Sample transfer device and sample transfer method for ultra-high vacuum magnetic force microscope

Abstract

The application provides a sample transmission device and method for an ultrahigh vacuum magnetic force microscope, which comprises a working box, a transition box, a sample feeding assembly, a sample transmission assembly, a sample storage assembly and a switch structure. The working box can be pumped to a set vacuum degree, and has a test position, a transfer position and a temporary storage position. The test position is used for placing a sample holder and a needle tip holder, the transfer position is used for the sample transmission assembly to take and place the sample holder and the needle tip holder on the sample feeding assembly and the sample storage assembly, and the temporary storage position is used for temporarily storing the sample holder and the needle tip holder. Compared with the operation of frequently opening the working box in the prior art, the vacuum degree of the working box is not affected during the whole working process, the established ultrahigh vacuum environment is not damaged, the whole operation process is simple and fast, and the sample transmission is facilitated. The replacement of different sample holders or needle tip holders at the test position can be completed in the working box, the working box does not need to be opened, and the stability of the vacuum degree of the working box during the sample transmission process is ensured.

Description

Technical Field

[0001] This invention relates to the field of scanning probe microscopy, and more particularly to a sample transfer device and method for ultra-high vacuum magnetic microscopes. Background Technology

[0002] With the rapid development of nanotechnology and materials science, scanning probe microscopy has become an indispensable tool for exploring surface science. However, when conducting magnetic force microscopy experiments under ultra-high vacuum conditions, the sample transfer and mounting process has become a key technical bottleneck restricting experimental efficiency and accuracy.

[0003] Traditional sample transport methods are often inefficient, primarily due to the frequent opening and closing of the vacuum chamber during transport. This is not only time-consuming but also highly susceptible to disrupting the established ultra-high vacuum environment. Furthermore, traditional methods suffer from significant accuracy limitations. The lack of a precise positioning mechanism often makes accurate alignment of the sample and probe tip during transport difficult, affecting the reliability of experimental results and restricting the application of magnetic force microscopy to higher precision requirements. Summary of the Invention

[0004] In view of this, embodiments of the present invention provide a sample transfer device and method for an ultra-high vacuum magnetic microscope, so as to eliminate or improve one or more defects existing in the prior art.

[0005] The first aspect of the present invention provides a sample transfer device for an ultra-high vacuum magnetic microscope, comprising: a working chamber, a transition chamber, a sample delivery assembly, a sample transfer assembly, a sample storage assembly, and a switching structure;

[0006] The working chamber can be evacuated to a set vacuum level. The working chamber has a testing position, a transfer position and a temporary storage position. The testing position is used to place the sample holder and the needle tip holder. The transfer position is used by the sample transfer component to pick up and put the sample holder and the needle tip holder on the sample delivery component and the sample storage component. The temporary storage position is used to temporarily store the sample holder and the needle tip holder.

[0007] The transition chamber is located on one side of the working chamber and can be evacuated to a set vacuum level. The transition chamber is used to install the sample holder and the needle tip holder on the sample delivery assembly in the external environment.

[0008] The switch structure is disposed at the connection between the transition box and the working box, and is used to control the opening and closing of the connection when the transition box is evacuated to the same set vacuum level as the working box.

[0009] The sample delivery assembly includes a first storage component disposed inside the transition box. The first storage component is capable of reciprocating between the transition box and the test position. The first storage component is used to install a sample holder and a needle tip holder.

[0010] The sample transfer assembly includes a gripper disposed inside the working chamber. The gripper is movable between the test position and the transfer position and is used to remove the sample holder or needle tip holder stored on the first storage device and install it at the test position of the working chamber in a vacuum environment, or to remove the sample holder or needle tip holder at the test position and install it on the first storage device in a vacuum environment. The gripper is used to pick up and put down the sample holder and needle tip holder and to assemble and disassemble the sample holder and needle tip holder at the test position.

[0011] The sample storage component includes a second storage unit disposed inside the working chamber. The second storage unit can reciprocate between the transfer position and the temporary storage position. The second storage unit is used to temporarily store the sample holder and the needle tip holder. The sample transfer component is also used to remove the sample holder or needle tip holder stored on the second storage unit and install it on the test position of the working chamber in a vacuum environment, or to remove the sample holder or needle tip holder at the test position and install it on the second storage unit in a vacuum environment.

[0012] In some embodiments of the present invention, the sample delivery assembly further includes a sample delivery rod, the first storage member is disposed at one end of the sample delivery rod, and the end of the sample delivery rod near the first storage member is disposed inside the transition box. The sample delivery rod is capable of translating along its axis and rotating about its axis.

[0013] The sample transfer assembly also includes a sample transfer rod, the gripper is disposed at one end of the sample transfer rod, and the end of the sample transfer rod near the gripper is disposed inside the working box. The sample transfer rod can translate along its axis and rotate about its axis, and the gripper can grasp and release the sample holder and the needle tip holder.

[0014] The sample storage assembly also includes a sample storage rod, with the second storage component disposed at one end of the sample storage rod, and the end of the sample storage rod near the second storage component disposed inside the working chamber.

[0015] In some embodiments of the present invention, the transition chamber has a door and a vacuum pump connection connector, the door is used for placing and removing sample holders and needle tip holders, and a first observation window is provided on the door.

