The invention discloses a detuning feed seam antenna RTO terahertz wave source and a manufacturing process. The detuning feed seam antenna RTO terahertz wave source comprises a left
electrode and a right
electrode arranged on a main substrate, wherein the left side edge of the right
electrode is embedded in a concave edge formed on the lower part of the right side of the left electrode, and a
silicon dioxide layer is symmetrically arranged between upper and lower opposite end faces of two ends of each of the left electrode and the right electrode to ensure that air cavities communicating with one another are formed among the main substrate, the
silicon dioxide layer, the left electrode and the right electrode, a convex block protruding towards the right electrode is formed in the middle part of the right side edge of the left electrode, and grooves are symmetrically formed in the left electrode positioned on two sides of the convex block, wherein the main substrate for forming bottom surfaces of the air cavities is positioned below the two grooves, a
resonant tunneling diode is arranged between the bottom surface of the convex block and the upper end surface of the corresponding main substrate and has a knife structure, and the knife
handle part of the knife structure is transversely inserted into a concave edge formed on the lower part of the left side of the right electrode. The detuning feed seam antenna RTO terahertz wave source disclosed by the invention can achieve oscillation of an oscillator at different frequency bands by changing the position of an RTD in the oscillator.