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Microelectromechanical holding device, image sensor device and method for manufacturing a microelectromechanical holding device

PendingCN122270926Aachieve offsetcheap constructionElectrode pairMechanical engineering
A microelectromechanical holding device for an image sensor comprises a substrate and at least two deflection devices arranged on the substrate. Each deflection device has a frame for connection with the image sensor and at least one electrode device. The electrode assembly has at least one electrode pair. For each electrode pair, a first electrode is fixedly connected with the substrate. A second electrode is coupled with the frame. The electrode pair can be actuated such that the frame is deflected in a predefined first direction, which depends on the electrode pair.
Owner:ROBERT BOSCH GMBH