[0016] In some embodiments of the present invention, a scanning head is provided inside the working housing, and the scanning head has the test position; a second observation window is provided on the working housing, and the second observation window corresponds to the position of the gripper's movement path.

[0017] In some embodiments of the present invention, the first storage component and the second storage component are both flower rack structures, and the flower rack structure includes a support plate, a first mounting part and a second mounting part;

[0018] Wherein, one end of the support plate is fixedly connected to the end of the sample delivery rod or the sample storage rod, and both the first mounting part and the second mounting part are disposed on the support plate;

[0019] The first mounting part includes an internally threaded sleeve, which is fixedly mounted on the support plate for mounting the needle tip support;

[0020] The second mounting part includes a mounting hole, a circumferential groove, and a spring piece disposed on the support plate. The circumferential groove is coaxial with the mounting hole and disposed on the side of the mounting hole. The spring piece is fixedly mounted on the support plate, and the elastic part of the spring piece corresponds to the position of the circumferential groove for mounting the sample holder.

[0021] In some embodiments of the present invention, the sample delivery rod, the sample transfer rod, and the sample storage rod are all magnetic rods. The magnetic rod includes an operating part and a working part. The operating part is disposed outside the working box or the transition box, and the working part is disposed inside the working box or the transition box.

[0022] The switch structure is a slide gate valve;

[0023] The working chamber is part of the structure of an ultra-high vacuum magnetic force microscope. The working chamber is detachably connected to the transition chamber. The working chamber has a test chamber, a transfer chamber, a transition chamber connecting chamber, a sample delivery component mounting chamber, and a sample transfer component mounting chamber. The test chamber and the transfer chamber are interconnected, as are the transfer chamber, the transition chamber connecting chamber, the sample delivery component mounting chamber, and the sample transfer component mounting chamber.

[0024] A second aspect of the present invention provides a sample transfer method for an ultra-high vacuum magnetic microscope, based on the above-described sample transfer device for an ultra-high vacuum magnetic microscope, the sample transfer method comprising the following steps:

[0025] Vacuuming procedure: After installing the sample holder and needle tip holder on the first storage component of the sample delivery assembly inside the transition chamber, while keeping the transition chamber sealed, control the first vacuum device to evacuate the transition chamber so that it maintains the same set vacuum level as the working chamber.

[0026] Connection step: The control switch structure is opened, so that the internal cavities of the working box and the transition box are connected;

[0027] Sample delivery steps: Control the sample delivery component to move its first storage unit to the transfer position in the working box;

[0028] Needle tip holder transfer procedure: Control the gripper of the transfer component to remove the needle tip holder from the first storage unit of the sample delivery component and install it on the scanning head of the microscope located at the test position.

[0029] Sample tray transfer procedure: Control the gripper of the transfer component to remove the sample tray from the first storage unit of the sample delivery component and install it on the scanning head of the microscope located at the test position.

[0030] In some embodiments of the present invention, the step of the gripper of the control sample transfer assembly removing the needle tip holder from the first storage unit of the sample delivery assembly and mounting it on the scanning head of the microscope located at the test position includes:

[0031] Control the sample transfer component to move its gripper from the first initial position to the transfer position of the working box and acquire the needle tip holder;

[0032] After acquiring the needle tip holder, control the first storage component of the sample delivery assembly to exit the transfer position;

[0033] Control the sample transfer component to move the gripper of the needle tip holder to the test position;

[0034] Control the sample transfer assembly so that its gripper mounts the tip holder onto the scanning head of the microscope located at the test position;

[0035] The control sample transfer component returns to its first initial position.

[0036] In some embodiments of the present invention, the step of the gripper of the control sample transfer assembly removing the sample holder from the first storage unit of the sample delivery assembly and mounting it on the scanning head of the microscope located at the test position includes:

[0037] Control the sample transfer component so that its gripper moves from the first initial position to the transfer position of the working box and obtains the sample tray;

[0038] After acquiring the sample tray, control the first storage component of the sample delivery assembly to exit the transfer position;

[0039] Control the sample transfer component to move the gripper of the sample holder to the test position;

[0040] Control the sample transfer assembly so that its gripper mounts the sample holder onto the scanning head of the microscope located at the test position;

[0041] The control sample transfer component returns to its first initial position.

[0042] In some embodiments of the present invention, the sampling method further includes:

[0043] Sample tray temporary storage steps:

[0044] Control the sample transfer component to move its gripper from the first initial position to the test position;

[0045] Control the sample transfer assembly so that its gripper picks up the sample mounted on the scanning head;

[0046] Control the sample transfer assembly to move its gripper and sample holder from the test position to the transfer position;

[0047] Control the sample storage component to move its second storage unit from the temporary storage position to the transfer position;

[0048] Control the sample transfer assembly so that its gripper mounts the sample holder onto the second storage unit;

[0049] Control the sample transfer component to move its gripper from the intermediate position to the first initial position;

[0050] Control the sample storage component so that its second storage unit and sample holder move from the transfer position to the temporary storage position;

[0051] Needle tip holder temporary storage steps:

[0052] Control the sample transfer component to move its gripper from the first initial position to the test position;

[0053] Control the sample transfer assembly so that its gripper removes the needle tip mounted on the scanning head;

[0054] Control the sample transfer assembly to move its gripper and needle tip holder from the test position to the transfer position;

[0055] Control the sample storage component to move its second storage unit from the temporary storage position to the transfer position;

[0056] Control the sample transfer assembly so that its gripper mounts the needle tip holder onto the second storage component;

[0057] Control the sample transfer component to move its gripper from the intermediate position to the first initial position;

[0058] Control the sample storage component so that its second storage unit and needle tip holder move from the transfer position to the temporary storage position.

