The invention relates to the technical field of thin film and
coating preparation, in particular to a multi-structure
coupling magnetic field adaptability type rotating arc
ion plating device and solves the problems that in prior art, large particles exist, target material
etching and
coating uniformity are poor, the deposition efficiency is low, and the like. According to the rotating arc
ion plating device, a special multi-function multi-structure adaptability type
ion plating gun is matched with a structurally optimized water-cooling
flange sleeve to serve as an entire arc
source structure, an axial auxiliary
magnetic field device is arranged in the rear of a target material base of the
ion plating gun, a secondary rotating
transverse magnetic field generator and a focusing guide
magnetic field device are arranged on the outer side of the
flange sleeve, a poly-type composite magnetic field with a secondary rotating
transverse magnetic field as a master and other coupled magnetic fields is formed under the action of
coupling of three magnetic field devices, requirements of
rotating magnetic field states nearby a
target surface can be met, the arc spot electro-
discharge mode is improved, the
power density is reduced,
large particle emission is reduced, the magnetic field distribution of
plasma conveying space can be guaranteed, and
plasma conveying efficiency and uniformity are improved.