This invention provides an on-
chip micro-vacuum generation device and method. The device includes: an
electron emission and collection structure comprising an insulating substrate, a pair of through electrodes formed on the insulating substrate, an
electron emitter located on the substrate and connected to the through electrodes, and a first collector
electrode arranged closely around the periphery of the substrate; an insulating spacer layer located on the side of the
electron emission and collection structure with the electron emitter, and surrounding the electron emitter to form a through cavity between the electron emission and collection structure and the second collector
electrode; and a second collector
electrode located on the side of the insulating spacer layer away from the electron emission and collection structure, for capturing ions reaching the second collector electrode via the through cavity. The device proposed in this invention has a simple structure, good
vacuum pumping effect, and high
vacuum pumping efficiency.