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88 results about "Resonant-tunneling diode" patented technology

A resonant-tunneling diode (RTD) is a diode with a resonant-tunneling structure in which electrons can tunnel through some resonant states at certain energy levels. The current–voltage characteristic often exhibits negative differential resistance regions.

Resonant tunneling diode based high-sensitivity detector with low dark current

ActiveCN104659145AIncrease the difficulty of passingLow densitySemiconductor devicesElectrode ContactAbsorption layer
A resonant tunneling diode based high-sensitivity detector with low dark current comprises a substrate, an emitting electrode contact layer, an emitting region, an isolating layer, a double-potential-barrier structure, an absorption layer, a collector region, an upper electrode and a lower electrode, wherein the emitting electrode contact layer is manufactured on the substrate; the emitting region is manufactured on the emitting electrode contact layer, and a table board is formed on the other side of the emitting electrode contact layer; the isolating layer is manufactured on the emitting region; the double-potential-barrier structure is manufactured on the isolating layer; the absorption layer is manufactured on the double-potential-barrier structure; the collector region is manufactured on the absorption layer; the upper electrode is manufactured on the collector region; the lower electrode is manufactured on the table board on the other side of the emitting electrode contact layer. According to the resonant tunneling diode based high-sensitivity detector with the low dark current, the dark current can be further reduced; with the adoption of npin type doping, the low dark current can be obtained by the resonant tunneling diode based near-infrared detector.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI

Quanta point resonance tunnel penetration diode for faint light detection and its detection method

The present invention discloses a quantum dot resonant tunneling diode for weak light detection and a detection method thereof, wherein, the quantum dot resonant tunneling diode comprises GaAs responsive to visible light or an InGaAs photon absorption region responsive to infrared, self-assembling quantum dots, a thin AlAs double barrier layer, and a GaAs potential well layer. The combination formed by the self-assembling quantum dots, the thin AlAs double barrier layer and the GaAs potential well layer allows the quantum dots to directly participate in the resonant tunneling process, the amplifying capacity of the resonant tunneling process upon photo-generated carriers is greatly improved. The detection method is as follows: filling carriers to the quantum dots to form a metastable state before incident light detection, and further improving the photoresponse capacity of devices. The diode and the detection method have the advantages that: the structure of the device is simple, the size and the density of the quantum dots are within a general growth range, and the manufacture is easy; the device obtains the photon detection with ultra high sensitivity at liquid nitrogen temperature.
Owner:SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI

Detuning feed seam antenna RTO terahertz wave source and manufacturing process

The invention discloses a detuning feed seam antenna RTO terahertz wave source and a manufacturing process. The detuning feed seam antenna RTO terahertz wave source comprises a left electrode and a right electrode arranged on a main substrate, wherein the left side edge of the right electrode is embedded in a concave edge formed on the lower part of the right side of the left electrode, and a silicon dioxide layer is symmetrically arranged between upper and lower opposite end faces of two ends of each of the left electrode and the right electrode to ensure that air cavities communicating with one another are formed among the main substrate, the silicon dioxide layer, the left electrode and the right electrode, a convex block protruding towards the right electrode is formed in the middle part of the right side edge of the left electrode, and grooves are symmetrically formed in the left electrode positioned on two sides of the convex block, wherein the main substrate for forming bottom surfaces of the air cavities is positioned below the two grooves, a resonant tunneling diode is arranged between the bottom surface of the convex block and the upper end surface of the corresponding main substrate and has a knife structure, and the knife handle part of the knife structure is transversely inserted into a concave edge formed on the lower part of the left side of the right electrode. The detuning feed seam antenna RTO terahertz wave source disclosed by the invention can achieve oscillation of an oscillator at different frequency bands by changing the position of an RTD in the oscillator.
Owner:TIANJIN UNIV

Monolithic integrated manufacturing method for indium phosphide-based resonant tunneling diodes and high-electron-mobility transistors

The invention provides a monolithic integrated manufacturing method for indium phosphide-based resonant tunneling diodes and high-electron-mobility transistors, which comprises the following basic steps: orderly growing high-electron-mobility transistor and resonant tunneling diode materials on a semiconductor material indium phosphide (InP) substrate with molecular beam epitaxial equipment; etching the surface of an epitaxial wafer with electron beams, and forming the mesa of the resonant tunneling diodes through optical lithography and wet etching; realizing the isolation between devices through the optical lithography and the wet etching to form isolated channels; manufacturing upper and lower electrodes of the resonant tunneling diodes and source electrodes and drain electrodes of the high-electron-mobility transistors through metal ohmic contact, and then annealing; manufacturing grid electrodes through electron beam lithography, dry etching and wet etching; manufacturing metal terminals through dry etching, optical lithography and electron beam evaporation; and finally, interconnecting the resonant tunneling diodes and the high-electron-mobility transistors through a benzocyclobutene flatness process and metal wiring. The method has the characteristics of simple process, strong operability, high finished product ratio and the like, and has good practicability.
Owner:NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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