Probe device

Abstract

To provide a probe device with improved stability and durability in elastic force of an elastic part for generating a contact load to be applied to a probe.SOLUTION: A probe device includes: a housing having a first surface and a second surface; a conductive probe having a first contact part exposed on the first surface and a second contact part exposed on the second surface; and an elastic part arranged inside the housing. The probe changes a posture inside the housing so as to change a position of a contact area which has contact with an electrode pad in the second contact part in accordance with a displacement of the first contact part. The elastic part has a first elastic member and a second elastic member which is integrated with the first elastic member so as to reinforce elastic force of the first elastic member. The elastic part is elastically deformed in accordance with the posture change of the probe inside the housing, so as to energize the probe in a direction to cancel the displacement of the first contact part.SELECTED DRAWING: Figure 1

Description

【Technical Field】 【0001】 The present invention relates to a probe device used for inspecting the electrical characteristics of a device. 【Background Art】 【0002】 In the inspection of the electrical characteristics of a device in which a semiconductor integrated circuit or the like is mounted in a package, a probe device for electrically connecting between the device and the inspection device is used. The probe device electrically connects the electrode terminals of the device to electrode pads arranged on a substrate such as a printed circuit board (PCB). The electrode pads are electrically connected to the inspection device via wiring patterns or the like formed on the substrate. For example, there is a probe device including a conductive probe that simultaneously contacts the electrode terminal and the electrode pad, and an elastic portion that controls the contact load applied to the probe when contacting the electrode terminal and the electrode pad by an elastic force (see Patent Document 1). 【Prior Art Documents】 【Patent Documents】 【0003】 【Patent Document 1】 Japanese Patent Application Laid-Open No. 2019-35660 【Summary of the Invention】 【Problems to be Solved by the Invention】 【0004】 In a probe device that generates a contact load applied to the probe by the elastic force of the elastic portion, the elastic force of the elastic portion needs to be stable in order to stabilize the contact load. Further, in order to prevent a decrease in the elastic force of the elastic portion due to repeated measurements, an improvement in the durability of the elastic force of the elastic portion is desired. 【0005】 An object of the present invention is to provide a probe device in which the stability and durability of the elastic force of an elastic portion that generates a contact load applied to the probe are improved. 【Means for Solving the Problems】 【0006】 A probe device according to one aspect of the present invention comprises a housing having a first surface and a second surface, a conductive probe having a first contact portion exposed on the first surface and a second contact portion exposed on the second surface, and an elastic part disposed inside the housing. The probe changes its orientation inside the housing such that the position of the contact area in contact with the electrode pad at the second contact portion changes in response to the displacement of the first contact portion. The elastic part has a first elastic member and a second elastic member integrated with the first elastic member to reinforce the elastic force of the first elastic member. The elastic part elastically deforms in response to the change in the orientation of the probe inside the housing, biasing the probe in a direction that counteracts the displacement of the first contact portion. [Effects of the Invention] 【0007】 According to the present invention, it is possible to provide a probe device in which the stability and durability of the elastic force of the elastic part that generates the contact load applied to the probe are improved. [Brief explanation of the drawing] 【0008】 [Figure 1] Figure 1 is a schematic diagram showing the configuration of a probe device according to the first embodiment. [Figure 2] Figure 2 is a schematic cross-sectional view showing the elastic part of the probe device according to the first embodiment. [Figure 3] Figure 3 is a schematic diagram showing the change in the orientation of the probe of the probe device according to the first embodiment. [Figure 4] Figure 4 is a schematic perspective view showing the structure of the second elastic member of a probe device according to a modified example of the first embodiment. [Figure 5] Figure 5 is a schematic cross-sectional view showing the elastic part of a probe device