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67 results about "Force-sensing resistor" patented technology

A force-sensing resistor is a material whose resistance changes when a force, pressure or mechanical stress is applied. They are also known as "force-sensitive resistor" and are sometimes referred to by the initialism "FSR".

MEMS polysilicon nanofilm pressure sensor chip and manufacturing method thereof

The invention provides a MEMS polysilicon nanofilm pressure sensor chip and a manufacturing method thereof, and relates to a sensor chip and a manufacturing method thereof. The sensor includes a monocrystalline silicon substrate (1), a pressure sensing film (4) having the section of a flat polysilicon is arranged on the silicon substrate, an enclosed cavity (2) is formed between the pressure sensing film and the substrate by taking silica as a sacrificial layer, the upper surface of the pressure sensing film (4) is provided with four polysilicon nanofilm force sensing resistors (5), the four polysilicon nanofilm force sensing resistors (5), the pressure sensing film (4), and metal leads are isolated by insulation layers (7), the four force sensing resistors (5) are connected to form a Wheatstone bridge via the metal leads to convert the pressure to voltage to output, and sealed corrosion holes (3) are arranged outside the edge of the pressure sensing film (4). The sensor preparing method is compatible with integrated circuit technology and is easy to integrate. The sensor has the characteristics of high linearity sensitivity, wide operational temperature range, high overload capability, easy integration, and low cost.
Owner:SHENYANG INSTITUTE OF CHEMICAL TECHNOLOGY

Touch display device, pressure sensing unit and manufacturing method of pressure sensing unit

InactiveCN106775043AImprove pressure response sensitivityOperating medium is not limitedInput/output processes for data processingForce-sensing resistorDisplay device
The invention relates to a touch display device, a pressure sensing unit adopted by the touch display device and a manufacturing method of the pressure sensing unit. The pressure sensing unit comprises a base material, multiple first electrodes, multiple second electrodes and multiple force sensing resistor layers, wherein the multiple first electrodes, the multiple second electrodes and the multiple force sensing resistor layers are formed in the surface of the base material, the multiple first electrodes extend in the first direction and are long strip-shaped, the multiple first electrodes are distributed at intervals in the second direction, the multiple second electrodes are mutually arranged in the gaps between any two adjacent first electrodes at intervals, each of the force sensing resistor layers passes over one corresponding first electrode and is connected to the two second electrodes at the two sides of the corresponding first electrode. The pressure sensing unit is arranged between a protection cover and a display unit of the touch display device, so that the sensitivity of pressure sensing is high, and the method of pressure sensing does not limit operational media.
Owner:NANCHANG O FILM TECH CO LTD +2
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