[0059] The sample transfer device and method for ultra-high vacuum magnetic force microscopes of the present invention, compared with the frequent opening and closing of the working chamber in the prior art, does not affect the vacuum level of the working chamber during the entire working process and does not disrupt the established ultra-high vacuum environment. The entire operation is simple and quick, facilitating sample transfer. Different sample holders or needle tip holders can be replaced at the test position inside the working chamber without opening it, ensuring the stability of the working chamber's vacuum level during sample transfer.

[0060] Additional advantages, objects, and features of the invention will be set forth in part in the description which follows, and will also become apparent in part to those skilled in the art upon studying the description, or may be learned by practice of the invention. The objects and other advantages of the invention can be realized and obtained by means of the structures specifically pointed out in the description and drawings.

[0061] Those skilled in the art will understand that the objectives and advantages achievable with the present invention are not limited to those specifically described above, and that the above and other objectives achievable with the present invention will become clearer from the following detailed description. Attached Figure Description

[0062] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this application, are not intended to limit the scope of the invention. The components in the drawings are not drawn to scale but are merely illustrative of the principles of the invention. For ease of illustration and description of certain parts of the invention, corresponding portions in the drawings may be enlarged, i.e., may appear larger relative to other components in an exemplary device actually manufactured according to the invention. In the drawings:

[0063] Figure 1 This is a front view of a sample transfer device for an ultra-high vacuum magnetic microscope according to an embodiment of the present invention.

[0064] Figure 2 This is a left view of a sample transfer device for an ultra-high vacuum magnetic microscope according to an embodiment of the present invention.

[0065] Figure 3 This is a top view of a sample transfer device for an ultra-high vacuum magnetic microscope according to an embodiment of the present invention.

[0066] Figure 4 This is a three-dimensional structural diagram of a sample transfer device for an ultra-high vacuum magnetic microscope according to an embodiment of the present invention.

[0067] Figure 5 This is a schematic diagram of the flower railing structure in one embodiment of the present invention.

[0068] Figure 6 This is a schematic diagram of the gripper structure in one embodiment of the present invention.

[0069] Figure 7 This is a flowchart of a sample transfer method for an ultra-high vacuum magnetic microscope according to an embodiment of the present invention.

[0070] Reference numerals: 1. Working box; 11. Scanning head; 111. Position 1; 112. Position 2; 2. Transition box; 21. Box door; 31. Sample delivery rod; 32. First storage component; 321. Support plate; 322. Internal threaded sleeve; 323. Mounting hole; 324. Circumferential groove; 325. Spring; 41. Sample transfer rod; 42. Handle; 51. Sample storage rod; 52. Second storage component. Detailed Implementation

[0071] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the embodiments and accompanying drawings. Here, the illustrative embodiments and descriptions of this invention are used to explain the invention, but are not intended to limit the invention.

[0072] It should also be noted that, in order to avoid obscuring the invention with unnecessary details, only the structures and / or processing steps closely related to the solution according to the invention are shown in the accompanying drawings, while other details that are not closely related to the invention are omitted.

[0073] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, element, step, or component, but does not exclude the presence or addition of one or more other features, elements, steps, or components.

[0074] It should also be noted that, unless otherwise specified, the term "connection" in this article can refer not only to a direct connection, but also to an indirect connection involving an intermediary.

[0075] In the following description, embodiments of the invention will be illustrated with reference to the accompanying drawings. In the drawings, the same reference numerals represent the same or similar parts, or the same or similar steps.

[0076] To address the technical problem in existing technologies where the process of placing samples into a scanning probe microscope requires frequent opening and closing of the vacuum chamber, which is time-consuming and easily disrupts the vacuum environment, this invention provides a sample transfer device for an ultra-high vacuum magnetic microscope. This device allows for sample transfer operations without damaging the vacuum chamber, making it simple and quick.

[0077] Reference Figures 1 to 3 The first aspect of the present invention provides a sample transfer device for an ultra-high vacuum magnetic microscope, comprising: a working chamber 1, a transition chamber 2, a sample delivery component, a sample transfer component, a sample storage component, and a switch structure.

[0078] Scanning probe microscopy (SPM) is a general term for scanning tunneling microscopy and various novel probe microscopes developed based on it (atomic force microscopy, electrostatic force microscopy, magnetic force microscopy, scanning ion conductivity microscopy, scanning electrochemical microscopy, etc.). It is a surface analysis instrument that has been developed internationally in recent years. It is a high-tech product integrating optoelectronics, laser technology, weak signal detection technology, precision mechanical design and processing, automatic control technology, digital signal processing technology, applied optics technology, high-speed computer acquisition and control, and high-resolution image processing technology. The basic working principle of scanning probe microscopy is to utilize the interaction between the probe and the atoms and molecules on the sample surface—that is, the various physical fields formed when the probe approaches the sample surface at the nanoscale—and obtain the sample surface morphology by detecting the corresponding physical quantities. Scanning probe microscopy mainly consists of five parts: a probe, a scanner, a displacement sensor, a controller, a detection system, and an imaging system. The sample transfer device in this embodiment is related to the working principle and process of the probe and scanner.

