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69 results about "Ion pump" patented technology

An ion pump (also referred to as a sputter ion pump) is a type of vacuum pump which operates by sputtering a metal getter. Under ideal conditions, ion pumps are capable of reaching pressures as low as 10⁻¹¹ mbar. An ion pump first ionizes gas within the vessel it is attached to and employs a strong electrical potential, typically 3–7 kV, which accelerates the ions to into the a solid electrode. Small bits of the electrode are sputtered into the chamber. Gasses are trapped by a combination of chemical reactions with the surface of the highly-reactive sputtered material, and being physically trapped underneath that material.

High-purity NF3 intake control device and method of ultra-high vacuum system

InactiveCN110927240AEasy to operateMeet the photocathode activation experimental requirementsMaterial analysis by electric/magnetic meansMass spectrometersUltra-high vacuumInlet valve
The invention discloses a high-purity NF3 air inlet control device and method of an ultrahigh vacuum system. The device comprises a primary pressure reducing valve, a secondary pressure reducing valve, a ball valve, an adjustable trace air inlet valve, a tee joint, a turbo molecular pump angle valve, a quadrupole mass spectrometer, a vacuum gauge, an ultrahigh vacuum activation chamber, a titaniumsublimation pump, a sputtering ion pump, a turbo molecular pump and a mechanical pump. The method comprises the following steps: firstly, closing the trace air inlet valve, and opening the first-stage pressure reducing valve, the second-stage pressure reducing valve and the ball valve, so that the pipeline is filled with NF3 gas; then closing the ball valve, opening an angle valve of the turbo molecular pump, and extracting residual gas in the gas inlet pipeline; then closing the angle valve, opening the ball valve, and flushing the air inlet pipeline with NF3; and finally, controlling the NF3 gas entering the ultrahigh vacuum system through an adjustable trace gas inlet valve, and respectively detecting the partial pressure of the NF3 and the vacuum degree of the system by using a quadrupole mass spectrometer and a vacuum gauge. Residual air in the air inlet pipeline can be removed, and the air inflow of NF3 can be slightly and accurately controlled.
Owner:NANJING UNIV OF SCI & TECH

Magneto-optical trap device for gravity measurement

The invention relates to a magneto-optical trap device for gravity measurement, wherein a magneto-optical trap capture area is provided on the upper part in a vacuum cavity, and an interference area and a detection area are provided on the lower part in order; a rubidium source is connected to a rubidium source angle valve, and the rubidium source angle valve and an ion pump are respectively connected by means of sealing to two obliquely arranged glass pipelines outside the vacuum cavity; a Raman mirror is set directly below the vacuum cavity; a fluorescence collection device is set at a horizontal position corresponding to the detection area outside the vacuum cavity, and two photodetectors are set at the outer side of the fluorescence collection device; first, second and third capture light are at an angle of 120 degrees in the same horizontal plane and are irradiated at the magneto-optical trap capture area in the horizontal direction; a composite beam is respectively composed of the lights at four frequencies including the capture light, detection light, Raman light and stop light in the vertical direction, wherein the capture light is reflected by the Raman mirror to form fourth and fifth capture lights, and five capture lights and a pair of reverse Helmholtz coils form a magneto-optical trap. The device can make the gravity head sensitive head compact in structure and reduced in size.
Owner:TIANJIN NAVIGATION INSTR RES INST

Space strontium optical clock built-in vacuum high-temperature evaporation source device

The invention discloses a space strontium optical clock built-in vacuum high-temperature evaporation source device. A vacuum electrode is electrically connected with a heating device through a flange,the exterior of the heating device is provided with a vacuum cavity, and the vacuum cavity is connected with an ion pump, a collimation cavity and an angle valve; heating wire bare wires in the heating device are evenly arranged through machinable ceramic and mounted around a crucible connected with a collimator, a thermocouple mounting hole is preserved in the bottom of the crucible, a thermocouple and heating wires are connected with an external temperature controller through a flange integrated electrode, the whole crucible is arranged at a heat-insulation base and a heat-insulation hood an connected with a supporting column of the flange through a general bolt, and the flange is connected with the vacuum cavity through a bolt. The space strontium optical clock built-in vacuum high-temperature evaporation source device has the advantages that a built-in vacuum is achieved, the size is small, heat insulation performance is good, energy consumption is small, and disassembly and assembly are convenient, and the space strontium optical clock built-in vacuum high-temperature evaporation source device can be generalized and applied to the technical field of quantum evaluation.
Owner:NAT TIME SERVICE CENT CHINESE ACAD OF SCI

