Patsnap Eureka AI that helps you search prior art, draft patents, and assess FTO risks, powered by patent and scientific literature data.
5 results about "Sorption pump" patented technology
Filter
Efficacy Topic
Property
Owner
Technical Advancement
Application Domain
Technology Topic
Technology Field Word
Patent Country/Region
Patent Type
Patent Status
Application Year
Inventor
The sorption pump is a vacuum pump that creates a vacuum by adsorbing molecules on a very porous material like molecular sieve which is cooled by a cryogen, typically liquid nitrogen. The ultimate pressure is about 10⁻² mbar. With special techniques this can be lowered till 10⁻⁷ mbar. The main advantages are the absence of oil or other contaminants, low cost and vibration free operation because there are no moving parts. The main disadvantages are that it cannot operate continuously and cannot effectively pump hydrogen, helium and neon, all gases with lower condensation temperature than liquid nitrogen. The main application is as a roughing pump for a sputter-ion pump in ultra-high vacuum experiments, for example in surface physics.