[0079] The working chamber 1 can be evacuated to a set vacuum level. Inside the working chamber 1 are a testing position, a transfer position, and a temporary storage position. The testing position is used to place the sample holder and needle tip holder. The transfer position is used by the sample transfer component to pick up and place the sample holder and needle tip holder from the sample delivery and storage components. The temporary storage position is used to temporarily store the sample holder and needle tip holder. The working chamber 1 has a sealing function and can be connected to a vacuum pump via a connector to evacuate its internal cavity to a set vacuum level. Vacuum pumps can be selected from mechanical pumps, oil diffusion pumps, and turbomolecular pumps. Different combinations of vacuum pumps are used for different probes. The vacuum level inside the working chamber 1 is extremely high to prevent dust and other impurities in the air from affecting imaging and experimental results.

[0080] The transition chamber 2 is located on one side of the working chamber 1 and can be evacuated to a set vacuum level. The transition chamber 2 is used to mount the sample holder and needle tip holder onto the sample delivery assembly in an external environment. The transition chamber 2 has a columnar structure and is connected to the working chamber 1 via a flange structure to ensure a sealed connection. Similarly, the transition chamber 2 is connected to a vacuum pumping device via a connector. When the sample holder and needle tip holder are placed inside the transition chamber 2, the transition chamber 2 can be evacuated to the same vacuum level as the working chamber 1.

[0081] A switch structure is installed at the connection point between the transition chamber 2 and the working chamber 1. It controls the opening and closing of the connection point when the transition chamber 2 is evacuated to the same set vacuum level as the working chamber 1. The switch structure can be opened and closed automatically or manually. When the switch structure is open, the first storage unit 32 can pass through the connection point between the transition chamber 2 and the working chamber 1; when the switch structure is closed, the connection point between the transition chamber 2 and the working chamber 1 is sealed, ensuring the airtightness of the working chamber 1.

[0082] The sample delivery assembly includes a first storage unit 32 disposed inside the transition chamber 2. The first storage unit 32 is reciprocating between the transition chamber 2 and the test position. The first storage unit 32 is used to mount a sample holder and a needle tip holder. The first storage unit 32 is driven by a linear drive mechanism and can mount at least one sample holder and one needle tip holder.

[0083] The sample transfer assembly includes a gripper 42 disposed inside the working chamber 1. The gripper 42 can move between a test position and a transfer position. It is used to remove the sample holder or needle tip holder stored on the first storage unit 32 and install it at the test position in the working chamber 1 under vacuum conditions, or to remove the sample holder or needle tip holder from the test position and install it on the first storage unit 32 under vacuum conditions. The gripper 42 is used to pick up and put down the sample holder and needle tip holder, and to assemble and disassemble the sample holder and needle tip holder at the test position. The sample transfer assembly can control the rotation and linear movement of the gripper 42. The rotation of the gripper 42 itself allows it to grasp the sample holder or needle tip holder. (Refer to...) Figure 6 The end of the gripper 42 has two symmetrically arranged L-shaped slots, which can be adapted to the slots on the sample holder or needle tip holder so that the slots can be inserted into the L-shaped slots to grip the sample holder or needle tip holder.

[0084] The sample storage assembly includes a second storage unit 52 disposed inside the working chamber 1. The second storage unit 52 can reciprocate between a transfer position and a temporary storage position. The second storage unit 52 is used to temporarily store sample trays and needle tip trays. Frequently used sample trays and needle tip trays can be temporarily stored on the second storage unit 52 for easy installation on the scanning head, avoiding frequent switching of the switch structure. The sample transfer assembly is also used to remove the sample tray or needle tip tray stored on the second storage unit 52 and install it at the test position in the working chamber 1 under vacuum conditions, or to remove the sample tray or needle tip tray at the test position and install it on the second storage unit 52 under vacuum conditions.

[0085] Specifically, in the above embodiments, a sample holder and a needle tip holder can be installed on the first storage unit 32. The sample holder is used to place samples, and the needle tip holder is used to place probes. The first storage unit 32 can be equipped with a sample holder or a needle tip holder alone, or both simultaneously, or other transport items that need to be transferred to the working chamber 1 can be installed. When it is necessary to transfer the sample holder or needle tip holder to the working chamber 1, the control switch structure is first in the closed state to completely isolate the working chamber 1 and the transition chamber 2, preventing the opening of the transition chamber 2 from affecting the vacuum level of the working chamber 1. Next, the sample holder or needle tip holder is placed on the first storage unit 32, the transition chamber 2 is closed, and the transition chamber 2 is evacuated to make the vacuum level of the transition chamber 2 the same as the vacuum level set in the working chamber 1. Then, the switch structure is turned on to connect the working chamber 1 and the transition chamber 2, causing the sample delivery component to move the first storage unit 32 to the transfer position. Then, the gripper 42 of the sample transfer component moves to the transfer position to grab the sample holder or needle tip holder and installs it at the test position. Finally, the sample delivery component moves the first storage unit 32 away from the transfer position and back into the transition box 2, closing the switch structure and completing the sample transfer. After the test is completed, the sample holder or needle tip holder in the working box 1 can be transferred back to the transition box 2 through the reverse operation, and finally moved out of the system.

