Instant heating type ion pump maintenance device

Abstract

The invention discloses an instant heating type ion pump maintenance device. The device comprises two thermistor aluminum shell heaters, wherein the two thermistor aluminum shell heaters are fixed ontwo opposite side surfaces of the ion pump through two aluminum shell fixators, the two aluminum shell fixators are connected and fixed through bolts and nuts, the two thermistor aluminum shell heaters are connected with a power supply through conducting wires, and the aluminum shell fixators are provided with wire passing holes for the conducting wires to pass through. According to the invention,the thermistor aluminum shell heater is fixed on the ion pump by adopting the two aluminum shell fixators, the two bolts and the two nuts, and is connected with the power supply through two high-temperature heat-resistant insulating rubber wires, the air attached to the interior of the ion pump is exhausted through high-temperature baking, and therefore the functions of the ion pump are rapidly recovered, the device is easy to manufacture, convenient to use and reusable, the maintenance cost of the ion pump is greatly saved, and large-scale application and popularization are facilitated.

Description

technical field [0001] The invention relates to the field of ion pump maintenance, in particular to an instant heating ion pump maintenance device. Background technique [0002] The ion pump consists of a strong magnet, a honeycomb anode, and a titanium (Ti) cathode. The basic principle is to use the cathode discharge to generate ions of gas molecules to hit the cathode and be captured by the anode, which also produces a sputtering effect. The cathode material is made of metal Ti. After the metal Ti is sputtered, an active film is continuously formed on the inner wall of the cavity, and continues to react with gas molecules, thereby continuously exhausting. Due to the chemical method of venting, excess air and impurities will be attached to the pump body, resulting in a limited service life. As a kind of adsorption pump, the ion pump also needs to be baked to release the adsorbed gas and impurities. [0003] The traditional baking method is to bake and heat by blowing air...

AI Technical Summary

Problems solved by technology

But the problem is that the heating is not uniform, resulting in a long heating time, generally 10-12H, and it cannot be fixed, requiring the staff to hold the air for a long time, and the safety is poor.

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