The application provides a testing device and method for a hot-field emission
electron gun for a
scanning electron microscope, and belongs to the technical field of
electron microscope scanning. The testing device for the hot-field emission
electron gun for the
scanning electron microscope comprises an
electron gun, a main body, a vacuum obtaining
assembly, a fluorescent screen, a deflection structure, a vacuum gauge and a beam
current meter. In the detection process, the
electron gun is first placed in the detection space of the main body, the detection space is brought to a
vacuum state through cooperation of a mechanical pump, a molecular pump and an
ion pump, and then the performance of the hot-field emission
electron gun for the
scanning electron microscope is quantitatively evaluated through the fluorescent screen, the deflection structure, the vacuum gauge and the beam
current meter, including neutral property,
voltage resistance, brightness, beam deflection characteristics, current at an
anode and beam current stability. Through the device, various performance tests can be performed on the electron gun, and the overall detection efficiency is improved.