[0086] Compared to existing technologies that require frequent opening and closing of the working chamber 1, the entire operation of this embodiment does not affect the vacuum level of the working chamber 1, nor does it disrupt the established ultra-high vacuum environment. The entire operation is simple and quick, facilitating sample transfer. Furthermore, the second storage unit 52 of the sample storage assembly can temporarily store sample holders or needle tip holders within the working chamber 1. For example, the gripper 42 can store sample holders or needle tip holders gripped from the first storage unit 32 on the second storage unit 52. Alternatively, sample holders or needle tip holders removed from the test position can be stored on the second storage unit 52. Different sample holders or needle tip holders can be replaced at the test position within the working chamber 1 without opening it, ensuring the stability of the vacuum level of the working chamber 1 during sample transfer.

[0087] In some embodiments, the sample delivery assembly further includes a sample delivery rod 31, a first storage member 32 disposed at one end of the sample delivery rod 31, and the end of the sample delivery rod 31 near the first storage member 32 disposed inside the transition housing 2. The sample delivery rod 31 is capable of translation along its axis and rotation about its axis. The sample transfer assembly further includes a sample transfer rod 41, a gripper 42 disposed at one end of the sample transfer rod 41, and the end of the sample transfer rod 41 near the gripper 42 disposed inside the working housing 1. The sample transfer rod 41 is capable of translation along its axis and rotation about its axis, and the gripper 42 is capable of gripping and releasing the sample holder and the needle tip holder. The sample storage assembly further includes a sample storage rod 51, a second storage member 52 disposed at one end of the sample storage rod 51, and the end of the sample storage rod 51 near the second storage member 52 disposed inside the working housing 1.

[0088] In the above embodiments, referring to Figure 4 The sample delivery rod 31 and the sample transfer rod 41 can be horizontally arranged, and are perpendicular to each other and located in the same plane. The sample storage rod 51 can be vertically arranged and is perpendicular to both the sample delivery rod 31 and the sample transfer rod 41, and is located in the same plane. With the side furthest from the working chamber 1 as the front end and the side closest to the working chamber 1 as the rear end, the intersection of the extension lines of the sample storage rod 51 and the sample transfer rod 41 is located behind this intersection, and the extension line of the sample transfer rod 41 is directly opposite the position of the scanning head. The sample delivery rod 31 can translate along its axis and rotate around its axis, thereby driving the first storage component 32 to move between the transition chamber 2 and the working chamber 1. Simultaneously, it can drive the first storage component 32 to rotate at different angles, facilitating the placement and gripping of the sample holder and the needle tip holder. The sample transfer rod 41 can translate along its axis and rotate about its axis, thereby enabling the gripper 42 to move between the testing position, the transfer position, and the temporary storage position. Simultaneously, it can also rotate the gripper 42 to complete the installation of the sample holder and the needle tip holder. The sample storage rod 51 can move at least along its axis and can also rotate along its axis, facilitating the movement of the second storage component 52 to the temporary storage position, allowing the gripper 42 to temporarily store the sample holder and the needle tip holder on the second storage component 52.

[0089] It should be noted that the gripper 42 has a slot, and the sample holder and the needle tip holder have a mounting base. The slot and the mounting base are compatible. After the slot and the mounting base are engaged, the gripper can drive the sample holder or the needle tip holder to rotate so that it can be mounted on the scanning head 11.

[0090] In some embodiments, refer to Figure 1 The transition chamber 2 has a door 21 and a vacuum pump connection connector. The door 21 is used for placing and removing the sample holder and needle tip holder, and a first observation window is provided on the door 21. Specifically, the door 21 can be positioned facing upwards on the transition chamber 2. A sealing ring can be provided between the door 21 and the transition chamber 2 to maintain the airtightness between the transition chamber 2 and the door 21. A locking mechanism can be provided between the door 21 and the transition chamber 2 to control the opening and closing of the door 21. The first observation window allows the operator to easily observe the position and status of the sample holder and needle tip holder on the first storage component 32.

[0091] In some embodiments, refer to Figure 2 and Figure 3The working housing 1 houses a scanning head 11 with testing positions. Specifically, position one 111 is used to install the needle tip holder, and position two 112 is used to install the sample holder. The working housing 1 has a second observation window, which corresponds to the position of the gripper 42's movement path. The plane of the second observation window forms an angle with the horizontal plane, facilitating the operator's observation of the intersection of the sample delivery component, sample transfer component, and sample storage component. This helps the operator manually or automatically complete the transfer and installation of the sample holder and needle tip holder.

[0092] In some embodiments, refer to Figure 5 Both the first storage unit 32 and the second storage unit 52 are of a perforated structure, which includes a support plate 321, a first mounting part, and a second mounting part. The second storage unit 52 is always located in a sealed cavity inside the working chamber 1 and is not in contact with the external environment. With the switch structure closed, the sample holder or needle tip holder can be transferred to the scanning head via the gripper 42. During the transfer process, the vacuum level inside the working chamber 1 remains unchanged. The first storage unit 32 is located inside the transition chamber 2. When the door of the transition chamber 2 is opened, the first storage unit 32 is in contact with the external environment. After the sample holder or needle tip holder is installed on the first storage unit 32, the door is closed, and the transition chamber 2 is evacuated to the same vacuum level as the working chamber 1. The switch structure is then turned on, and the sample holder or needle tip holder on the first storage unit 32 can be installed on the scanning head via the gripper 42, ensuring that the vacuum environment inside the working chamber 1 is not affected to the greatest extent.

