arpes vacuum system, vacuum safety interlock system and vacuum safety interlock method

Abstract

The invention provides an ARPES (angle resolved photoemission spectroscopy) vacuum system, a vacuum safety interlocking system and a vacuum safety interlocking method. The ARPES vacuum system comprises a vacuum pipeline; a mechanical fore pump, a first vacuum gauge, a first vacuum fore valve, a second vacuum fore valve, a third vacuum fore valve, a first molecular pump fore valve, a first molecular pump, a second molecular pump fore valve, a second vacuum gauge, a second molecular pump, a molecular pump valve, an ion pump valve, an ion pump, a sample preparation chamber and an analysis chamber; a chamber valve is arranged between the sample preparation chamber and the analysis chamber; the preparation chamber is connected with a third vacuum gauge and a fourth vacuum gauge; the analysis chamber is connected with a fifth vacuum gauge and an adsorbing pump; an adsorbing pump valve is arranged between the analysis chamber and the adsorbing pump; a condensing pump valve, a condensing pumpand a condensing pump gate valve are arranged sequentially on the vacuum pipeline between the first molecular pump and the analysis chamber.

Description

technical field [0001] The invention relates to the field of vacuum safety interlocking. In particular, it relates to an ARPES (Angle resolved photoemission spectroscopy, angle-resolved photoemission spectroscopy) vacuum system, a vacuum safety interlock system and a vacuum safety interlock method. Background technique [0002] Vacuum conditions, especially ultra-vacuum conditions, are necessary conditions for many technical applications. For example, synchrotron radiation beams are generated when electrons run at a speed close to light in a closed-loop vacuum electron storage ring. In order to maintain the normal operation of electronic storage rings and other equipment, it is necessary to protect and interlock the vacuum environment. [0003] Such as figure 1 As shown, the vacuum protection interlock control system in the prior art includes a front end 1, a water-cooled light screen 2, a pneumatic gate valve 3, a fast valve 4, a light valve 5, vacuum gauges 6, 7, 8, a pn...

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Problems solved by technology

However, this vacuum protection interlock control system is only used for synchrotron radiation beamline stations, and is not universal, for example, it cannot be applied to the ARPES vacuum system; moreover, this vacuum protection interlock control system can only close the fast valve 4 when an accident occurs , Pneumatic door valve 3, water-cooled light screen 2, can not control the vacuum pump group, neither can realize automatic vacuum mode, nor can it automatically stop the pump, and the vacuum protection effect is poor

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