Sputter ion pump module and vacuum pump

Abstract

The sputter ion pump (SIP) module comprises a frame structure, an anode coupled to the frame structure, and a shell coupled to the frame structure, the shell at least partially surrounding the frame structure and the anode, and the shell comprises at least one magnet and at least one cathode element.

Description

Technical Field

[0001] The present invention relates to a sputter ion pump (SIP) module and a vacuum pump comprising such an SIP module. Further, the present invention relates to a method of assembling such an SIP module.

Background Art

[0002] A generally known SIP comprises one or more anodes made as tubes or cylindrical openings, and the magnetic field is directed parallel to the central axis of the tube. The anode is surrounded by a cathode element. Specifically, the cathode element is arranged opposite the cylindrical opening of the anode at a constant distance along the central axis. A strong electric field is generated between the anode and the cathode. The magnetic field expands the path of electrons in the anode cell, and gas atoms and molecules in the vacuum chamber are ionized. The resulting ions are accelerated and collide with the cathode element. When the accelerated ions collide with the cathode element, the ions are buried in the cathode material or sputter the cathode material onto other surfaces of the pump. The continuously sputtered chemically active cathode material functions as a getter, expelling gas by both chemisorption and physisorption, resulting in a net pumping action.

[0003] In a general SIP, the pumping element, i.e., the pumping element comprising the cathode element and the anode, is constructed within a vacuum chamber that can be fixed to a vacuum device, and the magnetic field is provided by magnets and pole pieces arranged outside the vacuum chamber of the SIP. This design cannot be diverted to a flange mounting device, and additional construction space and an unnecessarily large flange are required within the vacuum chamber to incorporate all the functional components of the SIP within the plane of the flange. In addition, the assembly of a conventional SIP requires the assembly of multiple components within the vacuum chamber, so it requires multiple steps and is complex.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The object of the present invention is to provide a sputter ion pump (SIP) module that can be assembled more easily and offers a modular design for service and repair. [Means for solving the problem]

[0005] This problem is solved by the SIP module described in claim 1, the vacuum pump described in claim 14, and the method for assembling the SIP module described in claim 19.

[0006] The sputter ion pump (SIP) module according to the present invention comprises a frame structure, an anode coupled to the frame structure, and a shell coupled to the frame structure, the shell at least partially surrounding the frame structure and the anode. Here, the shell may comprise at least one magnet and preferably at least one cathode element directly coupled to the shell. However, the at least one cathode element may not be part of the shell or may not be directly coupled to the shell. Thus, the shell simultaneously provides the functional components of the SIP module, namely at least one magnet and preferably at least one cathode element. At the same time, the shell provides the structural stability of the SIP module. Thus, the frame structure and the shell together provide a complete SIP structure that does not require additional structural components. Thus, the overall design is simplified and the number of required parts is reduced. At the same time, the number of assembly steps can be reduced. Furthermore, since the shell holds at least one magnet, the magnet is located in the vacuum chamber together with the entire SIP module. Thus, substantially no parts of the SIP module or at least functional components (except for, e.g., electrical feedthroughs) are located outside, thereby efficiently utilizing the available space in the vacuum chamber.

[0007] Preferably, the frame structure comprises a base element and at least one or more frame side elements coupled to the base element. Here, the base element provides the base of the SIP module, and the other components of the SIP module are combined with the base element and / or at least one or more frame side elements of the frame structure. The frame side elements can be made as shouldered screws or struts coupled to the base element. Here, the frame structure may not provide the overall structural stability of the SIP module assembled for operation. Instead, a shell coupled to the frame structure may contribute to the structural stability of the SIP module, and the combination of the frame structure and shell alone can provide a structurally stable SIP module that is operational.

[0008] Preferably, the base element can be a flange for coupling the SIP module to a vacuum device or vacuum chamber. Alternatively, the base element can be coupled to a flange that is part of the SIP module or a vacuum pump comprising such a SIP module.

[0009] Preferably, the frame structure includes an upper element, and at least one or more frame side elements extend from the base element to the upper element.

[0010] Preferably, the frame structure comprises exactly two frame side elements, namely shouldered screws.