according to a modified example of the first embodiment. [Figure 6] Figure 6 is a schematic diagram showing the configuration of a probe device according to the second embodiment. [Figure 7] Figure 7 is a schematic diagram showing the elastic part of the probe device according to the second embodiment. [Figure 8]Figure 8 is a schematic diagram showing an example of the relationship between the arrangement of the probe and the elastic part of a probe device according to the second embodiment. [Figure 9] Figure 9 is a schematic diagram showing an example of the configuration of the second elastic member of the probe device according to the second embodiment. [Figure 10] Figure 10 is a schematic perspective view showing the elastic part of a probe device according to a modified example of the second embodiment. [Figure 11] Figure 11 is a schematic diagram showing the configuration of a probe device according to the third embodiment. [Figure 12] Figure 12 is a schematic diagram showing the configuration of a probe device according to a modified example of the third embodiment. [Figure 13] Figure 13 is a schematic diagram showing another configuration of the probe device according to a modified example of the third embodiment. [Modes for carrying out the invention] 【0009】 Next, embodiments of the present invention will be described with reference to the drawings. In the following drawings, identical or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the ratios of the thicknesses of each part may differ from those of reality. Furthermore, it goes without saying that there are parts in the drawings where the dimensional relationships and ratios differ from those of other parts. The embodiments shown below are illustrative examples of devices and methods for realizing the technical idea of ​​this invention, and the embodiments of this invention do not limit the materials, shapes, structures, arrangements, etc. of the components to those described below. 【0010】 (First Embodiment) The probe device 1 according to the first embodiment shown in FIG. 1 is used for inspecting the electrical characteristics of the device 100 to be inspected. The device 100 is a test object in which a semiconductor integrated circuit or the like is mounted in a package. The probe device 1 electrically connects the electrode terminal 101 of the device 100 and the electrode pad 201 of the substrate 200. FIG. 1 illustratively shows the case where the electrode terminal 101 is a lead electrode of the package. The electrode pad 201 is electrically connected to the inspection device via a wiring pattern (not shown) formed on the substrate 200 or the like. 【0011】 The probe device 1 includes a housing 10 having a first surface 11 and a second surface 12 facing the first surface 11, a conductive probe 20 having a first contact portion 21 and a second contact portion 22 and supported by the housing 10, and an elastic portion 30 disposed inside the housing 10. The probe 20 functions as a contact for electrically connecting the electrode terminal 101 and the electrode pad 201. As the material of the probe 20, for example, a metal material such as a beryllium copper (Be-Cu) material or a palladium (Pd) alloy material is used. As the housing 10, for example, an insulating ceramic material or the like is used. 【0012】 The elastic portion 30 is disposed inside the housing 10 and the probe 20. The elastic portion 30 has a first elastic member 31 and a second elastic member 32 integrated with the first elastic member 31 to reinforce the elastic force of the first elastic member 31. As will be described later, the elastic portion 30 elastically deforms in response to a change in the posture of the probe 20 inside the housing 10, and biases the probe 20 in a direction to return to the posture of the probe 20 before the change. 【0013】 To facilitate the explanation of the operation of the probe device 1, as shown in FIG. 1, the X direction, the Y direction, and the Z direction are defined. In FIG. 1, the X direction is the left-right direction of the paper surface, the Y direction is the depth direction of the paper surface, and the Z direction is the up-down direction of the paper surface. Also, in the Z direction, the direction in which the device 100 is located as viewed from the probe device 1 is the upward direction, and the direction in which the probe device 1 is located as viewed from the device 100 is the downward direction. 【0014】 In FIG. 1, only one probe 20 of the probe device 1 is shown, but the probe device 1 may have a plurality of probes 20. For example, the probe device 1 may be configured to arrange a plurality of probes 20 along the Y direction. 