High-purity NF3 intake control device and method of ultra-high vacuum system
An ultra-high vacuum and control device technology, which is used in measuring devices, material analysis by electromagnetic means, instruments, etc., can solve the problem of lack of in-depth research on the micro-precision control of the intake pipeline, and achieve the effect of simple operation.
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[0047] In this embodiment, a micro-control high-purity NF in an ultra-high vacuum system is set. 3 Intake device such as figure 1 As shown, the parameters are set without loss of generality.
[0048] In order to NF in the ultra-high vacuum system 3 The intake air volume is precisely fine-tuned and the residual air in the intake pipe is extracted. The present invention has certain requirements for the connection of pipeline equipment. First, if figure 1 shown, for NF 3 The requirements for the connection of the intake pipe are: NF 3 The intake pipe should be equipped with a primary pressure reducing valve 1, a secondary pressure reducing valve 2, and a ball valve 3, and then be connected with the adjustable trace intake valve 4 and the cavity of the ultra-high vacuum activation chamber 9. The front end of the valve 4 is provided with a three-way, 5-point, and one-way connection with the turbomolecular pump angle valve 6 for pumping air, and the gas pipeline can be pumped t...
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