Small cold atomic clock device and method for time keeping system

The invention discloses a small cold atomic clock device and method for a time keeping system. A two-dimensional magneto-optical trap is arranged in the atomic beam emitting direction of an atomic furnace; an atomic beam emitted from the two-dimensional magneto-optical trap enters a three-dimensional magneto-optical trap through a collimating device; a magnetron microwave cavity is placed in the three-dimensional magneto-optical trap; after cold atom preparation, atomic groups enter the magnetron microwave cavity under the action of gravity; atomic groups pass through the magnetron microwave cavity and then enter an annular microwave cavity; atoms passing through the annular microwave cavity enter a population detection device; the population detection device is connected with an ion pump,the ion pump maintains the vacuum environment of the whole system, three layers of magnetic shielding cylinders made of permalloy materials are sequentially arranged outside the system, an optical shutter is further arranged between the three-dimensional magneto-optical trap and the annular microwave cavity, and cold atom loading and microwave excitation processes are allowed to be implemented inparallel. The cold atomic clock device has the advantages of compact structure, short working period and the like, and the cost and size of the cold atomic clock can be remarkably reduced.
Owner:NAT TIME SERVICE CENT CHINESE ACAD OF SCI

High-temperature and high-vacuum annealing furnace

The invention relates to vacuum coating experimental equipment, in particular to a high-temperature and high-vacuum annealing furnace. The furnace is characterized in that an ion pump, an annealing chamber cavity, a sample introduction chamber cavity and a molecular pump are sequentially connected, and the molecular pump is connected with a mechanical pump through a pipeline; gate valves are arranged between the ion pump and the annealing chamber cavity, between the annealing chamber cavity and the sample introduction chamber cavity and between the sample introduction chamber cavity and the molecular pump; and a fixed upper heater and a lower heater capable of lifting up and down are arranged in the annealing chamber cavity, a multi-layer sample library capable of lifting up and down is arranged in the sample introduction chamber cavity, and a manual transfer rod manipulator is mounted at one side of the sample introduction chamber cavity. Sample exchange with an annealing chamber can be rapidly completed through the high-temperature and high-vacuum annealing furnace under the vacuum condition, and it is guaranteed that the annealing chamber is in a high-vacuum state all the time. According to the high-temperature and high-vacuum annealing furnace, the cold-state limit vacuum degree of the annealing chamber can reach 10<-8> Pa ultrahigh vacuum, the hot-state vacuum degree can reach 10<-6> Pa when the annealing chamber is heated to 1600 DEG C, and long-time heat preservation annealing of a sample at the temperature not higher than 1600 DEG C can be achieved.
Owner:SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI

Ganoderan tripeptide filtering system process device

ActiveCN104788534AHigh and low temperature process purificationHigh purityPeptide preparation methodsBulk chemical productionFilter systemEngineering
The invention discloses a ganoderan tripeptide filtering system process device. The ganoderan tripeptide filtering system process device is composed of a transporting pump, a stock solution tank, a stop valve, a control valve, a high-pressure pump, a pressure generator, a four-way diverter valve, a series tube, a second four-way diverter valve, a shunt tube, an ultrahigh pressure reaction tank, a polysaccharide peptide storage, a degradation reactor, a refluxing separator, a vacuum pump, a beta-reactor, a protein separator, an ion separator, an ion pump, a homogeneous purifier, a draft tube and a return tube. The ganoderan tripeptide filtering system process device is characterized in that the high-pressure pump and the pressure generator are connected with one end of the refluxing separator through a return tube screw and the other end of the refluxing separator is connected with the screw double-head connector of the high pressure reaction tank through a draft tube screw; a higher pressure than that of the supercritical fluid extracting method is adopted, an ultrahigh pressure is adopted to substitute the supercritical fluid needed temperature cooperation and the damage of the partial substances under high temperature can be avoided; the device is a pure physical extracting process device, the temperature is not higher than 20 DEG C when the ultrahigh pressure is 600 MPa, the low temperature process purifying degree is higher than that of the supercritical fluid extracting method, and the device is an innovative process device for producing the ganoderan peptide injection.
Owner:FEATURE-TEC (WUXI) FILTRATION TECH CO LTD

