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47 results about "Electro polishing" patented technology

Electropolishing is an electrochemical finishing process that removes a thin layer of material from a metal part, typically stainless steel or similar alloys. The part is immersed in a temperature controlled bath of electrolyte (typically mixtures of sulfuric acid and phosphoric acid)...

Method of forming copper wiring in a semiconductor device

Disclosed is a method of forming a copper wiring in a semiconductor device. A copper barrier metal layer and a copper seed layer are sequentially formed along the surface of an interlayer insulating film including damascene patterns. In a state that a wafer is then loaded onto an electrical plating apparatus in which a copper plating solution is filled and a negative (-) power supply is also applied to the wafer, copper is plated so that the damascene patterns are sufficiently filled, thereby forming a copper layer. Next, the copper layer is polished in the plating solution by means of the electro-polishing process by changing the negative (-) power supply to the positive (+) power supply. Due to this, the surface of the copper layer is flat over the entire wafer. Thereafter, a chemical mechanical polishing process is performed until the surface of the interlayer insulating film is exposed, thereby forming copper wirings within the damascene patterns. As such, an uneven surface of the copper layer plated by the electroplating method is etched in the plating solution, thus making flat the surface of the copper layer and thin the thickness of the copper layer. It is thus possible to prevent a dishing phenomenon or an erosion phenomenon in a subsequent chemical mechanical polishing process. Therefore, the process margin of the chemical mechanical polishing process could be increased and process characteristics could be improved.
Owner:KEY FOUNDRY CO LTD

Artery medicine elution bracket

The present invention discloses an artery medicament elution bracket, which is a net-shaped hollow tubular body made by processing a cobalt-chromium alloy with laser engraving and electro-polishing cochrome. The bracket comprises more than one annular-wave-shaped supporting bar and connecting rods which are alternately and spirally connected between the supporting bars. The shape of the connecting rod is an array of waves formed by more than one connected sinusoidal waveform unit, and curve-shaped connected bend angles with different radiuses are positioned at the fold positions of wave crests and the wave troughs of the sinusoidal waveform unit. The shape of the connecting rod is an S-shaped sinusoid section connected with a straight line section. The surface of the bracket is covered by a medicament coating. The fold positioned at the wave crests and the wave troughs of the sinusoidal waveform unit adopt curve-shaped bend angles with unequal radiuses so that the blend pressure of the support bars is reduced, the rebound degree is reduced, and the bracket abscission incidence rate due to the insufficient retentivity is reduced. After being pressed and held, the bracket has a passing outer diameter of between 1 and 1.08mm. The possibility and the operability of the bracket are apparently improved.
Owner:万瑞飞鸿(北京)医疗器材有限公司

Method of forming copper wiring in a semiconductor device

Disclosed is a method of forming a copper wiring in a semiconductor device. A copper barrier metal layer and a copper seed layer are sequentially formed along the surface of an interlayer insulating film including damascene patterns. In a state that a wafer is then loaded onto an electrical plating apparatus in which a copper plating solution is filled and a negative (−) power supply is also applied to the wafer, copper is plated so that the damascene patterns are sufficiently filled, thereby forming a copper layer. Next, the copper layer is polished in the plating solution by means of the electro-polishing process by changing the negative (−) power supply to the positive (+) power supply. Due to this, the surface of the copper layer is flat over the entire wafer. Thereafter, a chemical mechanical polishing process is performed until the surface of the interlayer insulating film is exposed, thereby forming copper wirings within the damascene patterns. As such, an uneven surface of the copper layer plated by the electroplating method is etched in the plating solution, thus making flat the surface of the copper layer and thin the thickness of the copper layer. It is thus possible to prevent a dishing phenomenon or an erosion phenomenon in a subsequent chemical mechanical polishing process. Therefore, the process margin of the chemical mechanical polishing process could be increased and process characteristics could be improved.
Owner:KEY FOUNDRY CO LTD

