The invention discloses a preparation method of cubic phase silicon carbide micron particles, belongs to the technical field of silicon carbide preparation and semiconductor material preparation, and aims to solve the problems of high cost, high reaction temperature, difficulty in process control, complex process, low yield, lower purity and non-uniform particle size distribution in the existing preparation of cubic phase silicon carbide powder. The method comprises the following steps: treating silicon dioxide microspheres in a hydrogen peroxide solution to obtain activated silicon source particles; and introducing a gas carbon source in the presence of inert gas for high-temperature treatment, and removing impurities to obtain the zirconium acetylacetonate-loaded silicon dioxide microspheres. The cobalt acetylacetonate is used as a shape regulator, the silicon dioxide microspheres are used as a shape template, and the gaseous carbon source interacts with one another, so that the supersaturated linear growth of silicon carbide is effectively inhibited, and the morphology and the particle size of spherical particles are controlled. The method is simple, moderate in temperature, easy to control, high in production efficiency, high in product purity and uniform in particle size distribution. The method is suitable for preparing the micron-sized cubic phase silicon carbide particles.