[0011] Preferably, the frame structure consists only of a base element, at least one or more frame side elements, and an upper element. This provides the basic components of the SIP module and sufficient structural stability for assembling the other components of the SIP module, namely the anode and shell.

[0012] Preferably, the upper element has openings for receiving at least one or more frame side elements, and further comprises fixing elements for fixing the position of the upper element on the frame side elements. Thus, the upper element can be slidably coupled to at least one or more frame side elements, and the position of the upper element relative to at least one or more frame side elements or base elements can be fixed by the fixing elements. In detail, the fixing elements are provided by set screws which can be positioned perpendicular to each shoulder screw.

[0013] Preferably, the shell is in direct contact with the base element, and preferably also in direct contact with the upper element. More specifically, direct contact between the upper element and the shell can be enabled by fixing elements to adapt the position of the upper element on at least one or more frame side elements. Fixing elements allow the position of the upper element to be adapted to the shell so that the upper element directly abuts the shell after the anode and shell are assembled. This provides structural stability, and movement / forces on one of the components of the SIP module are also transmitted to the shell, base element and upper element via direct contact.

[0014] Preferably, the non-evaporative getter (NEG) pump module can be coupled to the upper element. Due to the high structural stability of the SIP module, the NEG pump module can be directly mounted on top of the SIP module in a stacking configuration.

[0015] Preferably, the shell is made of a magnetic material and functions as a pole piece. In other words, the pole pieces of the SIP are made integrally with the shell of the SIP module. Thus, the shell not only provides structural stability, but at the same time, it functions as a pole piece and directly influences the magnetic field within the SIP module.

[0016] Preferably, the shell has one or more openings that allow gas to flow into the pumping volume of the SIP.

[0017] Preferably, the shell comprises two or more shell elements. Therefore, dividing the shell into two or more shell elements facilitates the assembly of the shell.

[0018] Preferably, the shell is cylindrical, and the shell elements are semi-cylindrical or partially cylindrical. In other words, the shell has a circular cross-section, and the shell elements can have a semi-circular or partially circular cross-section. Here, the shell elements are combined to match the overall shape of the shell. Therefore, if there are two shell elements, each shell element can have a semi-cylindrical shape. However, other shapes of the shell, such as a square cross-section or others, are also possible.

[0019] Preferably, each shell element is made similarly or differently. Making each shell element similarly simplifies assembly and reduces the number of parts that need to be manufactured during production.

[0020] Preferably, each shell element comprises at least one magnet and at least one cathode element. Thereafter, at least one magnet and at least one cathode element are directly coupled to each shell element, and by combining the shell elements, at least one magnet and at least one cathode element are also combined into the SIP module at the same time. This reduces the number of parts to be assembled and allows for the pre-assembly of each shell element.

[0021] Preferably, each shell element is made of a magnetic material and functions as a pole piece. In other words, the pole pieces are integrally manufactured with the shell of the SIP module. Thus, the shell not only provides structural stability, but at the same time, it functions as a pole piece and directly influences the magnetic field within the SIP module.

[0022] Preferably, the shell elements are coupled to each other by the magnetic force of magnets. In detail, there are no additional fixing elements for attaching the shell elements to the frame structure. The shell elements are fixed only by the magnetic attraction of the magnets. Thus, the magnets attached to each shell element serve two purposes. The first purpose is to provide a magnetic field to the SIP, and the second purpose is to assemble the shell elements and hold them in place. This simplifies the assembly of the SIP module and reduces the number of parts in the vacuum. In detail, toolless assembly of the shells is possible.

[0023] Preferably, the number of frame side elements corresponds to the number of shell elements. More specifically, each shell element extends between two frame side elements. If the frame structure has two frame side elements, each shell element extends across a semicircle of the cylindrical shell. Thereafter, each shell element is directly coupled to the frame structure via its respective pair of frame side elements.

[0024] Preferably, at least one shell element has a recess along its axial end to accommodate one of the frame side elements, i.e., a shouldered screw. Thus, the recess allows the shell element to conform to the shape of each frame side element, thereby defining the position of the shell element and assisting in the placement of each shell element. More specifically, each shell element has such a recess, and more specifically, each shell element has recesses extending along the axial direction at both edges.

