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44results about How to "Increase current channel" patented technology

Three-dimensional semiconductor device and fabrication method thereof

A three-dimensional semiconductor device comprises a plurality of storage units. Each storage unit comprises a channel layer, a bottom grid conductive layer, a floating gate layer, a plurality of second insulation layers, a plurality of grid conductive layers, a grid dielectric layer, a drain and a source, wherein the channel layer is arranged in a direction perpendicular to the surface of a substrate; the bottom grid conductive layer is arranged in a first insulation layer stack and arranged on a side wall of the channel layer; the floating gate layer is arranged on the first insulation layer stack and arranged on the side wall of the channel layer; the plurality of second insulation layer and the plurality of grid conductive layer are arranged on the floating grid layer and alternatively stacked along the side wall of the channel layer; the grid dielectric layer is arranged on the side wall of the channel layer; the drain is arranged at the top of the channel layer; and the source is arranged in the substrate between adjacent two storage units of the plurality of storage units. A floating gate which is not led out is embedded into the three-dimensional semiconductor device, a voltage is induced on the floating gate through voltage coupling on a near leading-out grid, thus, silicon epitaxial growth (SEG) and channel inversion of a poly-silicon contact region are assistantly completed, the current bottleneck of the region is overcome, the channel current is increased, and the consistency of threshold voltages of a field effect transistor (FET) near to the floating gate is effectively controlled.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Method for manufacturing medium/nitride composite structure enhanced field effect transistor

The invention discloses a method for manufacturing a medium / nitride composite structure enhanced field effect transistor, which comprises the steps of: sequentially growing a AlGaN buffer layer, a GaN channel layer, a AlN inserting layer, a AlGaN barrier layer and a AlInN cap layer on a substrate; and forming a AlInN / AlGaN / AlN composite front barrier and a GaN / AlGaN back barrier into a high electronic air tightness external channel well limited by strong electrons. The thick AlInN cap layer with lattice match remarkably improves the electronic air tightness of an external channel, and the high and wide barriers provided by the AlInN cap layer strengthen the quantum restriction of the channel well, thus the serial resistance of the external channel is lowered and the ohmic contact resistance is reduced. After the AlInN layer is corroded by using a dry method channeling process and the AlGaN barrier layer is thinned, a Si3N4 medium layer with set thickness is deposited by using an atom layer deposition (ALD) process, thus the quantum restriction of an internal channel well is strengthened, and the ON state current of the element is improved by band distortion of a heterojunction, caused in a way that an electron wave function does not permeate into the barrier layer, under the condition that a large grid voltage change is ensured. A negative space charge is introduced on the surface of the Si3N4 medium layer by using a fluorine plasma process, thus the barrier height is increased, electron air in the internal channel well is consumed fully to ensure that the inner channel is pinched off under zero grid voltage. An ideal module enhancing work is realized.
Owner:NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD

Isolation N-type laterally diffused metal oxide semiconductor (NLDMOS) device and manufacturing method thereof

The invention discloses an isolation N-type laterally diffused metal oxide semiconductor (NLDMOS) device. Two separate N-type deep well are formed on the P-type silicon substrate; left N-type deep well left portion is formed with a P-well; P-well left portion is formed with a P-type heavily doped region and an N-type heavily doped source miscellaneous areas; over the top and left-right portion of the N-type deep well P-well right portion formed with a gate oxide layer; N-type deep well with left and right P-type silicon N-type deep well between the top and right-left portion of the N-type deep well substrate above the field oxide is formed; the right N-type deep well right portion is formed with a drain terminal N-type heavily doped region; and a gate oxide layer over the top of the left part of the field oxide is formed with a gate polysilicon; P-type silicon substrate and the bottom of the field oxide Right N-type deep well formed in P-type implant drift region, the right of the P-type implant drift region as a staging interval shape. The invention also discloses a method for producing the isolated NLDMOS devices. The method can be isolated in ensuring NLDMOS device breakdown voltage does not decrease at the same time makes the device on-resistance is reduced.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Laterally diffused metal oxide semiconductor field effect transistor with RESURF (reduced surface field) structure

The present invention relates to a laterally diffused metal oxide semiconductor field effect transistor with an RESURF (reduced surface field) structure. The laterally diffused metal oxide semiconductor field effect transistor includes a substrate, a gate, a source, a drain, a body region, a field oxide region which is located between the source and the drain, as well as a first well region and a second well region which are located on the substrate; a plurality of gate doped regions are arranged in the second well region below the gate; the polysilicon gate of the gate is of a multi-section structure; the sections of the polysilicon gate are separated from one another; the gate doped regions are arranged below gaps between the sections of the polysilicon gate; and each gate doped region is electrically connected with one of two sections of the polysilicon gate which are located at two sides of the gate doped region, wherein the one section of the polysilicon gate electrically connected with the gate doped region is adjacent to the source. According to the laterally diffused metal oxide semiconductor field effect transistor with the RESURF structure of the invention, the number of trench electrons is increased, and the electrons are accelerated a plurality of times during a process of flowing from the source to the drain, equivalently, and a trench electric field and trench current can be improved, and therefore, trench resistance is reduced, and on-resistance can be reduced.
Owner:CSMC TECH FAB2 CO LTD

