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67results about How to "Reduce reverse recovery charge" patented technology

Rapid superjunction longitudinal double-diffusion metal oxide semiconductor transistor

The invention relates to a rapid superjunction longitudinal double-diffusion metal oxide semiconductor transistor which comprises a cell area, a terminal area and a transition area, wherein the terminal area is arranged at the outermost periphery of a chip; the transition area is positioned between the cell area and the terminal area; the bottoms of the cell area, the transition area and the terminal area (III) are provided with drain electrode metal; a heavy doping n-type silicon substrate is arranged on the drain electrode metal and used as a drain area of the chip; an n-type doping epitaxial layer is arranged on the heavy doping n-type silicon substrate; and a discontinuous p-type doping columnar semiconductor area is arranged in the n-type doping epitaxial layer. The rapid superjunction longitudinal double-diffusion metal oxide semiconductor transistor is characterized in that an n-type heavy doping semiconductor area is arranged in a second p-type doping semiconductor area in the transition area, and the surface of the n-type heavy doping semiconductor area is provided with a contact hole which is connected with a metal layer to form a ground contact electrode of the chip. The invention can effectively reduce the reverse recovery charge of a device and improve the reverse recovery characteristics under the conditions of not increasing the process cost or changing the main parameter of the device.
Owner:SOUTHEAST UNIV

Diffusion-technology-based manufacture method for fast recovery diode chip having double buffering layers

The invention relates to a diffusion-technology-based manufacture method for a fast recovery diode chip having a double-buffer-layer structure. During a manufacture process, reverse recovery charges and reverse recovery time are reduced and effect of reverse recovery peak current is inhibited. The fast recovery diode is formed by adopting a phosphorus deep diffusion mode and a cathode structure formed by the diffusion is an N+N structure, an N area is a buffering layer which can block expansion of a space charge area, shortens a width of a base area and reduces forward on-state voltage drop; when the diode is reverse, an electric field between an N-N interface and an NN+ interface slows down carrier reverse drawing speed, which enables more charges to be used for recombination and softens the recovery characteristics. The diffusion-technology-based manufacture method adopts the diffusion mode to form the anode and the cathode of the fast recovery diode chip, combines with the platinum diffusion minority carrier life control technology, has a simple manufacture technology process and can manufacture the fast recovery diode chip which is low in cost, high in voltage resistance, short in recovery time and has soft recovery characteristics.
Owner:BEIJING MXTRONICS CORP +1

Silicon carbide Trench MOS device and manufacturing method thereof

The invention discloses a silicon carbide Trench MOS device and a manufacturing method thereof, and belongs to the technical field of power semiconductors. The method includes: a layer of a polysilicon region distributed in a pi shape is additionally arranged under a trench gate structure of a conventional device, the polysilicon region and an epitaxial layer form a Si/SiC heterojunction, and a diode is integrated in the device. Compared with a parasitic silicon carbide diode which directly employs a silicon carbide Trench MOS, according to the silicon carbide Trench MOS device and the manufacturing method thereof, the junction voltage drop of the device diode during application is substantially reduced, and the switch-on characteristic of the device is improved through large junction area of the heterojunction; moreover, the gate-drain capacitance and the ratio of the gate-drain capacitance to the gate-source capacitance of the device are reduced, and the performance and the reliability of the device MOS during application are enhanced; besides, the silicon carbide Trench MOS device and the manufacturing method thereof are also advantageous in that the reverse recovery time is short, the reverse recovery charges are less, and advantages including low reverse leakage, high breakdown voltage, and good temperature stabilization performance of the conventional silicon carbide Trench MOS device are maintained. In conclusion, according to the silicon carbide Trench MOS device and the manufacturing method thereof, the prospect is wide in circuits such as inversion circuits and chopper circuits etc.
Owner:HANGZHOU SILICON-MAGIC SEMICON TECH CO LTD

Silicon carbide Trench MOS device and manufacturing method thereof

The invention discloses a silicon carbide Trench MOS device and manufacturing method thereof, and belongs to the technical field of power semiconductors. A convex polycrystalline silicon region is additionally arranged inside an epitaxial layer, and two independent trench gates are arranged in a groove of the convex polycrystalline silicon region, so that a polycrystalline silicon layer and the epitaxial layer form a Si / SiC heterojunction. Compared with direct utilization of a parasitic silicon carbide diode of a silicon carbide Trench MOS, a junction voltage drop during application of the device diode is remarkably reduced, and a relatively large heterojunction area improves a device conduction characteristic; based on a charge shielding effect of the convex polycrystalline silicon, gate-drain capacitance and a ratio of gate-drain capacitance and gate-source capacitance are reduced, thereby remarkably improving performance and reliability of the device; and the device adopts single-pole electric conduction, thus has relatively good reverse recovery performance and has the advantages of low reverse electric leakage, high breakdown voltage and good device temperature stability performance of a traditional Trench MOS device, and therefore the silicon carbide Trench MOS device provided by the invention has broad prospects in circuits such as an inverter circuit and a chopper circuit.
Owner:HANGZHOU SILICON-MAGIC SEMICON TECH CO LTD

