There is disclosed a method of making a high
dielectric capacitor of a
semiconductor device using Ta2O5, BST((Ba1-xSrx)TiO3) etc. of a high
dielectric characteristic as a
capacitor dielectric film in a very high integrated memory device. The present invention has its object to provide a method of manufacturing a high dielectric
capacitor of a
semiconductor device, which can effectively remove carbon contained within the thin film after deposition of the BST film and defects of
oxygen depletion caused upon deposition of the thin film and which can also remove carbon contained within the thin film after deposition of the
tantalum oxide film and defects of
oxygen depletion caused upon deposition of the thin film, without further difficult processes or without any deterioration of the electrical characteristic of the capacitor. It employs the technology which is able to effectively removing defects of carbon and
oxygen depletion within the thin film, by forming a
plasma O3 gas having a good reactivity and by
processing the
plasma for the BST thin film and
tantalum oxide film. Thus, it can extend the lifetime of the
activated oxygen of oxygen, which had been a problem in
processing a conventional UV-O3, by means of
plasma process using O3 gas. Therefore, it can effectively remove defects of carbon and oxygen within the BST thin film and
tantalum oxide film without complicating the process or deteriorating the electrical characteristic of the capacitor. The present invention also proposes a detailed process condition, which can optimize the plasma process using O3 gas.