A high temperature and high vacuum annealing furnace
A high vacuum and annealing furnace technology, applied in vacuum evaporation coating, furnace, furnace type and other directions, can solve the problems of low vacuum degree of vacuum annealing furnace, low temperature of vacuum annealing furnace, clean process environment, etc., to improve the use of heat efficiency, preventing heat loss, and good heating uniformity
Active Publication Date: 2022-06-07
SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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Problems solved by technology
[0003] 1. The vacuum degree of the existing vacuum annealing furnace is low and cannot provide a very clean process environment
[0004] 2. The temperature of the existing vacuum annealing furnace is not high, it is difficult to achieve high temperature and long-term heat preservation
[0005] 3. The temperature uniformity of sample annealing is not good
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[0028] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0029] like Figures 1 to 4 As shown, the present invention includes a sampling chamber assembly 1, an annealing chamber assembly 2 and a vacuuming assembly, wherein the vacuuming assembly includes an ion pump 3, a molecular pump 7 and a mechanical pump 8, and the sampling chamber assembly 1 includes a sampling chamber cavity 25 , sample library 27 and manual transfer rod manipulator 29, annealing chamber assembly 2 includes annealing chamber chamber 15, upper heater 16 and lower heater 21, ion pump 3, annealing chamber chamber 15, sample injection chamber chamber 25 and molecules The pumps 7 are connected in sequence, the molecular pump 7 and the mechanical pump 8 are connected through pipelines, between the ion pump 3 and the annealing chamber cavity 15, between the annealing chamber cavity 15 and the sampling chamber cavity 25, and between the sampling cha...
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The invention relates to vacuum coating experimental equipment, specifically a high-temperature and high-vacuum annealing furnace, in which an ion pump, an annealing chamber cavity, a sampling chamber cavity, and a molecular pump are connected in sequence, and the molecular pump is connected to a mechanical pump through a pipeline. Between the pump and the cavity of the annealing chamber, between the cavity of the annealing chamber and the cavity of the sampling chamber, and between the cavity of the sampling chamber and the molecular pump, there are flap valves; the cavity of the annealing chamber is equipped with a fixed upper heater And the lower heater that can be lifted up and down, the cavity of the sampling chamber is equipped with a multi-layer sample library that can be lifted up and down, and a manual transfer rod manipulator is installed on one side of the cavity of the sampling chamber. The invention can quickly complete the sample exchange with the annealing chamber under vacuum conditions, ensuring that the annealing chamber is always in a high vacuum state. In the high-temperature and high-vacuum annealing furnace of the present invention, the cold-state ultimate vacuum degree of the annealing chamber can reach 10 ‑8 Pa ultra-high vacuum, when heated at 1600°C, the thermal vacuum degree can reach 10 ‑ 6 Pa, and it can realize the long-term heat preservation annealing of the sample not higher than 1600 °C.
Description
technical field [0001] The invention relates to vacuum coating experimental equipment, in particular to a high-temperature and high-vacuum annealing furnace. Background technique [0002] Annealing is a common process for heat treatment of vacuum coating experimental equipment. The technical problems existing in the current vacuum annealing furnace are: [0003] 1. The vacuum degree of the existing vacuum annealing furnace is low and cannot provide a very clean process environment. [0004] 2. The temperature of the existing vacuum annealing furnace is not high, and it is difficult to achieve high temperature and long-term heat preservation. [0005] 3. The temperature uniformity of the sample annealing is not good. SUMMARY OF THE INVENTION [0006] In view of the above problems existing in the existing vacuum annealing furnace, the purpose of the present invention is to provide a high temperature and high vacuum annealing furnace. The cold limit vacuum degree of the a...
Claims
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IPC IPC(8): C23C14/56C23C16/54C23C14/58C23C16/56C21D9/00C21D1/26C21D1/773
CPCC23C14/56C23C16/54C23C14/5806C23C16/56C21D9/00C21D1/26C21D1/773Y02P10/20
Inventor 白印马锦李昌龙
Owner SHENYANG SCI INSTR RES CENT CHINESE ACAD OF SCI
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