76results about "Ion diffusion discharge tubes" patented technology

The invention relates to the technical field of particle accelerators, in particular to a compact composite vacuum pump which comprises a sputter ion pump and a titanium wire assembly, the sputter ion pump comprises a pump shell, a first connector and a second connector, and the first connector and the second connector are provided with a cavity and communicated with the cavity; the first interface is used for connecting a cavity to be vacuumized; the titanium wire assembly is connected with the second connector of the pump shell, titanium wires of the titanium wire assembly are deposited in the cavity through sublimation to form a first titanium film with an adsorption function, according to the compact composite vacuum pump provided by the embodiment of the invention, it is guaranteed that extremely high vacuum can be obtained, meanwhile, occupied installation space is effectively reduced, and arrangement of other elements is facilitated.

A sputter ion pump cathode (106) comprising: a first plate (201) of a first material; and a second plate (202) of a second material; wherein the first plate (201) is arranged facing and substantially parallel with the second plate (202); and the first material is a different material to the second material.

This invention belongs to the field of ion pump technology, specifically relating to a detachable compact ion pump. The detachable compact ion pump disclosed in this invention includes a magnet assembly comprising at least one pair of magnets, each pair consisting of two magnets respectively disposed on opposite inner walls of the suction cylinder, forming a magnetic field between the two magnets. By placing the magnet assembly inside the suction cylinder, the magnetic gap is shortened, thus reducing the magnet thickness while still meeting the magnetic field requirements. This results in a compact and small overall structure for the ion pump, suitable for devices with limited installation space. The detachable compact ion pump disclosed in this invention features detachable connections for the suction cylinder, suction cylinder cover, electrodes, and connecting columns, facilitating disassembly and installation for maintenance and repair, making it more convenient to use and adaptable to various application needs.

Provided herein are high energy ion beam generator systems and methods that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current / high-moderate voltage generation of neutrons and protons. Such systems and methods find use for the commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.

A device (100) configured as an inline pump, in particular as an inline vacuum pump, further in particular as an inline ion pump, is described, the device (100) comprising: i) a housing (110) defining a central opening (115), in particular a central channel, for in-line operation of the device (100); and ii) a tempering device (120) coupled to the housing (110) and configured to provide tempering with respect to inline operation.

An ultra-high vacuum instrument, comprising a vacuum chamber, a sample storage stage, a non-evaporable getter and / or ion pump connected to the vacuum chamber to reduce the ambient pressure in the vacuum chamber, and at least one vacuum port including connection hardware adapted to connect to a sputtering gun for cleaning a sample surface or an evaporator for supplying material to grow a film on a sample. The sample storage stage, in some embodiments, includes a first sample parking position, a heating element adapted to apply heat to a sample loaded in the first sample parking position, one or more second sample parking positions, and a thermal insulating plate positioned to insulate the second sample parking positions from heat generated by the heating element.

The sputter ion pump (SIP) module comprises a frame structure, an anode coupled to the frame structure, and a shell coupled to the frame structure, the shell at least partially surrounding the frame structure and the anode, and the shell comprises at least one magnet and at least one cathode element.

A vacuum pump comprising a sputter ion pump (SIP) module having a first end and a second end, a non-evaporative getter (NEG) module coupled to the second end of the SIP module, and a conductor of the NEG module extending from the first end to the second end of the SIP module, wherein the SIP module comprises an anode having a first surface and a second surface on the opposite side, with at least a cylindrical opening extending from the first surface to the second surface, the anode further comprising a side extending from the first surface to the second surface, and the conductor being arranged on the side of the anode.

An ion pump and its method of assembly are described. The ion pump comprises: a pump housing enclosing a pumping chamber: one or more anodes a pair of cathode plates; and mounting means for supporting the cathode plates. The mounting means is configured to support the cathode plates in a predefined position within the pumping chamber. The mounting means comprises support means that define a straight path, the path having an open end such that the cathode plate can be slid through the open end along the path and into the predefined position.

This invention provides an on-chip micro-vacuum generation device and method. The device includes: an electron emission and collection structure comprising an insulating substrate, a pair of through electrodes formed on the insulating substrate, an electron emitter located on the substrate and connected to the through electrodes, and a first collector electrode arranged closely around the periphery of the substrate; an insulating spacer layer located on the side of the electron emission and collection structure with the electron emitter, and surrounding the electron emitter to form a through cavity between the electron emission and collection structure and the second collector electrode; and a second collector electrode located on the side of the insulating spacer layer away from the electron emission and collection structure, for capturing ions reaching the second collector electrode via the through cavity. The device proposed in this invention has a simple structure, good vacuum pumping effect, and high vacuum pumping efficiency.

The first part, i.e., the getter module subassembly (10; 20; 30; 40), is rigidly but reversibly coupled to the second part, the heater module subassembly (50), and a snap-on getter pump assembly holding the closed cable module (57, 67), and such an assembly of these two parts is easily attached by inserting and screwing into a support containing a matching plug-and-socket type connection.

The present invention relates a method for operating an ion pump allowing to accurately estimate the pressure even when the ion pump is fed with a high voltage, as well to a pumping system for implementing such method. The method provides for measuring a current absorbed by the ion pump at a first, lower voltage at which no leakage current is expected, estimating a current at a second, higher voltage starting from said measured current at said first voltage, measuring a current at said second voltage and comparing said estimated current at said second voltage and said measured current at sid second voltage. As a result, the presence of a leakage current and its contribution to the overall measured current when the pump is running at the second, higher voltage can be identified and a correction factor to be applied to the measured current at said second voltage for correctly estimating the pressure in the pump can be calculated.