【0015】 In FIG. 1, the probe device 1 is arranged downward of the device 100 as viewed from the Z direction. The first contact portion 21 of the probe 20 is exposed on the first surface 11 of the housing 10, and the second contact portion 22 of the probe 20 is exposed on the second surface 12 of the housing 10. The probe 20 is arranged in the housing 10 such that the first contact portion 21 contacts the electrode terminal 101 of the device 100 when the distance between the probe device 1 and the device 100 is reduced along the Z direction. Further, the probe device 1 is arranged in the housing 10 such that the contact region 220 of the second contact portion 22 contacts the electrode pad 201 of the substrate 200. As will be described later, during the inspection of the device 100, the position of the contact region 220 that contacts the electrode pad 201 at the second contact portion 22 changes due to the change in the Z-direction position of the first contact portion 21. 【0016】 When viewed from the Y direction, the probe 20 has a curved shape with an upward-facing recess formed therein. One end of the probe 20 located away from the outer portion of the probe 20 facing the recess (hereinafter referred to as the "curved portion") is the first contact portion 21. The other end of the probe 20 close to the recess is the second contact portion 22. A part of the arcuate region of the outer edge of the curved portion is the contact region 220. When the XY plane defined by the X direction and the Y direction is used as the projection plane, the projection line in the direction connecting the first contact portion 21 and the second contact portion 22 (hereinafter referred to as the "extension direction" of the probe 20) extends in the X direction. In other words, when viewed from the Z direction, the probe 20 extends in the X direction. 【0017】 The elastic portion 30 is cylindrical in shape with its axial direction extending in the Y direction. In other words, the axial direction of the elastic portion 30 is perpendicular to the direction in which the first contact portion 21 of the probe 20 is displaced, and also perpendicular to the direction in which the probe 20 extends. The elastic portion 30 is in contact with the inside of the recess of the probe 20. In other words, the elastic portion 30 is sandwiched between the surface of the recess of the probe 20 and the inner wall of the housing 10. 【0018】 The first elastic member 31 may be made of an insulating material such as an elastomer. For example, a resin material such as silicone rubber or urethane rubber may be used for the first elastic member 31. The second elastic member 32 may be a cylindrical coil spring that extends in the axial direction of the first elastic member 31, as shown in Figure 2. The central axis of the coil spring shown in Figure 2 extends in the Y direction, similar to the axial direction of the cylindrical first elastic member 31. The second elastic member 32 is entirely embedded inside the first elastic member 31. The second elastic member 32 may be made of a conductive material such as metal or an insulating material such as resin. The first elastic member 31 and the second elastic member 32 are integrated so that the elastic force of the second elastic member 32 reinforces the elastic force of the first elastic member 31. Specifically, the first elastic member 31 and the second elastic member 32 are integrated such that when the elastic portion 30 is compressed in a direction perpendicular to the Y-axis direction, the elastic forces of the first elastic member 31 and the second elastic member 32 act in the same direction. 【0019】 Figure 2 shows an example where the second elastic member 32 is a coil spring with a circular cross-sectional shape, but of course, the second elastic member 32 may have other shapes. For example, a coil-shaped second elastic member 32 may be constructed by winding a ribbon material that has a flat cross-sectional shape with few irregularities. 【0020】 During inspection of device 100, as shown in Figure 3, the conductive probe 20 electrically connects the electrode terminals 101 of device 100 to the electrode pads 201 of substrate 200. That is, during inspection of device 100, device 100 is moved relative to the probe device 1 along the Z direction, and the first contact portion 21 of the probe 20 is pressed against the electrode terminals 101 of device 100. At this time, the probe 20 changes its orientation inside the housing 10 with the second contact portion 22 in contact with the surface of the electrode pads 201 due to the pressing force applied to the first contact portion 21 between the first contact portion 21 and the electrode terminals 101. 