Hundred-kilovolt ultrafast electron diffraction device

The invention discloses a flexible and compact hundred-kilovolt ultrafast electron diffraction device which comprises an electron gun body, and the electron gun body comprises an electron gun chamber,and a direct-current photocathode electron gun body, a magnetic lens, a sample chamber, a pump light back incidence unit, a Faraday cup chamber and an imaging device arranged in the electron gun chamber, a sample displacement table is fixedly installed on the side face of the sample chamber, a sample fixing device is fixedly arranged in the sample displacement table, and a titanium sublimation pump, an ion pump, a molecular pump and a vacuum measuring device are fixedly arranged at the bottom of the sample chamber. According to the flexible and compact hundred-kilovolt ultrafast electron diffraction device, the direct-current photocathode electron gun body and the sample holder are flexible and multifunctional, so that the whole device can carry out various experimental detection, the sample holder is detachable and replaceable, and some devices needing to be connected in series between the electron gun body and the sample chamber can be connected to the sample rod; the complexity ofthe system is reduced, and the distance between the cathode and the sample is further shortened.
Owner:INST OF PHYSICS - CHINESE ACAD OF SCI

Device and method for rapidly measuring surface electric field noise of metal

ActiveCN111856165AQuick changeReduce the difficulty of measurement manipulationNoise figure or signal-to-noise ratio measurementElectrical testingEngineeringCcd camera
The invention discloses a device for rapidly measuring the surface electric field noise of metal. The device comprises a vacuum cavity, a CCD (Charge Coupled Device) camera, a first vacuum angle valve, an ion pump, a vacuum baffle valve, a three-way vacuum connector, a second vacuum angle valve, a three-dimensional driver, a three-dimensional nano moving table and a to-be-measured sample holder. The device further comprises a chip supporting frame arranged in the vacuum cavity, a calcium atom furnace and a filter circuit board are arranged on the chip supporting frame, and an ion trap chip isarranged in a chip containing hole of the filter circuit board. The invention further discloses a method for rapidly measuring the surface electric field noise of metal. The method comprises the stepsof ion trapping and laser cooling, ion quantum state control, ion imaging through the CCD camera and data processing. According to the invention, a metal sample to be measured can be rapidly replacedwithout destroying the vacuum degree of the ion trap; and meanwhile, under the condition that the measurement operation difficulty is reduced, a simpler and faster method is provided for detecting the surface electric field noise of the metal sample to be measured through ion imaging based on the CCD camera.
Owner:INNOVATION ACAD FOR PRECISION MEASUREMENT SCI & TECH CAS

Vacuum maintaining device for hydrogen atom maser and hydrogen atom maser

The invention discloses a vacuum maintaining device for a hydrogen atom laser, which comprises a neck channel arranged between an ionization bubble and an atom storage bubble, at least one adsorption pump and an ion pump, the ion pump is communicated with the adsorption pump, and the vacuum maintaining device is characterized in that the number of the adsorption pump is at least one; and each adsorption pump is arranged on the side edge of the neck channel and is independently communicated with the neck channel. According to the technical scheme, when the adsorbent is baked, activated and heated, a very complex cooling circulation system is not needed to cool the ionization bubble, the state selection magnet and the nearby shell, a large amount of heat energy is prevented from being transmitted to the ionization bubble, the state selection magnet and other components, and the vacuum failure of the hydrogen atom laser or the magnetic loss of the state selection magnet is avoided. And the adsorption pump is not sleeved on the neck channel any more, so that the volume structure is more compact, and the volume and the weight of the adsorption pump are greatly reduced. And after the valve and the flange are additionally arranged on the adsorption pump, the adsorption pump can be conveniently backed up, disassembled and assembled under the condition that the vacuum environment of the hydrogen atom laser is not damaged, and the service life of the hydrogen atom laser is effectively prolonged.
Owner:SHANGHAI PHOTONLINK ELECTRONIC TECH CO LTD