SiC vertical double diffused metal-oxide-semiconductor (VDMOS) device and fabrication method thereof

The invention discloses a SiC vertical double diffused metal-oxide-semiconductor (VDMOS) device and a fabrication method thereof, and belongs to the technical field of a power semiconductor. A poly-silicon layer is directly deposited on a surface of a junction field-effect transistor (JFET) region of the SiC VDMOS device to form a Si / SiC heterojunction, a diode is further integrated in the device, and the application of the device in the field of an inversion circuit, a chopping circuit and the like is optimized. Compared with the prior art directly employing a VDMOS parasitic SiC diode, the SiC VDMOS device has the advantages of relatively low power loss, relatively fast working speed and relatively high working efficiency, and positive conduction is easier to achieve; compared with the prior art that a fast recovery diode (FRD) is reversely connected with the exterior of the device in parallel, the SiC VDMOS device has the advantages that the usage number of the device is reduced, connection lines between the devices are reduced, and the miniature development of the device is promoted; moreover, the grid width is reduced, the grid capacitance is reduced, and the working speed of the device is further increased; and therefore, the VDMOS device proposed by the invention has wide application prospect in the circuit field of the inversion circuit, the chopping circuit and the like.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Vertical double-diffusion metal oxide semiconductor device and manufacturing method thereof

The embodiments of the invention provide a vertical double-diffusion metal oxide semiconductor device and a manufacturing method thereof. The method comprises the steps of: providing a substrate of afirst conductive type; forming an epitaxial layer of the first conductive type on the substrate; forming a split gate structure on the epitaxial layer, a first split gate region and a second split gate region each comprising a first insulating layer and a polycrystalline silicon layer on the first insulating layer; forming a first doped region and a second doped region of a second conductive typeon the upper surface of the epitaxial layer; forming a second insulating layer on the epitaxial layer, the second insulating layer covering the first split gate region and the second split gate region; and removing the second insulating layer on the first doped region and the second doped region to expose the first doped region and the second doped region. The embodiments of the invention providea manufacturing method and a structure of a vertical double-diffusion metal oxide semiconductor device, which can reduce the reverse capacitance and the switching time of the device and improve the voltage endurance of the device.
Owner:WUXI CHINA RESOURCES HUAJING MICROELECTRONICS

Diode and manufacturing method thereof

A technical scheme of the invention relates to a diode and a manufacturing method thereof. The diode comprises: a substrate of a first conductivity type, well regions of a second conductivity type isformed on edges of two sides of the upper and lower surfaces of the substrate, a first epitaxial layer of a first conductivity type, a buried layer formed on the first epitaxial layer and connected tothe substrate, a second epitaxial layer of the first conductivity type, field oxygen regions formed on edges of two sides on the second epitaxial layer corresponding to the well regions, a first doped region of the second conductivity type, a front metal and a back metal formed in the second epitaxial layer. As the bury layer is provide on the first epitaxial layer, such that a parasitic avalanche diode is formed on the cathode side, As the breakdown voltage is low, the reverse recovery time can be shortened and the soft reverse recovery characteristic can be obtained. Meanwhile, the well regions of the second conductivity type are respectively injected to the upper and lower surfaces of the substrate, and the reverse recovery charge can be reduced by cooperating with the field oxygen regions, the reverse recovery time can be shortened, and the softer reverse recovery characteristic is achieved.
Owner:深圳市天佑照明有限公司

Bootstrap structure and bootstrap circuit integrated on high and low voltage isolation structure

ActiveCN107910326BFunction as a bootstrapSolve reliability problems such as partial breakdownSolid-state devicesSemiconductor devicesCapacitanceLow voltage
The invention relates to a bootstrap structure integrated to a high-and-low-voltage isolation structure and a bootstrap circuit. The bootstrap structure is composed of a first doped type substrate serving as a substrate for a high-and-low-voltage isolation structure, a second doped type drift region serving as a drift region, and a first doped type substrate contact well serving as a substrate contact well. A first doped type substrate contact region as a substrate contact electrode is arranged in the first doped type contact well. A bootstrap structure positive electrode and a bootstrap structure negative electrode are respectively provided in the second doped type drift region; the bootstrap structure positive electrode is one second doped type contact region arranged in the second dopedtype drift region; the bootstrap structure negative electrode is the other second doped type contact region arranged in the second doped type drift region; and the bootstrap structure positive electrode is adjacent to the first doped type contact region. In addition, the bootstrap circuit consists of a bootstrap structure and a bootstrap capacitor; a diode is connected to the bootstrap structurepositive electrode; and the bootstrap capacitor is connected with the bootstrap structure negative electrode.
Owner:SOUTHEAST UNIV
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