【0021】 Specifically, in response to the displacement of the first contact portion 21 in the Z direction caused by the pressure applied to the first contact portion 21, the posture of the probe 20 changes inside the housing 10 while the second contact portion 22 maintains contact with the electrode pad 201. As the posture of the probe 20 changes, the position of the contact area 220 that contacts the electrode pad 201 at the second contact portion 22 changes. Figure 3 shows the posture of the probe 20 and the shape of the elastic portion 30 with solid lines when the first contact portion 21 and the electrode terminal 101 are in contact (hereinafter also referred to as the "contact state"). Also, Figure 3 shows the posture of the probe 20 and the shape of the elastic portion 30 with dashed lines when the first contact portion 21 and the electrode terminal 101 are not in contact (hereinafter also referred to as the "non-contact state"). When the device 100 is inspected, the posture of the probe 20 changes so that the position of the contact area 220 is closer to the first contact portion 21 than when it is in the non-contact state. 【0022】 In the contact state, the elastic part 30 is compressed between the probe 20 and the housing 10 in response to changes in the probe 20's orientation inside the housing 10. In other words, in the contact state, the elastic part 30 is elastically deformed. The elastically deformed elastic part 30 biases the probe 20 in the direction of returning it to the non-contact state. In other words, the elastic part 30 biases the probe 20 so that the first contact part 21 is pressed against the electrode terminal 101. As described above, a contact load is generated on the probe 20 by the elastic force of the elastic part 30. 【0023】 The elastic portion 30 of the probe device 1 is configured such that a second elastic member 32, which has elasticity, is integrated with a first elastic member 31, such as an elastomer, so that an elastic force acts in the same direction. As a result, in the probe device 1, the decrease in the elastic force of the first elastic member 31 is suppressed, and the durability of the elastic portion 30 can be improved. 【0024】 While the device 100 is being inspected, the elastic force of the elastic portion 30 maintains a state in which the first contact portion 21 is in contact with the electrode terminal 101 and the second contact portion 22 is in contact with the electrode pad 201. This ensures that an electrical connection is maintained between the electrode terminal 101 of the device 100 and the electrode pad 201 of the substrate 200 via the probe 20 during the inspection of the device 100. 【0025】 In probe device 1, a portion of the arc-shaped region at the outer edge of the curved part of probe 20 forms a contact region 220, which contacts the electrode pad 201 along a line extending in the Y direction. As shown in Figure 3, the position of the contact region 220 in the contact state is closer to the first contact portion 21 than the position of the contact region 220 in the non-contact state. The reason the position of the contact region 220 changes between the contact state and the non-contact state is that the position of the contact region 220 changes along the outer edge of the curved part in response to changes in the orientation of probe 20. Because the contact region 220 is included in the arc-shaped region of the curved part, the position of the contact region 220 that contacts the electrode pad 201 changes smoothly in response to changes in the orientation of probe 20. Therefore, even if the orientation of probe 20 changes, damage to the second contact portion 22 and the electrode pad 201 can be suppressed. 【0026】 As described above, during inspection of device 100, the elastic portion 30 sandwiched between the probe 20 and the housing 10 undergoes elastic deformation as the posture of the probe 20 changes. The elastic portion 30 then biases the probe 20 so that the first contact portion 21 contacts the electrode terminal 101 of device 100 with a predetermined pressure. In other words, the elastic portion 30 biases the probe 20 in a direction that counteracts the displacement of the first contact portion 21 caused by the pressing force applied to the first contact portion 21 when it is pressed against the electrode terminal 101. While device 100 is being inspected, that is, while the first contact portion 21 is in contact with the electrode terminal 101, the elastic portion 30 is in a compressed and deformed state. 【0027】 After the inspection of device 100 is complete, the relative position of device 100 in the Z direction with respect to probe device 1 is changed to increase the distance between device 100 and probe device 1. By separating the electrode terminals 101 of device 100 and the first contact portion 21 of probe 20, the pressing force applied to the first contact portion 21 is eliminated. As a result, the shape of the elastic portion 30 returns to a non-contact state, and the elastic force of the elastic portion 30 returns the position of probe 20 to a non-contact state. 