[0093] One end of the support plate 321 of the flower-shaped structure is fixedly connected to the end of the sample delivery rod 31 or the sample storage rod 51. Both the first mounting part and the second mounting part are disposed on the support plate 321. The first mounting part includes an internally threaded sleeve 322, which is fixedly disposed on the support plate 321 and used to install the needle tip holder. The second mounting part includes a mounting hole 323, an circumferential groove 324, and a spring piece 325 disposed on the support plate 321. The circumferential groove 324 is coaxial with the mounting hole 323 and is disposed at the edge of the mounting hole 323. The spring piece 325 is fixedly mounted on the support plate 321, and the elastic portion of the spring piece 325 corresponds to the position of the circumferential groove 324, used to install the sample holder.

[0094] In the above embodiment, the first mounting part is used to install the needle tip holder, and the second mounting part is used to install the sample holder. The needle tip holder has external threads and can be screwed into the internally threaded sleeve 322 to achieve the installation of the needle tip holder. The sample holder has a retainer that can be engaged into the circumferential groove 324, and the spring piece 325 can press the retainer in the circumferential groove 324 to achieve the installation and fixation of the sample holder. The spring piece 325 can be made of copper sheet, and the spring piece 325 can be fixed to the support plate 321 by screws.

[0095] In some embodiments, the sample delivery rod 31, sample transfer rod 41, and sample storage rod 51 are all magnetic rods. Each magnetic rod includes an operating part and a working part. The operating part is located outside the working chamber 1 or the transition chamber 2, and the working part is located inside the working chamber 1 or the transition chamber 2. The operating part and the working part of the magnetic rod are connected by magnetic transmission. The operation of the operating part controls the corresponding action of the working part. Using a magnetic rod facilitates manual operation and maintains a vacuum environment inside the chamber. The switch structure is a slide gate valve, which can be opened and closed manually or automatically. Alternatively, a motor can be used to move the magnetic rod, improving the automation of the experimental process, saving manpower, and increasing accuracy.

[0096] It should be noted that the working chamber 1 is part of the structure of the ultra-high vacuum magnetic force microscope. The working chamber 1 and the transition chamber 2 are detachably connected. The working chamber 1 has a test chamber, a transfer chamber, a transition chamber connecting chamber, a sample storage component mounting chamber, and a sample transfer component mounting chamber. The test chamber and the transfer chamber are interconnected, as are the transfer chamber, the transition chamber connecting chamber, the sample storage component mounting chamber, and the sample transfer component mounting chamber. (Refer to...) Figure 4 The transfer chamber is located at the front end of the test chamber, the transition chamber connecting chamber is located on the right side of the transfer chamber, the sample delivery component mounting chamber is located at the front end of the transfer chamber, and the sample storage component mounting chamber is located at the top of the transfer chamber. The transition chamber 2 has a connecting structure on the side closest to the working chamber 1 for connecting to the transition chamber connecting chamber, and a sample delivery component mounting chamber on the side of the transition chamber 2 away from the working chamber 1 for mounting the sample delivery component. When conducting tests requiring ultra-high vacuum, the working chamber 1 and the transition chamber 2 are connected together; when conducting tests not requiring ultra-high vacuum, the working chamber 1 and the transition chamber 2 can be separated. The transfer chamber, transition chamber connecting chamber, sample storage component mounting chamber, and sample delivery component mounting chamber of the working chamber 1 are all isolated from the external environment, ensuring the sealing of the working chamber 1.

[0097] The sample transfer device for ultra-high vacuum magnetic microscope according to embodiments of the present invention has the following advantages and technical effects:

[0098] 1. High efficiency: Reduces vacuum loss during transmission and improves experimental efficiency.

[0099] 2. Easy to operate: The manual control method is simple and intuitive, and easy for operators to master.

[0100] 3. High precision: The design of the magnetic rod and the slot seat improves the precision of sample and needle tip transfer.

[0101] 4. Multifunctionality: The device supports the transfer of various tip holders and sample holders, and is suitable for various scanning probe microscope (SPM) experimental needs.

[0102] Reference Figure 7A second aspect of the present invention provides a sample transfer method for an ultra-high vacuum magnetic microscope, based on a sample transfer device for an ultra-high vacuum magnetic microscope, the sample transfer method comprising the following steps:

[0103] S1. Vacuuming step: After installing the sample holder and needle tip holder on the first storage component of the sample delivery assembly in the transition chamber, while keeping the transition chamber sealed, control the first vacuum device to evacuate the transition chamber so that it maintains the same set vacuum level as the working chamber.

[0104] S2, Connection Step: The control switch structure is opened, so that the internal cavities of the working box and the transition box are connected;

[0105] S3. Sample delivery step: Control the sample delivery component to move its first storage unit to the transfer position of the working box;

[0106] S4, Tip holder transfer procedure: Control the gripper of the transfer component to remove the tip holder from the first storage unit of the sample delivery component and install it on the scanning head of the microscope located at the test position.

