Resonant tunnelling bionic vector underwaster sensor
An underwater acoustic sensor, resonant tunneling technology, used in the measurement of ultrasonic/sonic/infrasonic waves, instruments, measuring devices, etc., to achieve the effects of low power consumption, high sensitivity, and high conversion efficiency
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[0021] A resonant tunneling bionic vector underwater acoustic sensor, consisting of a semiconductor substrate 1 and a resonant tunneling diode RTD2 processed by molecular beam epitaxy (MBE) technology and MEMS processing technology on the semiconductor substrate 1, and its density and the density of water The same or similar micro-pillars 4 are formed, and the middle part of the semiconductor substrate 1 is etched into a cross-shaped cantilever beam structure by semiconductor etching technology, and the micro-pillars 4 are fixed at the center of the cross-shaped cantilever beam 3 (that is, the intersection of four beams) , the resonant tunneling diodes RTD2 are respectively arranged on the ends of the cross-shaped cantilever beams 3 and four beams. The cross-shaped cantilever beam 3 in the middle of the semiconductor substrate 1 is etched into a thin and elastic cantilever beam by using a backside etching process. The micro cylinder 4 can be a hollow-core photonic crystal fibe...
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