Ultraviolet irradiation device

Abstract

The objective is to provide an ultraviolet irradiation device that can optimize purging with inert gas. [Solution] The ultraviolet irradiation device according to the embodiment comprises: a light-emitting tube extending in a first direction; an internal electrode extending inside the light-emitting tube; an external electrode extending along the outer wall of the light-emitting tube; a nozzle provided at each of the ends on both sides of the light-emitting tube; a cooling section provided on the side of the cooling section where the recess opens and having a recess extending in the first direction; a cover provided on the side of the cooling section where the recess opens, facing the light-emitting tube with a space between it and the nozzle, and extending in the first direction between the nozzle and the cover; a packing provided between each of the ends on both sides of the cover in a second direction intersecting the first direction and the side of the cooling section where the recess opens, and extending in the first direction; and a nozzle holder having a first sealing member that detachably holds the nozzle and seals the gap between the nozzle and the holder. An inert gas can be supplied to the space between the light-emitting tube and the cover.

Claims

1. A light-emitting tube extending in a first direction; An internal electrode extending inside the discharge tube; An external electrode extending along the outer wall of the light-emitting tube; The nozzles provided at each end of the aforementioned discharge tube; The cooling section is provided with the light-emitting tube and the external electrode, and has a recess extending in the first direction; The cooling section is provided on the side where the recess opens, facing the light-emitting tube across the space, and comprises the base and a cover extending in the first direction between the base and the cover; A packing extending in the first direction is provided between each of the ends of the cover in a second direction intersecting the first direction and the side of the cooling section where the recess opens; A nozzle holder having a first sealing member that detachably holds the nozzle and seals the gap between the nozzle and the holder; It is equipped with, An ultraviolet irradiation device capable of supplying an inert gas to the space between the light-emitting tube and the cover.

2. The ultraviolet irradiation device according to claim 1, further comprising a sealing portion having a second sealing member that seals the region between the cover and the nozzle holder.

3. The second sealing member is provided in pairs, One of the sealing members seals the space between the sealing portion and the nozzle holder. The other sealing member seals the space between the sealing portion and the cover, as described in claim 2 of the ultraviolet irradiation device.

4. The ultraviolet irradiation device according to any one of claims 1 to 3, further comprising a cover holding portion that extends in the first direction and biases the cover toward the cooling portion.

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