Vacuum system and method for obtaining ultrahigh vacuum

A technology of ultra-high vacuum and vacuum system, which is applied in the field of vacuum system for obtaining ultra-high vacuum, can solve the problem of insufficient vacuum degree of ultra-high vacuum system, and achieve the effect of improving the experimental effect.

Pending Publication Date: 2020-07-10
SHANXI UNIV
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  • Summary
  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patented technology uses multiple types of suction devices such as rotating discs or scanning electrodes to create very strong negative pressure at low temperatures compared to traditional methods like evaporation techniques. By doing this it can improve experimentally important properties such as reducing particle size and increasing efficiency.

Problems solved by technology

The technical problem addressed by this patented technology relates to improving the performance of an ultrasonic device during certain types of experimentation without sacrificing their ability to achieve better levels of suction or maintain stable atmospheres at very low temperatures (<-200C).

Method used

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  • Vacuum system and method for obtaining ultrahigh vacuum

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Embodiment Construction

[0020] Vacuum system for obtaining ultra-high vacuum, including vacuum chamber 1, titanium sublimation pump 2, angle valve 3, turbomolecular pump 4, ion gauge 5, inflation valve 6, nitrogen source, sputtering ion pump 7, tee tube 8 ;

[0021] Wherein, the vacuum chamber 1 is a cylindrical structure; the center of the top wall of the vacuum chamber 1 is provided with a vacuum interface, and the vacuum interface is connected with the titanium sublimation pump 2; the upper part of the side wall of the vacuum chamber 1 is provided with a vacuum interface, The vacuum interface communicates with the turbomolecular pump 4 through the angle valve 3; the upper side wall of the vacuum chamber 1 is also provided with a measurement interface, which communicates with the ion gauge 5; the middle part of the side wall of the vacuum chamber 1 is provided with an inflation interface , the charging interface communicates with the nitrogen source through the charging valve 6; the lower part of t...

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Abstract

The invention relates to an ultrahigh vacuum system, in particular to a vacuum system and method for obtaining ultrahigh vacuum, and solves the problem that existing ultrahigh vacuum systems are not high enough in vacuum degree. The vacuum system for obtaining the ultrahigh vacuum comprises a vacuum chamber, a titanium sublimation pump, an angle valve, a turbo molecular pump, an ion gauge, an inflation valve, a nitrogen source, a sputtering ion pump and a three-way pipe; the vacuum chamber is of a cylindrical structure; a vacuum pumping port is formed in the center of the top wall of the vacuum chamber and communicates with the titanium sublimation pump; a vacuum pumping port is formed in the upper part of the side wall of the vacuum chamber and communicates with the turbo molecular pump through the angle valve; a measurement port is further formed in the upper part of the side wall of the vacuum chamber and communicates with the ion gauge; and an inflation port is formed in the middleof the side wall of the vacuum chamber and communicates with the nitrogen source through the inflation valve. The vacuum system and method are applicable to various physical and chemical experimentshaving the relatively high requirements for the vacuum degrees.

Description

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Claims

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Application Information

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Owner SHANXI UNIV
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