[0107] S5. Sample tray transfer procedure: Control the gripper of the transfer component to remove the sample tray from the first storage unit of the sample delivery component and install it on the scanning head of the microscope located at the test position.

[0108] The sample transfer method in the above embodiments can transfer the sample holder and needle tip holder into the working chamber 1 without disrupting the original vacuum environment of the working chamber 1, and the sample delivery component can transfer the sample holder and needle tip holder from the external environment to the test position, thus realizing the transfer and installation of the sample holder and needle tip holder. The entire process maintains the vacuum level of the working chamber 1, and the operation is simple and quick.

[0109] In some embodiments, the step of controlling the gripper of the sample transfer assembly to remove the tip holder from the first storage unit of the sample delivery assembly and install it on the scanning head of the microscope located at the test position includes: controlling the sample transfer assembly to move its gripper from a first initial position (located within the sample transfer assembly mounting cavity) to a transfer position in the working housing and to acquire the tip holder; after acquiring the tip holder, controlling the first storage unit of the sample delivery assembly to exit the transfer position; controlling the sample transfer assembly to move its gripper that acquired the tip holder to the test position; controlling the sample transfer assembly to install the tip holder on the scanning head of the microscope located at the test position; and controlling the sample transfer assembly to return to the first initial position. In the above embodiments, the tip holder has a threaded section and a retainer section. The L-shaped retainer on the gripper is first aligned with the retainer section, the gripper is moved towards the tip holder, and then the gripper is rotated to engage the L-shaped retainer section. Continuing to rotate the gripper removes the tip holder from the first storage unit. The step of installing the tip holder on the scanning head is the reverse of the above steps.

[0110] In some embodiments, the step of controlling the gripper of the sample transfer assembly to remove the sample holder from the first storage unit of the sample delivery assembly and install it on the scanning head of the microscope located at the test position includes: controlling the sample transfer assembly to move its gripper from a first initial position to a transfer position in the working chamber and to acquire the sample holder; after acquiring the sample holder, controlling the first storage unit of the sample delivery assembly to exit the transfer position; controlling the sample transfer assembly to move its gripper that acquires the sample holder to the test position; controlling the sample transfer assembly to install the sample holder on the scanning head of the microscope located at the test position; and controlling the sample transfer assembly to return to the first initial position.

[0111] In the above embodiment, the sample holder has a first retaining segment and a second retaining segment. The L-shaped slot on the control gripper is first aligned with the first retaining segment. The control gripper moves towards the sample holder, and then the control gripper rotates to engage the L-shaped slot with the first retaining segment. Continuing to rotate the control gripper removes the sample holder from the first storage unit. The steps for installing the needle tip holder on the scanning head are the reverse of the above steps. Specifically, the operator can manually or via a motor push the sample delivery rod 31 to bring the first storage unit 32 to the transfer position. The entire operation process does not disrupt the vacuum environment inside the working chamber 1.

[0112] In some embodiments, the sample transfer method further includes a sample holder temporary storage step and a needle tip holder temporary storage step.

[0113] The sample holder temporary storage step includes: controlling the sample transfer component to move its gripper from the first initial position to the test position; controlling the sample transfer component to remove the sample holder mounted on the scanning head; controlling the sample transfer component to move its gripper and sample holder from the test position to the transfer position; controlling the sample storage component to move its second storage component from the temporary storage position (located in the sample storage component mounting cavity) to the transfer position; controlling the sample transfer component to mount the sample holder on the second storage component; controlling the sample transfer component to move its gripper from the transfer position to the first initial position; and controlling the sample storage component to move its second storage component and sample holder from the transfer position to the temporary storage position.

[0114] The tip holder temporary storage step includes: controlling the sample transfer component to move its gripper from a first initial position to a test position; controlling the sample transfer component to remove the tip holder mounted on the scanning head; controlling the sample transfer component to move its gripper and tip holder from the test position to a transfer position; controlling the sample storage component to move its second storage unit from a temporary storage position to a transfer position; controlling the sample transfer component to mount the tip holder onto the second storage unit; controlling the sample transfer component to move its gripper from the transfer position to the first initial position; and controlling the sample storage component to move its second storage unit and tip holder from the transfer position to a temporary storage position.

[0115] Specifically, the operator can manually or via a motor drive the sample storage rod 51 to move the second storage unit 52 to the transfer position, and then control the transfer rod 41 to move the gripper 42 to the transfer position; rotate the transfer rod 41 to rotate the gripper 42 and install the sample holder and needle tip holder on the second storage unit 52; finally, move the sample storage rod 51 to move the second storage unit 52 out of the temporary storage position to prevent interference with the movement path of the gripper 42. The sample transfer method of the above embodiment does not damage the original vacuum environment of the working chamber 1. The sample storage component can temporarily store frequently used sample holders and needle tip holders, and different sample holders and needle tip holders can be installed at the test position. Multiple sample experiments or various types of scanning probe microscopy (SPM) experiments can be completed without frequently turning on and off the switch structure on the working chamber 1.

[0116] It should be clarified that the present invention is not limited to the specific configurations and processes described above and shown in the figures. For the sake of brevity, detailed descriptions of known methods are omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present invention is not limited to the specific steps described and shown. Those skilled in the art can make various changes, modifications, and additions, or change the order of steps, after understanding the spirit of the present invention.

