Ultrahigh vacuum infrared spectrum in-situ analysis system
An ultra-high vacuum and infrared spectroscopy technology, which is applied in the direction of material analysis, analysis materials, and measuring devices by optical means, can solve problems such as affecting the accuracy of test results, contaminating the surface of materials, etc., to solve matching and performance compatibility problems, The effect of avoiding pollution
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[0018] Such as figure 1 , 2 As shown, an ultra-high vacuum infrared spectrum in-situ analysis system includes an infrared spectrometer 2, and the system also includes a sample control device 6 and an ultra-high vacuum acquisition device connected to the ultra-high vacuum sample chamber 1; the ultra-high vacuum sample chamber 1 There are ultra-high vacuum KBr infrared windows 7 on both sides; the ultra-high vacuum obtaining device includes an oil-free mechanical pump 4, a turbo molecular pump 5 and a sputtering ion pump; the sample control device 6 is controlled by a differential head through a shaft and a rod to control the friction below it The special sample holder is sealed with the ultra-high vacuum sample chamber 1 by metal, and the force and movement are transmitted through the bellows.
[0019] The ultra-high vacuum sample chamber 1 is connected with the space tribology experiment system through the gate valve 3 provided thereon.
[0020] The ultimate vacuum of the ul...
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