Device and method for inhibiting differential system inflation airflow effect

PendingCN113301704ASolve Airborne ProblemsSolving Vacuum Span ProblemsLinear acceleratorsNuclear energy generationEngineeringSuperconducting accelerator
The invention relates to a device for inhibiting an inflation airflow effect of a differential system. The output end of a differential vacuum system is connected with one end of a deflection magnet and one end of a vacuum chamber through a transmission pipeline; the other ends of the deflection magnet and the vacuum chamber are connected with the output end of the superconducting accelerator through a transmission pipeline; a the superconducting accelerator is used for outputting charged particle beams; and an extraction system is arranged above the deflection magnet and the vacuum chamber, and the input end of the extraction system is communicated with the deflection magnet and the upper portion of the middle of the vacuum chamber through a transmission pipeline. The invention further relates to a method for restraining the inflation airflow effect of the differential system, and the method comprises the steps that the inclination angle of the spoiler is set to be the optimal restraining angle; a beam output by a superconducting accelerator is deflected by a deflection magnet and a vacuum chamber and then enters a differential vacuum system, and He gas output by a differential pipeline enters a collection vacuum chamber through the deflection magnet and the vacuum chamber; and the He gas flow collected in the collection vacuum chamber is disturbed by a spoiler and then is pumped out by a three-pole sputtering ion pump.
Owner:INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI

A high temperature and high vacuum annealing furnace

The invention relates to vacuum coating experimental equipment, specifically a high-temperature and high-vacuum annealing furnace, in which an ion pump, an annealing chamber cavity, a sampling chamber cavity, and a molecular pump are connected in sequence, and the molecular pump is connected to a mechanical pump through a pipeline. Between the pump and the cavity of the annealing chamber, between the cavity of the annealing chamber and the cavity of the sampling chamber, and between the cavity of the sampling chamber and the molecular pump, there are flap valves; the cavity of the annealing chamber is equipped with a fixed upper heater And the lower heater that can be lifted up and down, the cavity of the sampling chamber is equipped with a multi-layer sample library that can be lifted up and down, and a manual transfer rod manipulator is installed on one side of the cavity of the sampling chamber. The invention can quickly complete the sample exchange with the annealing chamber under vacuum conditions, ensuring that the annealing chamber is always in a high vacuum state. In the high-temperature and high-vacuum annealing furnace of the present invention, the cold-state ultimate vacuum degree of the annealing chamber can reach 10 ‑8 Pa ultra-high vacuum, when heated at 1600°C, the thermal vacuum degree can reach 10 ‑ 6 Pa, and it can realize the long-term heat preservation annealing of the sample not higher than 1600 °C.
Owner:SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI

A dual-wavelength pumped thulium-doped laser based on gsa and esa

The invention discloses a GSA and ESA dual-wavelength pumped thulium-doped laser, which is composed of a GSA pump source, an ESA pump source, a pump light beam combiner, an input mirror, a thulium-doped laser medium and an output mirror. GSA is the ground state absorption, corresponding to the thulium-doped laser medium 3 h 6 → 3 h 4 transition, ESA is excited state absorption, corresponding to 3 f 4 → 3 h 4 transition. Pumped by a GSA pump source, based on 3 h 6 → 3 h 4 The ground state absorption caused by the transition will change the Tm in the thulium-doped laser medium 3+ ion pumping to 3 h 4 Energy level, realize the first layout of the number of particles in this energy level. At the same time, the cross-relaxation process between thulium ions will further realize the metastable state 3 f 4 The particle population layout of the energy levels. Pumped by the ESA pump source, using 3 f 4 → 3 h 4 The excited state absorption caused by the transition will 3 f 4 The number of particles accumulated on the energy level is precisely pumped to 3 h 4 energy level, achieve 3 h 4 The second layout of the number of energy level particles. The scheme of pumping thulium-doped laser medium by GSA and ESA dual-wavelength that the present invention proposes can effectively improve 3 h 4 → 3 h 5 The layout of the number of particles on the energy level of the transition increases the laser output power in the 2.3-2.5μm band.
Owner:XUZHOU NORMAL UNIVERSITY