[0025] In another aspect of the present invention, a vacuum pump is provided comprising a sputter ion pump (SIP) module as described above and a non-evaporative ion (NEG) module coupled to the SIP module, preferably to the upper element of the SIP module. In particular, the NEG module can be directly coupled to the upper element of the SIP module. Alternatively, the NEG module can be coupled to the upper element of the SIP module via an intermediate element to facilitate coupling between the NEG module and the SIP module.

[0026] Preferably, the outer structure of the SIP module and / or the outer structure of the NEG module is cylindrical. Here, in the case of the SIP module, the outer structure can be provided by a shell having a cylindrical shape. The outer structure can be a housing, and the housing can be vacuum-tight or not. The housing enables the SIP module and / or the NEG module to function fully and preferably provides means for connecting a vacuum pump to a vacuum device or a vacuum chamber. Alternatively, the outer structure surrounds the elements of the SIP module and / or the NEG module and is made to be inserted into a vacuum device or a vacuum chamber. Here, the outer structure can be provided with an opening that allows gas to enter the SIP module or the NEG module.

[0027] Preferably, the outer surfaces of the SIP module and the NEG module, specifically their respective outer structures, are flush with each other to provide the overall cylindrical shape of the vacuum pump.

[0028] Preferably, the vacuum pump has a flange, the SIP module is coupled to the flange at its first end, and preferably coupled to the NEG module at its second end. Specifically, the SIP module is directly coupled to the flange by its base element, and the NEG module is coupled to the SIP module via the upper element of the SIP module. Alternatively, the base element can be a flange for coupling the SIP module / NEG module to a vacuum device or a vacuum chamber.

[0029] Preferably, the SIP module and the NEG module are arranged within the region of the flange. Thus, the SIP module and the NEG module can be inserted together into a vacuum chamber and fixed to the vacuum chamber by the flange.

[0030] Preferably, the NEG module and / or SIP module are placed entirely in a vacuum. More specifically, the small construction size of the NEG module and SIP module allows both to be inserted into a vacuum chamber and coupled to the vacuum chamber by a flange. Thus, no additional vacuum space volume is added to the vacuum chamber in which the vacuum pump is installed. At the same time, the present invention reduces the number of parts in vacuum compared to modifying a standard ion pump design to be flange-mounted.

[0031] In another aspect of the present invention, a method for assembling a SIP module is provided. This method is Steps include providing a frame structure, The steps include providing an anode and securing the anode within the frame structure, The steps include providing two or more shell elements and attaching the shell elements to the frame structure by magnetic force, Includes.

[0032] Therefore, the anode is coupled to the frame structure, and then two or more shell elements of the shell are attached to the frame structure. In detail, the shell elements are attached to the frame structure by the magnetic attraction of the magnets of the SIP module. In detail, no further steps are taken to fix the shell elements to the frame structure. In detail, the shell elements are attached to the frame structure solely by magnetic force.

[0033] Preferably, the frame structure comprises at least a base element and at least one frame side element coupled to the base element to form the frame structure.

[0034] Preferably, after attaching the individual shell elements of the shell to the frame structure, the upper end element of the frame structure can be aligned to a position where it is in direct contact with the upper end of the shell. Thus, the lower end of the shell is in direct contact with the base element, and the upper end of the shell is in direct contact with the upper element. As a result, even though the shell elements are coupled to the frame structure only by their magnetic force, the mechanical load along the SIP module is transmitted directly from the base element through the shell to the upper element and distributed over the entire circumference of the pump rather than concentrated at the connection points of the frame side elements to the base and upper elements. The combination of the frame structure and the shell provides sufficient stability for the SIP module.

[0035] Preferably, the SIP module is further constructed according to the features described above.