A method for regenerating a volumetric getter pump in a vacuum device having a volumetric getter pump and an ion getter pump, wherein the operating voltage of the ion getter pump is reduced, the current through the ion getter pump is recorded to determine the pressure in the vacuum device, and then a heating element of the NEG is controlled based on the current of the ion getter pump, with the aim of heating the NEG material.

Some embodiments include an apparatus comprising: a vacuum enclosure having an opening; a support structure disposed within the vacuum enclosure, the support structure having a first portion attached to the vacuum enclosure at the opening; and a second portion extending within the vacuum enclosure; and a plurality of getters disposed on the second portion of the support structure.

A performance monitoring method for the predictive maintenance of a NEG pump in a vacuum system which includes at least one pressure sensor operatively connected to a computer, which calculates an estimated instant operating parameter (I) curve from pressure sensor readouts and compares the evolution of said (I) curve with a reference set of (II) curves stored in the computer to obtain a value for the pump residual useful life RUL.

Method for the regeneration of a volume getter pump in a vacuum apparatus with a volume getter pump and an ion getter pump where the operating voltage of the ion getter pump is reduced, the current through the ion getter pump is recorded for determination of the pressure in the vacuum apparatus and then a heating element of the NEG is controlled as a function of the current of the ion getter pump for the purpose of heating the NEG material.

The invention belongs to the technical field of ion pumps, and particularly relates to a detachable compact ion pump. According to the detachable compact ion pump disclosed by the invention, a magnet assembly comprises at least one group of magnet pairs, each group of magnet pairs comprises two magnets, the two magnets are respectively arranged on two opposite inner walls of an air suction cylinder, and a magnetic field is formed between the two magnets; the magnet assembly is arranged in the air suction cylinder, the magnetic gap is shortened, and therefore the thickness of the magnet can be reduced under the condition that the magnetic field requirement is met, and the ion pump is compact and small in overall structure and can be suitable for a device with a small installation space. According to the detachable compact ion pump disclosed by the invention, the air suction cylinder and the air suction cylinder cover plate are detachably connected, and the electrode and the connecting column are detachably connected, so that the detachable compact ion pump is more convenient to disassemble, assemble and use when maintenance and overhaul are needed, and the detachable compact ion pump can adapt to the use requirements of different occasions.

The sputter ion pump (SIP) module comprises a frame structure, an anode coupled to the frame structure, and a shell coupled to the frame structure, the shell at least partially surrounding the frame structure and the anode, and the shell comprises at least one magnet and at least one cathode element.

A sputter ion pump cathode (106) comprising: a sheet of material (200) having an aperture (202) therethrough; and a protrusion (204) extending along an axis (206) from an edge (208) of the aperture (202) inwards towards a central portion (210) of the aperture (202); wherein the protrusion (204) is twisted about the axis (206), for example, by approximate 90°.

Provided herein are high energy ion beam generator systems and methods that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current / high-moderate voltage generation of neutrons and protons. Such systems and methods find use for the commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.

Magnetic assembly for a sputter ion pump, SIP, comprising a pole piece, at least one magnet connected to the pole piece by a magnetic force of the at least one magnet, at least one cathode element connected to the at least one magnet and at least one bracket element connected to the at least one magnet by the magnetic force of the at least one magnet, wherein the at least one bracket element fixes the position of the at least one cathode element.

To provide a high power ion beam generator system and method.SOLUTION: Provided herein are a high energy ion beam generator system and a method that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current / high-moderate voltage generation of neutrons and protons. Such a system and a method find use for commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.SELECTED DRAWING: None

Vacuum pump comprising: a sputter ion pump, SIP, module, having a first end and a second end; a non-evaporable getter, NEG, module, connected to the second end of the SIP module; an electrical lead of the NEG module running from the first end to the second end of the SIP module; wherein the SIP module comprises an anode having a first surface and an opposite second surface, wherein at least on cylindric opening extends from the first surface to the second surface, wherein the anode further comprises side surfaces extending from the first surface to the second surface, wherein the electrical lead is arranged at the side surface of the anode.

Provided herein are high energy ion beam generator systems and methods that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current / high-moderate voltage generation of neutrons and protons. Such systems and methods find use for the commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.

Provided herein are high energy ion beam generator systems and methods that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current / high-moderate voltage generation of neutrons and protons. Such systems and methods find use for the commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.

To provide a high power ion beam generator system and method.SOLUTION: Provided herein are a high energy ion beam generator system and a method that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current / high-moderate voltage generation of neutrons and protons. Such a system and a method find use for commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.SELECTED DRAWING: None

To provide a high power ion beam generator system and method.SOLUTION: Provided herein are a high energy ion beam generator system and a method that provide low cost, high performance, robust, consistent, uniform, low gas consumption and high current / high-moderate voltage generation of neutrons and protons. Such a system and a method find use for commercial-scale generation of neutrons and protons for a wide variety of research, medical, security, and industrial processes.SELECTED DRAWING: None

A sputter ion pump SIP module includes a frame structure, an anode connected to the frame structure, and a shell connected to the frame structure, where the shell at least partially surrounds the frame structure and the anode, where the shell includes at least one magnet and at least one cathode element.

Disclosed is a vacuum pump comprising, a sputter ion pump (SIP) module, 14 having a first end 50 and a second end 52, a non-evaporable getter, NEG, module 12, connected to the second end of the SIP mo