Multi-structure coupling magnetic field adaptability type rotating arc ion plating device

A magnetic field generating device and adaptive technology, applied in the field of multi-structure coupled magnetic field adaptive rotating arc ion plating device, can solve the problem of low deposition efficiency, affecting the performance and life of coatings and films, and poor target etching and coating uniformity And other issues
CN102936718AActive Publication Date: 2013-02-20温州驰诚真空机械有限公司
6 Cites 18 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
温州驰诚真空机械有限公司
Publication Date
2013-02-20

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention relates to the technical field of thin film and coating preparation, in particular to a multi-structure coupling magnetic field adaptability type rotating arc ion plating device and solves the problems that in prior art, large particles exist, target material etching and coating uniformity are poor, the deposition efficiency is low, and the like. According to the rotating arc ion plating device, a special multi-function multi-structure adaptability type ion plating gun is matched with a structurally optimized water-cooling flange sleeve to serve as an entire arc source structure, an axial auxiliary magnetic field device is arranged in the rear of a target material base of the ion plating gun, a secondary rotating transverse magnetic field generator and a focusing guide magnetic field device are arranged on the outer side of the flange sleeve, a poly-type composite magnetic field with a secondary rotating transverse magnetic field as a master and other coupled magnetic fields is formed under the action of coupling of three magnetic field devices, requirements of rotating magnetic field states nearby a target surface can be met, the arc spot electro-discharge mode is improved, the power density is reduced, large particle emission is reduced, the magnetic field distribution of plasma conveying space can be guaranteed, and plasma conveying efficiency and uniformity are improved.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to the technical field of thin film and coating preparation, in particular to a multi-structure coupled magnetic field adaptive rotary arc ion plating device. Background technique

[0002] Surface protective coating technology is an important way to improve the quality and service life of tools, molds and mechanical parts. As one of the material surface protection technologies, ion coating technology can be easily obtained due to its simple structure, high ionization rate, and high incident particle energy. Ceramic coatings and composite coatings with high hardness and high wear resistance, which are difficult to obtain by other methods, can be applied to tools and molds, which can double the service life and achieve low-cost and high-yield effects; in addition, Ion plating coating technology has two characteristics of low temperature and high energy. It can form a film on almost any substrate. It has a wide range of applications ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More