at the same time to obtain a plurality of interdigital electrodes which are arranged in a crossed manner and mass blocks arranged on the interdigital electrodes. According to the embodiment of the invention, the interdigital electrode and the mass block can be manufactured at the same time only through one-time continuous metal deposition and two-time etching, and the production process is simplified; meanwhile, in combination with the application of a self-alignment process, the lamination precision requirement between the mass block and the interdigital electrode is effectively ensured.

This invention discloses a method and system for detecting the strongest Rayleigh acoustic current in immobilized microdroplets. Specifically, it involves: calculating the acoustic current suppression coefficient through experimental quantitative testing to establish a quantitative mapping relationship between acoustic current intensity and droplet contact angle; utilizing an electrowetting structure composed of interdigitated electrodes, a dielectric layer, and a hydrophobic layer to actively regulate the droplet contact angle through an applied voltage; and dynamically adjusting the applied voltage in real time by monitoring the droplet vibration amplitude, particle velocity, and contact angle through a collaborative control program to maintain the acoustic current intensity at its strongest. This invention also provides a detection system for implementing the above method, including an indium tin oxide transparent interdigitated electrode substrate, a lead zirconate titanate piezoelectric transducer, a laser Doppler vibrometer, a microscope, and a collaborative control module. This invention can maximize and dynamically maintain the Rayleigh acoustic current intensity in immobilized microdroplets, significantly accelerating the solid-liquid interface mass transfer process, and is applicable to biochemical analysis fields such as rapid immunoassay and biological particle mixing.

This application discloses a surface acoustic wave (SAW) resonator, filter, and electronic device, relating to the field of resonators. The SAW resonator includes: a piezoelectric substrate; interdigitated electrodes located on one side surface of the piezoelectric substrate; the interdigitated electrodes include first and second fingers alternately arranged along a first direction, the first and second fingers extending along a second direction, the first and second directions intersecting in a plane parallel to the piezoelectric substrate; a first groove is formed in the surface of the piezoelectric substrate between adjacent first and second fingers; two reflective gratings are disposed on the same side surface of the piezoelectric substrate as the interdigitated electrodes; in the first direction, the interdigitated electrodes are located between the two reflective gratings; the reflective gratings include multiple third fingers arranged sequentially along the first direction; a second groove is formed in the surface of the piezoelectric substrate between adjacent third fingers. The technical solution of this application can improve the steepness of the filter in the transition band.

The application provides a kind of based on interdigital electrode redox ion detection method and sensor, above-mentioned method includes: control power supply is applied on interdigital electrode first voltage value of first time period of preset positive voltage, make redox ion in liquid to be detected near first electrode enrichment;Wherein, in first electrode applies positive voltage, and in second electrode applies negative voltage, forms positive voltage;Control power supply is applied on interdigital electrode second voltage value of second time period of preset reverse voltage, makes redox ion after being reduced after enrichment in first electrode near and generates output current;According to the output current, determine the concentration of redox ion in liquid to be detected.The technology improves the concentration of redox ion during detection by the method of first enrichment and then detection of redox ion, improves detection precision.

Provided are a two-way fluid sensing device, a two-way fluid sensing method, and the manufacturing method of the fluid sensing device. The fluid sensing device includes: a substrate, which is a through-hole membrane with channels penetrating from the top surface to the bottom surface of the substrate; an interdigitated electrode having a plurality of interdigitated structures and disposed on the substrate; and a fluid sensing layer containing fluid sensing material and disposed on the interdigitated electrode. Therefore, fluid molecules can interact with the fluid sensing layer from both the top and bottom sides of the fluid sensing device, such that the fluid sensing device of the present invention can exhibit higher sensitivity, and can be vertically integrated with other electronic devices or 3D circuits.

The present disclosure relates to a method for processing capacitance values generated by capacitive sensors with interdigitated electrodes supported by a seat of a vehicle.

The invention relates to a method for determining the height and weight of a seat occupant; the method comprising: - a calculation (44) of a first value representing the pressure exerted on the seat from the resulting capacitance value of a first capacitive sensor with interdigitated electrodes located on the first lateral support edge and a resulting capacitance value of a second capacitive sensor with interdigitated electrodes located on the central part of the seat, - a calculation (46) of a second value representing the pressure exerted on the first lateral support edge of the seat from the resulting capacitance value of the first capacitive sensor, - a calculation (48) of a first value as a function of the first and second values, - a comparison (50) of the first value to a first threshold, generating a signal when the first value is lower than the first threshold. Figure to be published with the abbreviation: Figure 3

A method for preparing niobium carbide (MXene) micro supercapacitors using a spray coating method includes the following steps: Using an HCl-LiF mixture as an etchant, a few-layer Nb₂CT is prepared by hydrothermal reaction at 180℃ for 24 hours. x MXene dispersion; a spray mask with a hollowed-out interdigitated pattern is prepared using laser marking; the mask is adhered to a flexible substrate and placed on a 200℃ heating platform, with a spraying pressure of 0.2-0.5 MPa and a nozzle distance of 10-20 cm, and the dispersion is uniformly sprayed onto the hollowed-out areas of the mask. By controlling the number of spray passes, a binder-free patterned interdigitated electrode is directly formed; a PVA / H2SO4 gel electrolyte is prepared and coated onto the electrode surface, and after encapsulation, a flexible micro supercapacitor is obtained. This invention has a simple and controllable process, and the resulting device has high capacity, excellent flexibility, and long cycle stability, making it suitable for wearable electronic devices.