Method for preparing composite film photoelectrode

The invention discloses a method for preparing a composite film photoelectrode, and the method comprises the following steps of: preparing an electrode matrix: taking platinum-plated titanium conductive glass as an electrode substrate, soaking the electrode substrate in a hydrogen peroxide solution, washing the electrode substrate with water, and performing ultrasonic treatment to form a film electrode layer; then, putting the film electrode layer into a sodium hydroxide solution for ultrasonic treatment, repeatedly carrying out ultrasonic cleaning by using deionized water, and then, drying; finally, electropolishing and ultrasonically washing with water in a sodium hypochlorite electrolytic cell to prepare the electrode matrix, and drying the electrode matrix; and pretreating the electrode matrix: adding graphene into a mixed solution of sodium carboxymethylcellulose and styrene to obtain a coating solution; performing coating solution spin-coating on the electrode matrix, and performing annealing treatment to obtain an electrode preform; and preparing a composite film photoelectrode: preparing an LDH electrode from the electrode preform by using an electro-deposition method, placing the prepared LDH electrode in a muffle furnace, and calcining and air-cooling to prepare an MMO electrode; and preparing an MMO photoelectrode covered by a lead dioxide film by using an electrodeposition method, washing with water, and drying.
Owner:陕西易莱德新材料科技有限公司

Preparation method for porous aluminium oxide bionic multilayer dewatering surface

The invention relates to preparation of a porous aluminium oxide bionic multilayer dewatering surface, belonging to the field of thin films. The invention aims to solve the technical problems that the current process for preparing a porous aluminium oxide dewatering thin film is relatively complex; the cost is high; and the range of a thin film substrate is limited by the preparation method of chemical etching, so that a preparation method for the porous aluminium oxide bionic multilayer dewatering surface is provided. According to the method, a degreased and processed aluminium sheet is subjected to electropolishing, and then is subjected to oxidation for twice; a prepared aluminium oxide film is soaked; a reducing agent is added; an aired aluminium/argentum oxide multilayer film is soaked in an ethanol solution of perfluorodecanethiol; and then the film is taken out and blow-dried by nitrogen so as to obtain the porous aluminium oxide bionic multilayer dewatering surface. The method is simple in process and low in cost; the prepared porous aluminium oxide dewatering thin film has good heat resistance, chemical stability and high mechanical strength and dimensional stability, and can be widely promoted for use.
Owner:CHANGZHOU SIYU ENVIRONMENTAL PROTECTION MATERIAL SCI & TECH

Electropolishing method for cylindrical stainless steel thin-walled bellows

The invention belongs to the technical field of aerospace surface treatment and particularly relates to an electropolishing method for a cylindrical stainless steel thin-wall corrugated pipe. The electropolishing method comprises the following steps that 1, degreasing treatment is conducted on a stainless steel corrugated pipe blank; 2, acid pickling treatment is conducted on the corrugated pipe degreased in the step 1; 3, the corrugated pipe obtained after acid pickling in the step 2 is clamped; 4, electropolishing treatment is conducted on the corrugated pipe clamped in the step 3; 5, passivating treatment is conducted on the corrugated pipe obtained after electropolishing in the step 4; and 6, after electropolishing, the surface is cleaned with distilled water and is dried through blowing. According to the shape of the compensator corrugated pipe, a special clamping tool and an inner cathode are prepared, meanwhile technological parameters are adjusted again, and electropolishing production is conducted with special bath solution. The electropolishing method is used, the inner and outer surfaces of the polished corrugated pipe are good in glossiness, the thickness and roughnessmeet tolerance requirements, and the surfaces are free of pit or spot phenomenon.
Owner:CAPITAL AEROSPACE MACHINERY +1

Method for coating silicon nitride film layer on piston ring surface

The invention discloses a method for applying a silicon nitride film layer on the surface of a piston ring. The method comprises the following steps of: electro-polishing and ultrasonic-cleaning the piston ring; disposing the cleaned piston ring in RF plasma-enhanced chemical vapor deposition equipment, vacuumizing the system to 5*10<-3> Pa, reacting in the presence of silicane and ammonia gas asreaction gas resource at a deposition temperature of 300 to 500 DEG C and RF power of 90 to 150 W for 10 to 30 min to deposit the silicon nitride film on the upper surface and the side surface of thepiston ring, wherein the a flow rate of the silicane is 15 to 45 sccm and the flow rate ratio of the silicane to the ammonia gas is 1 / 2 to 1 / 4; and naturally cooling and taking out. The surface hardness of the piston ring deposited with the silicon nitride film layer is 900 to 1,400 HV, which is far higher than the hardness 800 HV of common chromium-plated products. The film layer has good corrosion resistance, abrasion resistance and self-lubrication characteristic, thus effectively improving the use performance of the piston ring, and improving the operation stability and prolonging the service life. The method overcomes the disadvantages of conventional chromium-plated piston ring such as larger energy consumption, serious pollution and complex process.
Owner:ZHEJIANG SCI-TECH UNIV
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