【0028】 The probe 20 is supported by the housing 10 so as to be able to change its orientation in response to the displacement of the first contact portion 21 in the Z direction. The orientation of the probe 20 changes inside the housing 10 so as to change the position of the contact area 220 that contacts the electrode pad 201 at the second contact portion 22 in response to the displacement of the first contact portion 21 in the Z direction. For example, although not shown in the figures, a part of the probe 20 may be made to protrude and the protruding part of the probe 20 may be fitted into a support hole provided in the housing 10. Alternatively, a part of the probe 20 may be placed on a support portion of the housing 10 provided below the probe 20. 【0029】 As described above, the probe device 1 includes a probe 20 that simultaneously contacts the electrode terminal 101 and the electrode pad 201, and an elastic part 30 that biases the probe 20 by elastic force when the probe 20 is in contact with the electrode terminal 101. The elastic force of the elastic part 30 controls the contact load applied to the probe 20 when the probe 20 and the electrode terminal 101 come into contact. Increasing the elastic force of the elastic part 30 increases the contact load, and decreasing the elastic force of the elastic part 30 decreases the contact load. 【0030】 Furthermore, in the probe device 1, the amount of displacement of the first contact portion 21 due to contact with the electrode terminal 101 (hereinafter also referred to as "stroke") is controlled by the elastic force of the elastic portion 30. In other words, increasing the elastic force of the elastic portion 30 reduces the stroke, and decreasing the elastic force of the elastic portion 30 increases the stroke. 【0031】 By making the first elastic member 31 cylindrical with a hollow portion inside, it is easier to control the magnitude of the contact load and stroke. In other words, by increasing the thickness from the outer circumference to the hollow portion inside the cylindrical first elastic member 31, the contact load can be increased or the stroke can be decreased. On the other hand, by decreasing the thickness of the cylindrical elastic portion 30, the contact load can be decreased or the stroke can be increased. 【0032】 For example, in order to set the elastic force of the elastic part 30 so that the displacement amount of the first contact portion 21 due to contact with the electrode terminal 101 is a predetermined value, the thickness of the first elastic member 31 from the outer circumference to the hollow portion inside is adjusted. The predetermined value of the displacement amount of the first contact portion 21 is set, for example, so that the length of the contact mark created on the electrode terminal 101 when the probe 20 contacts the electrode terminal 101 is less than or equal to a predetermined constraint value. 【0033】 As described above, the probe device 1 according to the first embodiment has a configuration in which the elastic part 30 integrates a first elastic member 31 and a second elastic member 32. The elastic force of the first elastic member 31, such as an elastomer, is reinforced by the second elastic member 32. Therefore, the stability and durability of the elasticity of the elastic part 30 can be improved compared to the case where the elastic part 30 is made of a single material. As a result, the probe device 1 can stabilize the contact between the probe 20 and the electrode terminal 101 and the electrode pad 201. 【0034】 <Variation> In the probe device 1 according to the first embodiment, as shown in Figure 4, the second elastic member 32 of the elastic portion 30 may be a mesh-like cylindrical body. As shown in Figure 5, the second elastic member 32 is embedded inside the first elastic member 31, and the axial direction of the second elastic member 32 is the axial direction of the first elastic member 31. 【0035】 Even when the second elastic member 32 is a mesh-like cylindrical body, by integrating the first elastic member 31 and the second elastic member 32 so that elastic forces act in the same direction, the decrease in the elastic force of the first elastic member 31 can be suppressed and the durability of the elastic part 30 can be improved. Figure 4 shows an example where the second elastic member 32 has a honeycomb mesh structure, but the second elastic member 32 can be any mesh-like cylindrical body as long as the elastic force acts in the same direction as the first elastic member 31 when the elastic part 30 is compressed and deformed. 