[0036] The present invention will be described in further detail below with reference to the attached drawings. [Brief explanation of the drawing]

[0037] [Figure 1] This is a vacuum pump according to the present invention. [Figure 2] Figure 1 is a cross-sectional view of the vacuum pump. [Figure 3] Figure 1 shows the frame structure of the vacuum pump. [Figure 4A] Figure 1 shows the frame structure and anode of the vacuum pump. [Figure 4B] Figure 1 shows the frame structure and anode of the vacuum pump. [Figure 5A] Figure 1 shows the shell elements of the vacuum pump. [Figure 5B] Figure 1 shows the shell elements of the vacuum pump. [Figure 5C] Figure 1 shows the shell elements of the vacuum pump. [Figure 6A] This is a cross-sectional view of a non-evaporative getter module. [Figure 6B] This is a cross-sectional view of a non-evaporative getter module. [Figure 7] This is a connecting element according to the present invention. [Figure 8A] This is a thermal insulation element according to the present invention. [Figure 8B] This is a thermal insulation element according to the present invention. [Figure 9] Figure 1 is a cross-sectional view of the SIP module. [Modes for carrying out the invention]

[0038] Referring to Figure 1, a vacuum pump 10 according to the present invention is shown. Here, the vacuum pump 10 comprises a non-evaporative getter (NEG) module 12, a sputter ion pump (SIP) module 14, and a vacuum flange 16. Here, the SIP module 14 is directly coupled to the flange 16, and the NEG module 12 is attached to the SIP module 14 on the opposite side of the flange 16. The vacuum pump 10, in particular both the NEG module 12 and the SIP module 14, have a cylindrical shape. The shape of the SIP module 14 closely matches the shape of the NEG module 12, so that the SIP module 14 and the NEG module 12 have substantially similar or identical external shapes or, finally, cross-sections. In the following figures, the vacuum pump has a cylindrical shape, but other shapes are also possible.

[0039] The NEG module 12 and SIP module 14 are positioned within the area of ​​the flange 16 and can be fully inserted into the vacuum chamber for pumping.

[0040] Refer to Figure 2. In the cross-sectional view, the SIP module 14 is shown to have an anode 20, and in the example of Figure 2, it has three cylindrical openings or tubes. Any other number of tubes is also possible. Cathodes 18 are located at the axial ends of these openings. The anode 20 is guided through the flange by a vacuum feedthrough 26 and is maintained at a high potential by a high-voltage (HV) conductor 28 connected to the anode. Furthermore, the flange 16 is provided with a connector 68 which is connected to a heating element 32 of the NEG module 12 via a conductor 30. The NEG element 34 is positioned on the heating element 32 to reactivate the NEG material by heating.

[0041] Here and below, the axial direction of the SIP and its elements is defined along the anode from its bottom to its top. Here and below, the transverse direction refers to the direction perpendicular to the axial direction of the anode.

[0042] Refer to Figure 3, which shows the frame structure 48 of the SIP module. The frame structure 48 comprises a base element 50 that can be attached to the flange 16 by welding, brazing, soldering, screws, or some other releaseable coupling means. In other embodiments, the flange 16 and the base element 50 may be made integrally, or the base element 50 may be provided by the flange 16 itself. In the example in Figure 3, two frame side elements 24, made as shouldered screws or struts extending from the base element 50 to the upper element 52, are coupled to the base element 50. The NEG module 12 can be coupled to the upper element 52 by welding, brazing, soldering, screws, or some other releaseable coupling means. During assembly, the anode 20 is fixed within the frame structure 48, and then the frame structure 48 is coupled to the flange 16 together with the anode 20. This is shown in Figures 4A and 4B. The anode 20 is coupled within the frame structure 48 by a lower support element 71 provided by an insulating element 62 coupled to the anode 20. Furthermore, the upper support element 73 is provided by an insulating element 74, where the insulating elements 62 and 74 are made of an insulating material such as ceramic material. The lower insulating support 71 restricts the anode 20 from downward movement toward the flange 16 and can also restrict lateral movement, i.e., movement in one or more other directions or all other directions. The upper support element 73 restricts the anode 20 from upward movement and lateral movement, i.e., movement in one or more other directions or all other directions. At least one support element 71, 73 or two support elements 71, 73 may not completely restrict lateral movement while connecting the anode to the HV conductor 28, allowing slight lateral movement of the anode to facilitate attachment of the HV conductor 28 to the anode 20. Thus, a secure connection between the HV conductor 28 and the anode 20 is possible, and slight manufacturing deviations can be compensated for. To completely prevent the anode 20 from moving and to fix the anode's position within the frame structure, the anode 20 is coupled to an HV conductor 28 extending through an opening in the base element 50 via a conductive sleeve 49 that couples the anode 20 to the HV conductor 28 of the vacuum feedthrough 26.Therefore, the anode 20 is fixed in place within the frame structure 48 of the SIP module 14 by the coupling of the lower support element 71, the upper support element 73, and the electrical feedthrough 26 to the HV conductor 28.

