Heat shield for a NEG pump

Abstract

Heat shield element 10 for a non-evaporable getter (NEG) pump, comprising a shielding element 12 made from a sheet metal having a first end 12a and an opposite second end 12b, wherein the first end an

Claims

1. Heat shield element for a non-evaporable getter (NEG) pump, comprising:a shielding element made from a sheet metal having a first end and an opposite second end, wherein the first end and the second end are connected by an upper edge and an opposite lower edge, wherein the shielding element comprises a plurality of openings; andconnecting pins at the first end and / or the second end.

2. Heat shield element according to claim 1, wherein the shielding element is curved or bent and preferably semicircular.3, Heat shield element according to claims 1 or 2, wherein the connecting pins are connected to the shielding element by welding.

4. Heat shield element according to any of claims 1 to 3, wherein the pins at the first end and / or the second end are built combinedly by a post extending from the lower edge to the upper edge, respectively.5, Heat shield element according to any of claims 1 to 4, wherein the pins of the first end and / or the second end are combinedly provided by rolling the respective end into a cylindrical shape to form the pin.

6. Heat shield for a non-evaporable getter (NEG) pump, comprising a first heat shield element according to any of claims 1 to 5 and preferably one or more second heat shield elements according to any of claims 1 to 5.

7. Heat shield according to ciaim 6, wherein the first heat shield element and the one or more second heat shield element are bent or curved to form together a cylindrical shell.

8. Heat shield according to claims 6 or 7, wherein the first heat shield element and at least one of the second heat shield element are different or the first heat shield element and the one or more second heat shield elements are identical.

9. NEG pump comprisinga base element;a heating element extending from the base element;a plurality of NEG elements arranged around the heating element;a top element arranged at a side of the NEG elements opposite to the base element; anda heat shield according to any of claims 6 to 8 extending between the base element and the top element.

10. NEG pump according to claim 9, wherein one or more pins at the upper edge of the heat shield extend into respective recesses of the top element.

11. NEG pump according to claim 9 or 10, wherein one or more pins at the lower edge of the heat shield extend into respective recesses of the base element.

12. NEG pump according to ciaim 10 or 11, wherein one or more of the recesses are open in a direction perpendicular to the extension of the pin and comprising an undercut such that the pins can be snap-fitted into the respective recess.

13. Method for assembly of a heat shield according to any of claims 6 to 8 to an NEG pump, including:Providing a base element;Connecting a heating element to the base element and disposing a plurality of NEG elements around the heating element;Assembly of a top element disposed on a side of the plurality of NEG elements opposite to the base element;Assembly of a heat shield according to any of claims 6 to 8.

14. Method according to claim 13, including:Inserting the pins of one of the heat shield elements into respective recesses at the base element or the top element; andInserting the pins of the same heat shield element subsequently into respective recesses in the other one of the base element or the top element.

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