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2744results about "Resilient/clamping means" patented technology

MEMS package with flexible circuit interconnect

A method of fabricating a package for a micro-electromechanical systems (MEMS) device. A flex circuit interconnect subassembly for the package is made by placing a flex circuit on a pad insert, attaching a carrier insert to the pad insert to deflect the lead portions of the flex circuit, and applying a cover insert to the pad insert, after the attachment of the carrier insert, to re-deflect the lead portions of the flex circuit toward the device bond sites. The flex circuit interconnect subassembly may be combined with an electronic device die / carrier subassembly to form a completed electronic device package. The flex circuit interconnect subassembly and the die / carrier subassembly are joined using mechanical interlocking layers. The invention is particularly suited for making such an electronic device die / carrier subassembly which has a MEMS die permanently affixed to a carrier. The carrier is advantageously utilized during the process of releasing a protective coating from the surface of the MEMS die which support the various MEMS components. The MEMS components on the MEMS die are hermetically sealed, such as by bonding a cover to the upper package body or the lower package body. The cover may have features such as ports which allow the MEMS components to interact with the external environment.
Owner:3M INNOVATIVE PROPERTIES CO
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