The invention discloses a
superconducting cavity nitrogen doping method. The method comprises the following steps that 1), a
superconducting cavity is integrally put into an ultrasonic cleaning tank for cleaning, then the inside and the outside of the
superconducting cavity are washed clean by using pure water, and are dried in the air, then buffering chemical
polishing is carried out on the innersurface of the superconducting cavity, and then, the inner surface of the superconducting cavity is cleaned, and is dried in the air; 2), the superconducting cavity treated through the step 1) is putinto a
vacuum furnace for heating, and after the superconducting cavity is heated to a set temperature,
hydrogen removal treatment is carried out on the
vacuum furnace at the set
temperature and pressure; 3), after the
hydrogen removal treatment is finished, a gas extraction valve of the
vacuum furnace is closed, high-purity
nitrogen is injected, the pressure in the vacuum furnace is kept at 2-4Pa, and the
nitrogen is doped into the surface of the superconducting cavity; 4), after nitrogen injection is finished, the
nitrogen removal treatment is carried out on the vacuum furnace; and 5), after the
nitrogen removal treatment is finished, time is set for vacuum cavity heat preservation, and
nitrogen doping of the superconducting cavity is completed. According to the method, the surface resistance of the superconducting cavity can be further reduced, so that the
power consumption of the superconducting cavity is reduced.