The application discloses a kind of
semiconductor special gas adjusting module, comprising: bottom fixed plate, valve, the bottom fixed plate is fixedly installed with base module
assembly, several valves are installed on base module
assembly, valve includes pressure reducing valve, inlet air manual switch valve,
check valve, outlet air manual switch valve, flow controller;Base module
assembly includes base module one, base module two and base module three;Air passage is opened in base module one, base module two and base module three;The air passage in base module one and base module two is divided into two independently;Air hole, air passage,
air cavity and plug-in surface in base module assembly are all treated with electro-
polishing.The application occupies less space, realizes the series connection of multiple valve bodies, reduces the gas movement path, and further reduces the possibility of
dust pollution, the structure is smaller, the air passage is connected after
metal-to-
metal sealing plug-in, reduces the connection mode of thread,
welding, further reduces the possibility of gas being contaminated by dust.