A Novel Sputtering Ion Pump for Anode Barrel Array

The invention discloses a novel sputter ion pump with a positive electrode barrel array. The novel sputter ion pump is characterized by comprising a shell; a gas inlet is formed in the top of the shell, magnets are mounted on the left side and the right side of the shell, the positive electrode barrel array is mounted inside the shell in an insulation manner, negative electrode plates are arrangedon two sides of the positive electrode barrel array, a high-voltage electrode and the gas inlet are fixedly assembled, positive potential of the high-voltage electrode is connected with the positiveelectrode barrel array, zero potential of the high-voltage electrode is connected with the two negative electrode plates, chambers for exhausting gas are formed between the negative electrode plates and the positive electrode barrel array, the positive electrode barrel array comprises a plurality of groups of positive electrode barrels, the radiuses of the positive electrode barrels are increasedalong with decrease of the distances from the positive electrode barrels to the gas inlet, the heights of the positive electrode barrels are decreased along with decrease of the distances from the positive electrode barrels to the gas inlet, and the sizes of gaps between the upper and lower surfaces of the positive electrode barrels and the negative electrode plates are increased along with decrease of the distances from the positive electrode barrels to the gas inlet; the radiuses of the positive electrode barrels are decreased along with increase of the distances from the positive electrodebarrels to the gas inlet, the heights of the positive electrode barrels are increased along with increase of the distances from the positive electrode barrels to the gas inlet, and the sizes of the gaps between the upper and lower surfaces of the positive electrode barrels and the negative electrode plates are decreased along with increase of the distances from the positive electrode barrels to the gas inlet. The novel sputter ion pump has the advantages that the gas exhaust speed in unit volume of the novel sputter ion pump can be greatly increased, and the novel sputter ion pump can keep working at the high exhaust speed even in ultrahigh-vacuum environments.
Owner:NORTHEASTERN UNIV LIAONING

A magnetic circuit structure of a sputtering ion pump and the sputtering ion pump

ActiveCN109830422BOptimizing the pumping speed curveReduce volumeIon diffusion discharge tubesIon pumpHomogeneous magnetic field
The invention relates to a sputter ion pump magnetic circuit structure and a sputter ion pump. The sputter ion pump magnetic circuit structure comprises an air exhaust assembly, a pair of ladder-typemagnet yokes, magnets and a lower magnet yoke, wherein the magnets are disposed above the two ends of the lower magnet yoke; the ladder-type magnet yokes are fixed to the upper surfaces of the magnets; each ladder-type magnet yoke has a wide bottom and a narrow top; the vertical surfaces of the pair of ladder-type magnet yokes are oppositely disposed; and the air exhaust assembly is fixed betweenthe two ladder-type magnet yokes. As the distance to the magnets increases, the thicknesses of the ladder-type magnet yokes gradually decrease to shrink the magnetic lines of force therein such that auniform magnetic field with constant magnetic induction intensity is formed in the space of the air exhaust assembly. In the magnetic circuit structure, the magnet yokes constrain a large number of magnetic lines of force, and the magnetic induction intensity at the axis of an anode cylinder in the air exhaust assembly with the magnet yokes is greater than that of the air exhaust assembly withoutthe magnet yoke. Thus, the sputter ion pump magnetic circuit structure is high in magnetic field utilization rate, obvious in improvement effect, and simple in structure, reduces the volume and the weight of the pump and reduces processing cost.
Owner:NORTHEASTERN UNIV LIAONING
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