[0043] Therefore, the steps for assembling the SIP module 14 are: a) A step of providing a frame structure preferably comprising a base element 50, one or more frame side elements 24 coupled to the base element, and upper elements 52 coupled to each frame side element 24, b) Inserting the anode and connecting the anode to the frame structure by the lower support element 71 and the upper support element 73, c) The step of attaching the frame structure 48 together with the anode 20 to the flange 16, thereby coupling the anode 20 to the electrical feedthrough 26 and at the same time fixing the position of the anode 20 within the SIP module 14. d) The step of attaching the shell around the frame structure 48, as will be described in detail below. Includes.

[0044] Refer to Figures 5A-5C, which show details of the shell of the vacuum pump 10. The shell of the vacuum pump 10, more specifically the shell of the SIP module 14, comprises two separate shell elements 22. Here, each shell element 22 is made identically in this embodiment, but the shell elements 22 can also be made / designed differently. Each shell element 22 comprises at least one magnet 78, and in the example of Figures 5A-5C, each shell element 22 comprises two magnets 78. Here, the magnets 78 are positioned in recesses 79 of the shell element 22 to prevent lateral movement. The size of the recesses 79 is adapted to the size of the magnets such that the side walls of the recesses 79 are in direct contact with the side walls of each magnet 78. The magnets 78 are attached to each shell element 22 solely by their magnetic force. There are no further fixing / fastening elements. Thus, the shell elements 22 serve as both the magnetic pole pieces and the outer structure of the SIP module 14. The pole pieces guide the magnetic flux through the SIP module 14, and the outer structure provides structural stability to the SIP module 14. Therefore, the shell element 22 is made of a magnetic material such as mild steel. The magnet 78 is a neodymium (Nd) magnet or a samarium (Sa) cobalt (Co) magnet. One surface of the magnet is attached to the shell element 22. The opposite surface of the magnet 78 is directly coupled to the cathode 18. The cathode 18 is plate-like and covers all or substantially all of the surface of the magnet 78. The cathode 18 can be made of titanium (Ti) or tantalum (Ta). Two shell elements 22 may have cathode elements 18, 18' made of the same or different materials. Bracket or clamp elements 80 are provided at the upper and lower ends of each magnet 78 to fix the cathode 18 in place. The bracket elements 80 are held in place by the magnetic force of the magnet 78. No additional fixing elements are required. The bracket element 80 has a chamfered surface 84, which includes a chamfered portion facing the magnet 78. Similarly, the cathode element 18 has a chamfered portion facing outward from the magnet 78, and a chamfered edge 82 that corresponds to the chamfered surface 84 of the bracket element 80. When the bracket element 80 is attached to the side of the magnet 78, a clamping force is applied to the cathode 18 to fix its position.Since the surface of the cathode element 18 is flush with each bracket element 80, the cathode element 18 can be positioned closely with respect to the anode 20. Furthermore, the anode element 18 can be assembled and disassembled without the need for additional tools.

[0045] The two shell elements 22 are similar in shape to the SIP module 14. The shell elements 22 have openings 23 that allow gas molecules and particles to enter the active volume of the SIP module. The present invention is not limited by the number or shape of these openings 23. To ensure sufficient stability of the shell elements, the shell elements 22 are provided with recesses 81 along the axial direction of the shell elements 22 at their axial ends, which accommodate the frame side elements 24 when attached to the shell elements 22. Thus, the position of the shell elements 22 is determined by the position of the frame side elements 24, by the corresponding shape of the recesses 81.

