Piezoresistive transducer probe based on electric conduction high molecule sensitivity membrane and preparation method thereof

Abstract

The invention relates to a piezoresistive sensor probe based on a conductive polymeric sensitive membrane and a preparation method thereof, pertaining to the technical field of a force sensor. The probe consists of a base, an interdigitated electrode printed on the base and the conductive polymeric sensitive membrane vulcanized on the electrode; the membrane is essentially composed of conductive carbon black as a conductive phase and single-pack room-temperature vulcanized silicone rubber as an insulation phase. The method comprises the steps that: powder of the conductive carbon black and the liquid single-pack room-temperature vulcanized silicone rubber are mixed in an ethane organic solvent; mechanical stirring is carried out in sonic oscillation, and carbon black suspending liquid with even dispersion and good liquidity is produced; a cascade spin coating method is used for coating the suspending liquid on the base provided with the interdigitated electrode to form a conductive polymeric membrane; then packaging and vulcanization are carried out, and the piezoresistive sensor probe is formed. By adopting the method of the invention, sensor probes with thin structure, good flexibility, wide measuring range and high precision can be manufactured and are especially applicable to the online monitoring of contact force and extrusion force between curved surfaces.

Description

technical field

[0001] The invention belongs to the technical field of force sensors, and in particular relates to the processing technology of ultra-thin and flexible force-sensitive materials. Background technique

[0002] The concept of "compliant sensor" can be traced back to the late 1980s. Many special structures in aerospace vehicles have brought great difficulties to the installation of traditional rigid sensors. People hope that the sensor has good flexibility, is not limited by the shape of the object to be measured, and can be attached to various regular or irregular surfaces to achieve normal sensing functions. After entering the 1990s, scientists in the United States, France, Japan, Switzerland, Portugal and other countries began to conduct research on compliant sensors, and many new sensor materials and structures were applied to this research field.

[0003] The compliant force sensor is a kind of compliant sensor, which is mainly used in the measurement of e...

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