【0036】 (Second embodiment) In the probe device 1 according to the second embodiment, as shown in Figure 6, at least a portion of the second elastic member 32 is exposed on the surface of the first elastic member 31. Figure 7 shows an example in which the entire second elastic member 32, which is a coil spring, is arranged on the surface of the first elastic member 31. Alternatively, the second elastic member 32 may be embedded in the surface of the first elastic member 31, and the surface of the second elastic member 32 may be exposed on the surface of the first elastic member 31, thereby integrating the first elastic member 31 and the second elastic member 32. The fact that at least a portion of the second elastic member 32 is exposed on the surface of the first elastic member 31 is a difference between the probe device 1 according to the second embodiment and the first embodiment. The other configurations of the probe device 1 according to the second embodiment are the same as those of the first embodiment. 【0037】 According to the probe device 1 shown in Figure 6, when the device 100 is inspected, the posture of the probe 20 changes, causing the elastic part 30 sandwiched between the probe 20 and the housing 10 to elastically deform, and the first contact part 21 to contact the electrode terminal 101 with a predetermined pressure. The elastic part 30 is in a compressed state while the device 100 is being inspected. The elastic part 30 biases the probe 20 in a direction that counteracts the displacement of the first contact part 21 caused by the pressing force applied to the first contact part 21 when the first contact part 21 is pressed against the electrode terminal 101. 【0038】 Even if the second elastic member 32 is exposed on the surface of the first elastic member 31, the elastic force of the first elastic member 31 is reinforced by the second elastic member 32. Therefore, according to the probe device 1 of the second embodiment, by integrating the first elastic member 31 and the second elastic member 32, it is possible to suppress the decrease in the elastic force of the first elastic member 31 and improve the durability of the elastic part 30. 【0039】 Furthermore, as shown in Figure 8, if the same elastic portion 30 is in contact with multiple probes 20, an insulating material may be used for the second elastic member 32 so as not to short-circuit between the probes 20 via the second elastic member 32 exposed on the surface of the first elastic member 31. Alternatively, as shown in Figure 9, the second elastic member 32 may be divided at a position between the probes 20. Even if the second elastic member 32 is made of a conductive material, short-circuit between the probes 20 via the second elastic member 32 can be prevented by dividing the second elastic member 32 into multiple regions along the axial direction of the first elastic member 31. 【0040】 As described above, according to the probe device 1 of the second embodiment, the elastic force of the first elastic member 31 is reinforced by the second elastic member 32 integrated with the first elastic member 31. Therefore, the probe device 1 can improve the stability and durability of the elasticity of the elastic part 30. Otherwise, the probe device 1 of the second embodiment is substantially the same as that of the first embodiment, and redundant descriptions are omitted. 【0041】 <Variation> In the probe device 1 according to the second embodiment, as shown in Figure 10, the second elastic member 32, which is exposed and arranged on the surface of the first elastic member 31, may be a mesh-like cylindrical body. The second elastic member 32 may have a honeycomb mesh structure, as shown in Figure 10, or the mesh may be a cylindrical body of a different shape. The entire second elastic member 32 may be arranged on the surface of the first elastic member 31, or the surface of the second elastic member 32 embedded in the surface of the first elastic member 31 may be exposed on the surface of the first elastic member 31. Even if the second elastic member 32 is a mesh-like cylindrical body, by integrating the first elastic member 31 and the second elastic member 32, the decrease in the elastic force of the first elastic member 31 can be suppressed and the durability of the elastic part 30 can be improved. 【0042】 In the probe device 1 according to the second embodiment, if the same elastic portion 30 comes into contact with multiple probes 20, as in Figure 8, an insulating material may be used for the second elastic member 32 so that short circuits do not occur between the probes 20 via the second elastic member 32. Alternatively, the second elastic member 32 made of a conductive material may be divided between the probes 20 to prevent short circuits between the probes 20. 