Systems and methods implementing a frost sensor comprising a substrate (S); and sub-sensors disposed on the substrate. The sub-sensors comprising: a resistance-based sub-sensor (RSS) formed of a first trace disposed on S in a winding pattern and configured to measure a temperature; a capacitance-based sub-sensor formed of a second trace defining a first electrode and a third trace defining a second electrode (wherein (i) the first and second electrodes comprise interdigitated fingers or other interdigitated structures (including, but not limited to, round, spiral interdigitated electrodes, etc.) configured to detect a change in capacitance due of frost, ice or water, and (ii) the second trace is integrally formed with the first trace); and another RSS formed of a fourth trace defining a third electrode and a fifth trace defining a fourth electrode (wherein (i) the third and fourth electrodes comprise interdigitated fingers or other interdigitated structures (including, but not limited to, round, spiral interdigitated electrodes, etc.) configured to detect a change in resistance due to the frost, ice or water, and (ii) the fourth trace is integrally formed with the third trace).

The invention discloses a flexible temperature sensor for lithium battery safety monitoring and a preparation method thereof. The flexible temperature sensor comprises a flexible substrate, an electrode, a temperature-sensitive film and a passivation layer, a polyimide film is used as the substrate, and an interdigital electrode is prepared on the surface of the substrate; mixing a reaction source with a solvent to form ink, and performing ink-jet printing on the surface of an electrode to obtain a patterned precursor film; and carrying out sintering reaction treatment on the precursor film by using a tubular furnace to obtain the temperature-sensitive film. And spin-coating a polyamide acid solution on the temperature-sensitive film and performing dehydration cyclization to generate a polyimide passivation layer to obtain a polyimide-packaged flexible temperature sensor which is attached to the outer surface of a lithium ion battery and is used for wearable contact detection of the battery. The flexible temperature sensor is insensitive to oxygen, strain and the like, the influence of environmental factors on the performance of the sensor is avoided, the temperature detection precision can be remarkably improved, the battery temperature can be monitored in real time, and the flexible temperature sensor is used for achieving battery safety management.

This invention relates to a method for preparing and applying a ternary heterostructure nanosheet of tungsten diselenide / tin diselenide / tin monoselenide, belonging to the field of gas sensor technology. The invention discloses a ternary heterostructure nanosheet of tungsten diselenide / tin diselenide / tin monoselenide and its application as a sensing material in a highly selective and sensitive flexible NO2 gas sensor. The invention utilizes a liquid-phase growth method, using SnSe2 nanosheets, ammonium tungstate, and diphenyldiselenoether as raw materials, and varying reaction conditions such as temperature, reaction time, and raw material content to prepare the ternary heterostructure nanosheet of tungsten diselenide / tin diselenide / tin monoselenide. Subsequently, these nanosheets are sprayed onto interdigitated electrodes and dried to form a film, thus preparing a chemielectric resistive gas sensor capable of detecting low concentrations of nitrogen dioxide gas at room temperature. It not only possesses high sensitivity and selectivity but can also be applied to flexible NO2 gas sensing.

The invention discloses an array resonance tunneling diode terahertz oscillator and a terahertz source device, which are applied to the technical field of oscillation emission sources, a lower electrode and an upper electrode form an interdigital electrode structure, and an S-shaped gap is formed between the lower electrode and the upper electrode; the lower end of the resonant tunneling diode junction region is connected with the lower electrode, and the upper end of the resonant tunneling diode junction region is connected with the upper electrode through the conductive connecting layer; the connecting resistor is electrically connected with the lower electrode and the upper electrode in the S-shaped gap, and the S-shaped gap is divided into a U-shaped slot antenna and a linear slot antenna based on the connecting resistor; a linear resonant tunneling array element is formed based on the resonant tunneling diodes spanning the linear slot antenna, and a U-shaped resonant tunneling array element is formed based on the resonant tunneling diodes spanning the U-shaped slot antenna. Coherent power coupling between different resonant tunneling array elements is realized through connecting resistors, and the total radiation power can be improved to a milliwatt magnitude by combining a phase regulation design of a U-shaped slot structure.

The invention discloses a floating type multi-parameter water quality monitoring microsystem and a preparation method thereof, and belongs to the technical field of water quality monitoring. The water quality monitoring microsystem sequentially comprises a functional floating carrier substrate, a flexible circuit module and an insulating packaging layer from bottom to top, the flexible circuit module comprises a flexible insulating dielectric layer, a planar spiral inductance coil is arranged on the upper surface of the flexible insulating dielectric layer, and a plurality of interdigital electrodes are arranged on the lower surface of the flexible insulating dielectric layer; each interdigital electrode is connected with the planar spiral inductance coil to form an LC resonant circuit of which the working frequencies are not overlapped; the surfaces of the interdigital electrodes are coated with ion sensitive membranes respectively; a through detection window is formed in the position, corresponding to the interdigital electrode, of the functionalized floating carrier substrate, so that the interdigital electrode can be directly contacted with a water body to be detected below through the detection window; and the insulating packaging layer completely covers the planar spiral inductance coil. The system can be used for monitoring water quality, and has the advantages of good real-time performance, high detection precision and the like.

