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Resonant tunnelling bionic vector underwaster sensor

An underwater acoustic sensor, resonant tunneling technology, used in the measurement of ultrasonic/sonic/infrasonic waves, instruments, measuring devices, etc., to achieve the effects of low power consumption, high sensitivity, and high conversion efficiency

Inactive Publication Date: 2007-02-14
ZHONGBEI UNIV
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  • Summary
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Problems solved by technology

[0006] In order to solve the problem that the improvement of the sensitivity and resolution of existing underwater acoustic sensors has reached the limit state of detection, thus limiting the further improvement of detection accuracy, the present invention utilizes the resonant tunneling diode based on the resonant tunneling thin film tunneling effect. Nanoscale Devices Provide a Resonant Tunneling Biomimetic Vector Underwater Acoustic Sensor

Method used

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Embodiment Construction

[0021] A resonant tunneling bionic vector underwater acoustic sensor, consisting of a semiconductor substrate 1 and a resonant tunneling diode RTD2 processed by molecular beam epitaxy (MBE) technology and MEMS processing technology on the semiconductor substrate 1, and its density and the density of water The same or similar micro-pillars 4 are formed, and the middle part of the semiconductor substrate 1 is etched into a cross-shaped cantilever beam structure by semiconductor etching technology, and the micro-pillars 4 are fixed at the center of the cross-shaped cantilever beam 3 (that is, the intersection of four beams) , the resonant tunneling diodes RTD2 are respectively arranged on the ends of the cross-shaped cantilever beams 3 and four beams. The cross-shaped cantilever beam 3 in the middle of the semiconductor substrate 1 is etched into a thin and elastic cantilever beam by using a backside etching process. The micro cylinder 4 can be a hollow-core photonic crystal fibe...

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Abstract

A vector underwater sound transducer of resonant tunneling bionic type is prepared as applying semiconductor etching technique to each bottom-middle part of semiconductor substrate to be structure of cross cantilever beam, fixing micro cylindrical body at center of cross cantilever beam and setting resonant tunneling diode separately at end portions of four beams on cross cantilever beam.

Description

technical field [0001] The invention relates to an underwater acoustic sensor, in particular to a resonant tunneling bionic vector underwater acoustic sensor based on a resonant tunneling diode (RTD) with high sensitivity, low power consumption, small volume and high conversion efficiency. Background technique [0002] Underwater acoustic sensors are an important part of sonar detection. From the perspective of the development history of underwater acoustics, every step of the development of underwater acoustic applications is inseparable from the development of underwater acoustic sensor technology. With the rapid advancement of science and technology, the development of underwater acoustic sensors is extremely active and rapid. For example, in the military field, it detects targets such as ships and torpedoes that use stealth technology; Hydroacoustic sensors are used in many fields such as marine exploration, fishery production, and navigation security. [0003] At prese...

Claims

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Application Information

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IPC IPC(8): G01H11/00G01S7/521
Inventor 张文栋刘俊熊继军薛晨阳张斌珍谢斌陈尚
Owner ZHONGBEI UNIV
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