【0043】 (Third embodiment) The probe device 1 according to the third embodiment has a plurality of elastic parts 30, each integrating a first elastic member 31 and a second elastic member 32, inside the housing 10. For example, as shown in Figure 11, the probe device 1 has a first elastic part 30A and a second elastic part 30B, which contact the probe 20, respectively, and are arranged inside the housing 10. The first elastic part 30A is positioned inside the recess of the probe 20, similar to the elastic part 30 of the probe device 1 shown in Figure 1, and is sandwiched between the surface of the recess of the probe 20 and the inner wall of the housing 10. The second elastic part 30B contacts the probe 20 at a position separated from the position where the probe 20 contacts the first elastic part 30A. More specifically, the second elastic part 30B contacts the probe 20 at a position closer to the first contact part 21 than to the contact area 220. The second elastic part 30B is positioned between the probe 20 and the substrate 200 below the first contact part 21. Therefore, during inspection of the device 100, the second elastic part 30B elastically deforms between the probe 20 and the substrate 200 in response to changes in the position of the probe 20. Then, similar to the first elastic part 30A, the second elastic part 30B biases the probe 20 in the direction of returning it to the position of the probe 20 before the change. In the following, unless otherwise specified, the first elastic part 30A and the second elastic part 30B will be referred to as the elastic part 30. 【0044】 As described above, the probe device 1 according to the third embodiment differs from the first embodiment in that it has multiple elastic parts 30 inside the housing 10. The other configurations of the probe device 1 according to the third embodiment are the same as those of the first embodiment. For example, according to the probe device 1 shown in Figure 11, when the device 100 is inspected, the posture of the probe 20 changes, causing the multiple elastic parts 30 to elastically deform, and the first contact part 21 to contact the electrode terminal 101 with a predetermined pressure. While the device 100 is being inspected, each of the multiple elastic parts 30 is in a compressed and deformed state. The multiple elastic parts 30 bias the probe 20 in a direction that cancels out the displacement of the first contact part 21 caused by the pressing force applied to the first contact part 21 when the first contact part 21 is pressed against the electrode terminal 101. 【0045】 In Figure 11, an example is shown in which the elastic portion 30 has a structure in which the second elastic member 32 is embedded inside the first elastic member 31. However, similar to the probe device 1 according to the second embodiment, the first elastic member 31 and the second elastic member 32 may be integrated such that at least a part of the second elastic member 32 is exposed on the surface of the first elastic member 31. For example, the entire second elastic member 32 may be placed on the surface of the first elastic member 31, or a part of the second elastic member 32 may be embedded in the surface of the first elastic member 31. 【0046】 According to the probe device 1 of the third embodiment, the elastic force biasing the probe 20 is increased by having a plurality of elastic parts 30. Furthermore, by integrating the first elastic member 31 and the second elastic member 32 into an elastic part 30, the decrease in the elastic force of the first elastic member 31 can be suppressed, and the durability of the elastic part 30 can be improved. Otherwise, the probe device 1 of the third embodiment is substantially the same as that of the first and second embodiments, and redundant descriptions are omitted. 【0047】 <Variation> In the probe device 1 according to the third embodiment, the second elastic portion 30B may be positioned between the probe 20 and the housing 10. For example, as shown in Figure 12, the second elastic portion 30B may be positioned on the base portion 15 of the housing 10 located below the first contact portion 21 of the probe 20, so that the second elastic portion 30B elastically deforms between the probe 20 and the base portion 15. 【0048】 Furthermore, as shown in Figure 13, the outer edge of the first elastic member 31 of the second elastic portion 30B, as viewed from the Y direction, may be rectangular. For example, the first elastic member 31 of the second elastic portion 30B may be tubular in shape with a hollow portion. If the outer edge of the first elastic member 31 is rectangular, for example, a ribbon material with a flat cross-sectional shape that has few irregularities may be wound to form a coil-shaped second elastic member 32. 【0049】 (Other embodiments) Although the present invention has been described above by embodiments, the descriptions and drawings that constitute part of this disclosure should not be understood as limiting the invention. Various alternative embodiments, examples, and operational techniques will become apparent to those skilled in the art from this disclosure. 