The invention relates to the technical field of target materials, and provides a preparation method of an AgPdCu
alloy sputtering target material, which comprises the following steps: firstly melting silver and preserving heat, then adding
palladium and
copper, heating to 1550 DEG C and preserving heat for 1 hour; the
alloy liquid is subjected to heat preservation for 1 hour, the cast
ingot is poured into a mold to be cooled after being subjected to homogenizing annealing, the cast
ingot is obtained,
casting stress can be eliminated, the non-uniformity of an as-cast structure is improved, and a more stable material basis is provided for follow-up
machining; then the cast
ingot is subjected to hot rolling at high temperature and at the
machining rate of 85%, coarse as-cast grains can be crushed, the structure can be refined, the material compactness can be improved, and the
mechanical property of the target material can be enhanced; 5 passes are conducted, cold rolling is conducted at the
machining rate of 15% in each pass, the
work hardening degree is controlled through step-by-step deformation, material
cracking is avoided, and meanwhile the thickness precision is guaranteed; annealing treatment is performed, so that cold rolling
internal stress can be eliminated, material
plasticity is recovered, and the strength and
processing performance of the target material are balanced; and finally, straightening and linear
cutting are carried out.