Semiconductor structure and manufacturing method thereof

The invention provides a semiconductor structure. The semiconductor structure comprises a substrate, a gate stack, source / drain areas and STI structures, wherein the gate stack is located on the substrate and comprises at least a gate medium layer and a gate electrode layer, the source / drain areas are located in the portions, arranged at the two sides of the gate stack, of the substrate, the STI structures are located in the portions, arranged at the two sides of the source / drain areas, of the substrate, and according to the type of the semiconductor structure, the shape of the section of each STI structure is a regular trapezoid or a Sigma shape or a reverse trapezoid. Correspondingly, the invention further provides a manufacturing method of the semiconductor structure. According to the semiconductor structure, through the combination of the STI structures of different shapes and fillers with different kinds of stress, different kinds of tensile stress or pressure stress on a channel can be generated in the transverse direction, so that positive influence on the electron mobility of an NMOS and the hole mobility of a PMOS is generated, and the channel current of a device is increased. Therefore, the performance of the semiconductor structure is effectively improved.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Hollow electric-rotating connector

The invention relates to a hollow electric-rotating connector. Electric sliding rings are sleeved on a sliding ring shaft sleeve, two ends of the sliding ring shaft sleeve are rotatably assembled with supporting devices connected through a bridging beam, the bridging beam is fixedly provided with an electric connector installing box corresponding to an electric brush group, an electric connector is fixedly arranged on the vertical wall of the electric connector installing box, an electric connector installing board is fixedly arranged on one end of the sliding ring shaft sleeve, an end part electric connector is fixedly arranged on the electric connector installing board, one side of each electric sliding ring close to the sliding ring shaft sleeve is connected with the end part electric connector through a corresponding sliding ring conductor, and the sliding ring conductors are arranged on the outer wall of the sliding ring shaft sleeve. According to the hollow electric-heating connector, the conductors used for connecting the electric sliding rings and the end part electric connector are arranged on the outer wall of the sliding ring shaft sleeve, the inner hole wiring of the traditional sliding ring shaft sleeve is changed into the outer wall wiring, thus the space inside the sliding ring shaft sleeve is remained, and can be used for installing parts needing installing.
Owner:CHINA AVIATION OPTICAL-ELECTRICAL TECH CO LTD

Three-dimensional semiconductor device and manufacturing method thereof

A three-dimensional semiconductor device comprising a plurality of memory cells, each comprising: a channel layer distributed along a direction perpendicular to a substrate surface; a bottom gate conductive layer located in a first insulating layer stack and distributed on the side of the channel layer On the wall; the floating gate layer is located on the first insulating layer stack and distributed on the sidewall of the channel layer; a plurality of second insulating layers and a plurality of gate conductive layers are located on the floating gate layer and along the channel Layer sidewalls are stacked alternately; the gate dielectric layer is distributed on the sidewalls of the channel layer; the drain is located on the top of the channel layer; and the source is located in the substrate between two adjacent storage units of multiple storage units . The non-extracted floating gate is embedded inside, and the voltage is induced on the floating gate through the coupling of the voltage on the adjacent extraction gate to assist in completing the channel inversion of the contact area between the SEG and the polysilicon, thereby overcoming the current bottleneck in this area and increasing the channel current. Effectively control the threshold voltage consistency of the floating gate adjacent FETs.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Isolated nldmos device and manufacturing method thereof

The invention discloses an isolation N-type laterally diffused metal oxide semiconductor (NLDMOS) device. Two separate N-type deep well are formed on the P-type silicon substrate; left N-type deep well left portion is formed with a P-well; P-well left portion is formed with a P-type heavily doped region and an N-type heavily doped source miscellaneous areas; over the top and left-right portion of the N-type deep well P-well right portion formed with a gate oxide layer; N-type deep well with left and right P-type silicon N-type deep well between the top and right-left portion of the N-type deep well substrate above the field oxide is formed; the right N-type deep well right portion is formed with a drain terminal N-type heavily doped region; and a gate oxide layer over the top of the left part of the field oxide is formed with a gate polysilicon; P-type silicon substrate and the bottom of the field oxide Right N-type deep well formed in P-type implant drift region, the right of the P-type implant drift region as a staging interval shape. The invention also discloses a method for producing the isolated NLDMOS devices. The method can be isolated in ensuring NLDMOS device breakdown voltage does not decrease at the same time makes the device on-resistance is reduced.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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