【0050】 For example, although the above description illustrates the case where the elastic part 30 is cylindrical, the shape of the elastic part 30 is not limited to a cylindrical shape. For example, the elastic part 30 may be cylindrical without a hollow portion, or the outer edge of the elastic part 30 viewed from the Y direction may be polygonal rather than circular. Also, the second elastic member 32 may be a plate-shaped elastic member. Although the example shown illustrates the case where the electrode terminal 101 of the device 100 is a lead electrode, the electrode terminal 101 may be a pad electrode, a bump electrode, or an electrode of a shape other than those. 【0051】 If a conductive material such as a metal spring is used for the second elastic member 32, the distance between the second elastic member 32 and the probe 20 is short, which may cause the measured values ​​of the high-frequency characteristics of the device 100 to be electrically affected by the second elastic member 32. For this reason, measures such as connecting the end of the conductive material second elastic member 32 to ground potential (GND) may be taken. 【0052】 Thus, the present invention naturally includes various embodiments not described herein. [Explanation of symbols] 【0053】 1…Probe device 10…Cabinet 11...Side 1 12…Second side 20…Probe 21...1st contact part 22…Second contact part 30…Elastic part 31...First elastic member 32...Second elastic member 100…devices 101...Electrode terminal 200... circuit board 201... Electrode pads

Claims

[Claim 1] A probe device that electrically connects the electrode terminals of the device to be inspected to an electrode pad connected to an inspection device, A housing having a first surface and a second surface opposite to the first surface, A conductive probe supported by the housing, having a first contact portion exposed on the first surface and a second contact portion exposed on the second surface, wherein the probe's orientation changes within the housing such that the position of the contact area in contact with the electrode pad at the second contact portion changes in response to the displacement of the first contact portion, An elastic part disposed inside the housing and having a first elastic member and a second elastic member integrated with the first elastic member to reinforce the elastic force of the first elastic member, wherein the elastic part elastically deforms in response to changes in the orientation of the probe inside the housing and biases the probe in a direction that cancels out the displacement of the first contact part. Equipped with, The second elastic member is embedded inside the first elastic member. Probe device. [Claim 2] A probe device that electrically connects the electrode terminals of the device to be inspected to an electrode pad connected to an inspection device, A housing having a first surface and a second surface opposite to the first surface, A conductive probe supported by the housing, having a first contact portion exposed on the first surface and a second contact portion exposed on the second surface, wherein the probe's orientation changes within the housing such that the position of the contact area in contact with the electrode pad at the second contact portion changes in response to the displacement of the first contact portion, An elastic part disposed inside the housing and having a first elastic member and a second elastic member integrated with the first elastic member to reinforce the elastic force of the first elastic member, wherein the elastic part elastically deforms in response to changes in the orientation of the probe inside the housing and biases the probe in a direction that cancels out the displacement of the first contact part. Equipped with, The second elastic member is embedded in the surface of the first elastic member and integrated with the first elastic member. At least a portion of the second elastic member is exposed from the surface of the first elastic member. Probe device. [Claim 3] The probe device according to claim 1 or 2, wherein the first elastic member is an elastomer. [Claim 4] The probe device according to claim 1 or 2, wherein the second elastic member is a cylindrical coil spring. [Claim 5] The probe device according to claim 1 or 2, wherein the second elastic member is a mesh-like cylindrical body. [Claim 6] The probe device according to claim 1 or 2, wherein the first elastic member has a hollow portion inside. [Claim 7] By adjusting the thickness of the first elastic member from the outer periphery of the first elastic member to the hollow portion, the elastic force of the elastic member is set so that the amount of displacement of the first contact portion due to contact with the electrode terminal is set to a predetermined value. The predetermined value of the displacement is set such that the length of the contact mark generated on the electrode terminal when the probe contacts the electrode terminal is less than or equal to a predetermined constraint value. The probe device according to claim 6.

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