This invention discloses a chemiluminescence gas sensor based on polyoxometalates (POMs), and relates to its fabrication method and application. The sensor is suitable for detecting ammonia at room temperature. The gas sensor includes an adapter base and a sensing element, wherein the sensing element consists of interdigitated electrodes and a sensitive material loaded on the electrode surface. This sensitive material is a composite material of POMs and SnO2. POMs, as excellent electron acceptors, possess good redox properties, thermal stability, and photosensitivity. When combined with SnO2, they can effectively suppress electron-hole recombination, thereby significantly improving the gas-sensing performance of the semiconductor material. Compared with existing technologies, the sensor provided by this invention exhibits high response characteristics to ammonia at room temperature, while also demonstrating excellent selectivity and repeatability.

This utility model relates to a sensing device for analyzing the degree of aging and degradation of liquid or paste-like materials and the impurity content in the materials, and a wind power generation device. The sensing device includes: a vibration unit, which includes a crystal oscillator that applies shear vibration to the materials under an excitation voltage; a sensing unit, which includes at least one sensor composed of interdigitated electrodes arranged on the vibration unit to detect changes in the dielectric properties of the materials under shear vibration; and a calculation unit, which is communicatively connected to the vibration unit and the sensing unit, respectively. The calculation unit receives and processes a first signal from the vibration unit and a second signal from the sensing unit, and determines the aging and degradation of the materials and the impurity content in the materials based on the first and second signals.

The utility model provides a kind of integrated pressure-sensing heating film, include structure: flexible dielectric layer;The interdigitated electrode layer of attachment in the dielectric layer one side, the interdigitated electrode respectively leads out electric property, a electrode electrically grounded, another root adds voltage;The electrode array layer of attachment in the dielectric layer other side, evenly distribute in flexible dielectric layer each area and lead to port, respectively test each area and the potential difference change of ground electrode in interdigitated electrode layer;PPTC film layer is attached on the interdigitated electrode layer, and realize surface heating by the potential difference of the interdigitated electrode conduction;Heat-conducting insulating film layer is respectively attached on the PPTC film layer and the electrode array layer.The utility model compactly integrates self-limiting temperature heating function PPTC device and capacitive pressure sensor, flexible and foldable, heating function and area pressure monitoring function integration degree is high, help the safety and light weight of power battery.

This invention provides a composite nanofiber membrane for detecting C3F6, a component of C4F7N gas decomposition, as well as its preparation method and sensor. The composite nanofiber membrane comprises a polymer nanofiber substrate and a metal-organic framework dispersed within the polymer nanofiber substrate. The metal-organic framework is MIL-101(M), where M represents a metal element, including at least one of Cr, Cu, and lanthanides. The composite nanofiber membrane is coated on the surface of an interdigitated electrode, serving as a sensor for detecting C3F6 gas. The sensor of this invention can generate a response within 25 seconds and still exhibits a certain sensitivity (above 3%) to 10 ppm of C3F6 gas, meeting the requirements for high sensitivity and rapid response in the detection of C3F6, a decomposition product of C4F7N gas.

High throughput interleaved electrode tab manufacturing processes are provided. A method is disclosed that includes depositing a first strip of active material for a battery on a conductive foil, the first strip having a first edge and an opposing second edge, depositing a second strip of active material for a battery on a conductive foil, where the second strip has a first edge and an opposing second edge, a first edge of the second strip is spaced a distance from a second edge of the first strip for the active material of the battery, a first plurality of tabs extending in a first direction away from the second edge of the first strip is formed in the conductive foil, and a second plurality of tabs extending in a second direction away from the first edge of the second strip is formed in the conductive foil.

The invention relates to the technical field of energy collection and sewage power generation, and discloses a friction power generation water pipe in an independent layer mode and a preparation method of the friction power generation water pipe. The interdigital electrode is used as an electrode layer and is tightly attached to the outer side of the FEP plastic water pipe; and the PDMS packaging material is used as a packaging layer and is used for integrally packaging the interdigitated electrode and the FEP plastic water pipe. The preparation method comprises the following steps: providing an FEP plastic water pipe, manufacturing a copper interdigitated electrode, tightly attaching the electrode to the outer side of the water pipe, and finally packaging by filling and curing PDMS. When flowing through the water pipe, the water flow is repeatedly contacted and separated from the pipe wall of the water pipe attached with the electrode, and the generated current flows out through the external electrode and is stored for use. Moreover, the whole device is easy to manufacture, can meet the requirements of water pipes with different sizes and shapes, and is suitable for being applied to power generation of various water pipes.