[0046] Refer to Figures 6A and 6B, which show an NEG module 12 comprising a heater 32 having a heating wire 86. The NEG module 12 comprises a base element 88 and an upper element 90, and the NEG element 34 is sleeved over the heater 32. The upper element 90 and the base element 88 can be connected by NEG side elements such as shouldered screws or struts. In detail, the NEG side elements are made of threaded rods or struts. Electrical connection of the heater 32 is provided by an electrical connector 38 having a connecting element 94. The connecting element 94 is shown in detail in Figure 7. The connecting element 94 comprises a first end 96 and a second end 98. Between the first end 96 and the second end 98, there is a collar or protruding feature 100. Although Figure 7 shows that the first end 96 and the second end 98 may have the same diameter, the present invention is not limited to this example, and different diameters of the first end 96 and the second end 98 are also possible. Similarly, while the example in Figure 7 shows a circular cross-section, other shapes are, of course, also possible.

[0047] As shown in Figures 8A and 8B, the connector 38 comprises insulating elements 102 and 106. The first insulating element 102 has an opening 104, where the number of openings 104 corresponds to the number of connecting elements 94. The diameter of the opening 104 corresponds to the diameter of the first end 96, and preferably the insulating element 102 is made of ceramic material. Similarly, the second insulating element 106 is made of ceramic material. The second insulating element 106 is made of two halves, although Figure 8B shows only a single half. The two halves of the insulating element 106 define an opening 108, where the diameter of the opening 108 corresponds to the diameter of the second end 98 of the connecting element 94. The connecting element 94 is crimped to the heating wire 86 of the heater 32 or otherwise attached. The two halves of the second insulating element are then inserted into the housing of the base element 88 of the NEG module 12 and seated on the shoulder portion 95. Here, the protruding feature 100 prevents the connecting element 94 from falling through the opening 108 of the second insulating element 106. The first insulating element 102 is then assembled by inserting the first end 96 of the connecting element 94 into the respective openings 104. The protruding feature 100 prevents the connecting element 94 from falling out of the first insulating element 102. The first insulating element 102 and the second insulating element 106 are fixed in place by a fixing element, for example, provided by a set screw. This prevents clamping force from directly acting on the connecting element 94. The protruding feature 100 fixes the fixing element 94 in its axial position, while slight lateral movement of the connecting element 94 is still permitted, which is useful when assembling the NEG module 12.

[0048] Similar to the connector 38 that connects the NEG module 12 to the SIP module 14, a connector 40 is provided to connect the SIP module to the flange 16, as shown in Figures 4A and 4B. This allows the conductor 30 connected to the heater 32 to pass completely through the flange 16 to the SIP module 14 and then to the NEG module 12 via the connector 38. The conductor 30 may include two electrical wires 110, 110' surrounded by an insulating material such as ceramic.

[0049] The following refers to Figure 9, which shows a cross-sectional top view of the SIP module 14. The anode 20 has a first surface 114 and a second surface 118 on the opposite side, which correspond axially to the cylindrical opening of the anode 20. The first surface 114 and the second surface 118 are joined by a side surface 116, and the conductor 30 extends along the side surface 116 of the anode 20. Due to the position of the conductor 30, there is no direct line or line of sight 112 between the cathode element 18 and the conductor 30, thus preventing or at least reducing the possibility of sputtering the cathode material onto the surface of the conductor 30, which could cause a short circuit. Thus, the conductor 30 is protected by the anode 20 itself. Accordingly, the side surface 116 of the anode can be provided with recesses 120 for accommodating the conductor 30 and the respective wires 110, 110' of the conductor 30. Therefore, the low-voltage supply to the heater 32 of the NEG module 12 is provided from the connector 68 through the connecting element 40 and the conductor 30 across the SIP module 14, more specifically through the magnetic pole piece of the SIP module provided by the shell element 22, toward the connector 38 of the upper element 52 of the SIP module, and further toward the connector 38 and the heater 32.

