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Member with thin film sensor and manufacturing method of member

A thin-film sensor and component technology, which is applied in the field of materials and sensing, can solve problems affecting reliability, adhesive layer failure, and inability to monitor, and achieve good adhesion, good stability, and reliable protection.

Inactive Publication Date: 2014-01-01
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the application of piezoresistive / piezoelectric sensors has covered many fields such as aviation / aerospace, large mechanical devices, and civil buildings, at present, piezoresistive / piezoelectric sensors are pasted on the surface of structural parts. On the one hand, with the As the environment and time change, the adhesive layer will often fail, which will affect the reliability of its monitoring; Among them, it is impossible to monitor the health status of its structure by pasting. Therefore, so far, there is no reliable method to monitor the health status of metal structural parts working in high temperature and harsh environments.

Method used

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  • Member with thin film sensor and manufacturing method of member
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  • Member with thin film sensor and manufacturing method of member

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0058] Embodiment 1: Ni-based superalloy surface film strain gauge

[0059] This embodiment is a Ni-based high-temperature alloy aircraft engine blade component. In this embodiment, the NiCrAlY alloy layer and its thermal oxide layer are used to form a buffer layer, and the Al 2 o 3 The thin film is used as an insulating layer. Since the material properties of the NiCrAlY thin film and the Ni-based superalloy are very close, the adhesion of the NiCrAlY thin film on the surface of the Ni-based superalloy is good. The surface of the film is naturally oxidized to form a layer of Al 2 o 3 thin film, since the thermal oxide layer is oxidized by the NiCrAlY film, the adhesion between the thermal oxide layer and the NiCrAlY film is also very good; electron beam evaporation is used to grow Al 2 o 3 The thin film acts as an insulating layer, since the main component of the thermal oxide layer is Al 2 o 3 , therefore, the insulating layer is actually in the Al 2 o 3 Al deposited...

Embodiment 2

[0061] Example 2: Development of a thin-film pressure sensor on a stainless steel surface

[0062] According to the present invention, an ultra-high-voltage rail pressure sensor for a high-pressure common-rail EFI diesel engine is also produced on a stainless steel substrate. In this embodiment, a NiCrSi alloy layer and its thermal oxidation layer are used to form a buffer layer. 2 The film is used as an insulating layer. Since the properties of the NiCrSi film are very close to the stainless steel substrate, the NiCrSi film has good adhesion on the surface of the stainless steel substrate. After the deposition of the NiCrSi adhesive layer film, it can be naturally oxidized on the surface of the NiCrSi film after high temperature heat treatment. A layer of SiO 2 thin film, since the thermal oxide layer is oxidized by the NiCrSi film, the adhesion between the thermal oxide layer and the NiCrSi film is also very good; electron beam evaporation is used to grow SiO 2 The thin fil...

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Abstract

The invention provides a member with a thin film sensor, and belongs to the field of material and sensing technology. The thin film sensor is arranged on the surface of the member in a deposited or coated mode. The member with the thin film sensor has the advantages that manufacturing of the thin film sensor on the surface of the members with various curve surfaces can be adapted to, the sensor has good adhesive force, the sensor is protected reliably, and long-time work stability of the thin film sensor is good.

Description

technical field [0001] The invention belongs to the technical field of materials and sensing. Background technique [0002] Even in today's information age, structural materials are still the main body of various large-scale projects, machinery and vehicles. Structural materials will inevitably produce fatigue, damage, fracture and even destruction during the service process, and seriously endanger the safety of people's lives and property. Therefore, the health status of its structure must be monitored throughout its life cycle. Structural health monitoring is of great significance to aviation / aerospace vehicles. After the Columbia air crash, NASA began to introduce structural health monitoring systems in three active spacecraft. Boeing also plans to introduce a full life cycle health monitoring system in the new 7E7 aircraft. . At present, my country is developing large aircraft, and it is very necessary to monitor the health of the aircraft. According to statistics, abo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/16G01L1/20
Inventor 刘兴钊蒋洪川蒋书文张万里李言荣
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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