Resonant tunneling diode based on InGaAs/AlAs material
A resonant tunneling and diode technology, applied in diodes and other directions, can solve the problems of small electron mobility and saturation speed, and achieve the effects of reducing transit time, increasing operating frequency, and increasing peak-to-valley current ratio.
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[0018] In order to realize nanoelectronic devices with extremely high frequency and working speed, the present invention proposes a resonant tunneling diode based on InGaAs / AlAs material, using n-type InP as the substrate; heavily doped InGaAs to form the emission layer and the collection area; Use the strained InGaAs layer as the quantum well and AlAs as the potential barrier to form a double barrier single potential well structure (DBS); a mesa structure formed by n-type heavily doped high In composition InGaAs is formed on the substrate and the mesa respectively Au / Pi / Ti metal electrodes.
[0019] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.
[0020] figure 1 Shown is a schematic diagram of the mesa structure of a resonant tunneling diode based on InGaAs / AlAs.
[0021] This InGaAs / AlAs-based resonant tunneling diode includes, from bottom to top:
[0022] InP substrate layer 1;
[0023] An ...
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