[0050] Accordingly, the vacuum pump according to the present invention provides a combination of NEG modules and SIP modules, both of which can be fully inserted into a vacuum chamber with a small cross-sectional area. At the same time, the mounting of the frame structure 48 and shell simplifies the assembly process of the SIP module 14 and reduces the number of parts required in vacuum. [Explanation of Symbols]

[0051] 10 Vacuum pump 12 NEG modules 14 SIP Modules 16 flange 18, 18' Cathode element 20 Anode 22 Shell Elements 23 Opening 24 Frame side elements 26 Vacuum feedthrough 28 HV conductor 30 conductor 32 heating element 34 NEG elements 38 connectors 40 connectors 48 Frame Structure 49 Conductive sleeve 50 Base elements 52 Top element 62 Insulating elements 68 connectors 71 Lower support element 73 Upper support element 74 Insulating elements 78 Magnets 79 Recess 80 Bracket Elements 81. Indentation 82 Chamfered edge 84 Chamfered surface 86 Heating wire 88 Base element 90 Top element 94 connection elements 95 Shoulder 96 First end 97 Fixed elements 98 Second end 100 Protruding feature 102 First insulating element 104 Opening 106 Second insulating element 108 Opening 110, 110' wire 112 Line of sight 114 First surface 116 Side view 118 Second surface 120 indentations

Claims

1. Frame structure and, Anode coupled to the frame structure, A shell coupled to the frame structure, the shell at least partially surrounding the frame structure and the anode, A sputter ion pump (SIP) module equipped with, The shell comprises at least one magnet and preferably at least one cathode element, and is a sputter ion pump module.

2. The sputter ion pump module according to claim 1, wherein the frame structure comprises a base element and at least one or more frame side elements coupled to the base element.

3. The sputter ion pump module according to claim 2, wherein the frame structure comprises an upper element, and at least one or more frame side elements extend from the base element to the upper element.

4. The sputter ion pump module according to claim 3, wherein the upper element has an opening for receiving the at least one or more frame side elements, and further comprises a fixing element for fixing the position of the upper element on the frame side elements.

5. The sputter ion pump module according to any one of claims 1 to 4, wherein the shell comprises two or more shell elements.

6. The sputter ion pump module according to claim 5, wherein the shell is cylindrical, and the shell element is semi-cylindrical or partially cylindrical.

7. Each of the aforementioned shell elements is similarly constructed, as described in the sputter ion pump module according to claim 5 or 6.

8. The sputter ion pump module according to any one of claims 5 to 7, wherein each of the shell elements comprises at least one magnet and at least one cathode element.

9. Each of the aforementioned shell elements is made of a magnetic material and functions as a magnetic pole piece, according to any one of claims 5 to 8.

10. The sputter ion pump module according to any one of claims 5 to 9, wherein the shell elements are coupled to one another by the magnetic force of the magnets.

11. The sputter ion pump module according to any one of claims 5 to 10, wherein there are no additional fastening elements for attaching the shell element to the frame structure.

12. The sputter ion pump module according to any one of claims 5 to 11, wherein the number of frame side elements corresponds to the number of shell elements.

13. The sputter ion pump module according to any one of claims 5 to 12, wherein at least one shell element has a recess along the axial end of the shell element for accommodating one of the frame side elements.

14. A vacuum pump comprising a sputter ion pump (SIP) module according to any one of claims 1 to 13, and preferably an NEG pump module coupled to the SIP module.

15. The vacuum pump according to claim 14, wherein the outer structure of the SIP module and / or the outer structure of the NEG module is cylindrical.

16. The vacuum pump according to claim 14 or 15, wherein the outer surface of the SIP module and the outer surface of the NEG module are flush with each other.

17. The vacuum pump according to any one of claims 14 to 16, wherein the vacuum pump comprises a flange, the SIP module is coupled to the flange at a first end, and / or the NEG module and the SIP module are arranged within the area of ​​the flange.

18. The vacuum pump according to any one of claims 14 to 17, wherein the NEG module and / or the SIP module are located in a complete vacuum.

19. Preferably, a method for assembling a SIP module according to any one of claims 1 to 13, Steps include providing a frame structure, The steps include providing an anode and fixing the anode within the frame structure, The steps include providing two or more shell elements and attaching the shell elements to the frame structure by magnetic force, A method that includes this.

20. The method according to claim 19, wherein the shell element is not further fixed to the frame structure.

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