The utility model relates to a pretreatment device for detecting
metal impurities in iodo-
silane and detection equipment of the pretreatment device. The pretreatment device comprises a reaction tank, an empty
bottle, an absorption
bottle, a heating plate, a heating belt, a first connecting
pipe and a second connecting
pipe; the reaction tanks are located on the heating plate, the first connecting pipes correspond to the reaction tanks in a one-to-one mode, the reaction tanks are communicated with the empty bottles through the corresponding first connecting pipes, the empty bottles are communicated with the absorption bottles through the second connecting pipes, the absorption bottles are further provided with exhaust pipes used for exhausting, and first cover holes are formed in the reaction tanks. The first cover hole is used for being in
butt joint with an external gas source and adding reactants, and the heating belt is wound around the first connecting pipes to heat the first connecting pipes; aiming at the technical problems existing in
trace metal impurity detection of an iodo-
silane sample, the pretreatment device disclosed by the utility model has the advantages that on one hand, the iodo-
silane sample is effectively prevented from being in contact with the external environment in a test process, and the sample is prevented from being polluted and lost; and on the other hand, the problem of pipeline blockage is solved, the matrix elements in the iodo-silane sample are effectively separated, the interference of the matrix elements on
trace metal impurity detection in the subsequent ICP-MS determination process is eliminated, the detection sensitivity and precision are improved, and the detection analysis of
trace metal impurities under a
complex matrix is realized.