[0117] In this invention, features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, and / or combined with or in place of features of other embodiments.

[0118] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, various modifications and variations of the embodiments of the present invention are possible. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A sample transfer device for an ultrahigh vacuum magnetic force microscope, characterized by The application relates to a vacuum sample testing device. The device comprises a working box (1), a transition box (2), a sample feeding assembly, a sample transferring assembly, a sample storing assembly and a switch structure. The working box (1) can be pumped to a set vacuum degree, and the working box (1) has a testing position, a transfer position and a temporary storage position; the testing position is used for placing sample holders and needle tip holders; the transfer position is used for the sample transferring assembly to take and place the sample holders and the needle tip holders on the sample feeding assembly and the sample storing assembly; and the temporary storage position is used for temporarily storing the sample holders and the needle tip holders. The transition box (2) is arranged on one side of the working box (1) and can be pumped to a set vacuum degree; and the transition box (2) is used for installing the sample holders and the needle tip holders on the sample feeding assembly under an external environment. The switch structure is arranged at a communication position between the transition box (2) and the working box (1) and is used for controlling the opening and closing of the communication position when the transition box (2) is pumped to the same set vacuum degree as the working box (1). The sample feeding assembly comprises a first storage member (32) arranged in the transition box (2); the first storage member (32) can reciprocate between the transition box (2) and the testing position; and the first storage member (32) is used for installing the sample holders and the needle tip holders. The sample transferring assembly comprises a gripper (42) arranged in the working box (1); the gripper (42) can move between the testing position and the transfer position; and the gripper (42) is used for installing the sample holders or the needle tip holders stored on the first storage member (32) in a vacuum environment or installing the sample holders or the needle tip holders in the testing position on the first storage member (32) in a vacuum environment. The sample storing assembly comprises a second storage member (52) arranged in the working box (1); the second storage member (52) can reciprocate between the transfer position and the temporary storage position; and the second storage member (52) is used for temporarily storing the sample holders and the needle tip holders; and the sample transferring assembly is also used for installing the sample holders or the needle tip holders stored on the second storage member (52) in a vacuum environment or installing the sample holders or the needle tip holders in the testing position on the second storage member (52) in a vacuum environment. The first storage member (32) and the second storage member (52) are both flower fence structures; the flower fence structure comprises a supporting plate (321), a first mounting part and a second mounting part; and the first mounting part and the second mounting part are both arranged on the supporting plate (321). The first mounting part comprises an internally-threaded sleeve (322) fixedly arranged on the supporting plate (321) and used for installing the needle tip holders. The second mounting part comprises a mounting hole (323), a ring groove (324) and a spring (325) arranged on the supporting plate (321), the ring groove (324) is coaxial with the mounting hole (323) and arranged at the edge of the mounting hole (323), and the spring (325) is fixedly arranged on the supporting plate (321), and the elastic part of the spring (325) corresponds to the position of the ring groove (324) and is used for mounting the sample holder.

2. The sample transfer device for ultrahigh vacuum magnetic force microscope according to claim 1, wherein, The sample feeding assembly further comprises a sample feeding rod (31), and the first storage part (32) is arranged at one end of the sample feeding rod (31); the sample feeding rod (31) is arranged inside the transition box (2) near one end of the first storage part (32); and the sample feeding rod (31) can move along its axis and rotate around its axis. The sample transferring assembly further comprises a sample transferring rod (41), and the gripper (42) is arranged at one end of the sample transferring rod (41); the sample transferring rod (41) is arranged inside the working box (1) near one end of the gripper (42); the sample transferring rod (41) can move along its axis and rotate around its axis; and the gripper (42) can grip and release the sample holder and the needle tip holder. The sample storing assembly further comprises a sample storing rod (51), and the second storage part (52) is arranged at one end of the sample storing rod (51); the sample storing rod (51) is arranged inside the working box (1) near one end of the second storage part (52).

3. The sample transfer device for ultrahigh vacuum magnetic force microscope according to claim 1, wherein The transition box (2) is provided with a box door (21) and a vacuum pump connecting joint; the box door (21) is used for taking and placing the sample holder and the needle tip holder; and a first observation window is arranged on the box door (21).

4. The sample transfer device for ultrahigh vacuum magnetic force microscope according to claim 1, wherein The working box (1) is provided with a scanning head (11) inside; the scanning head (11) is provided with the test position; and a second observation window is arranged on the working box (1) and corresponds to the position of the moving path of the gripper (42).

5. The sample transfer device for ultrahigh vacuum magnetic force microscope according to claim 2, wherein One end of the supporting plate (321) is fixedly connected with the end of the sample feeding rod (31) or the sample storing rod (51).

6. The sample transfer device for ultrahigh vacuum magnetic force microscope according to claim 2, wherein The sample feeding rod (31), the sample transferring rod (41) and the sample storing rod (51) are all magnetic force rods; the magnetic force rod comprises an operation part and a working part; the operation part is arranged outside the working box (1) or the transition box (2); and the working part is arranged inside the working box (1) or the transition box (2). The switch structure is a plug valve. The working box (1) is part of the structure of an ultrahigh vacuum magnetic force microscope; the working box (1) is detachably connected with the transition box (2); the working box (1) is provided with a test cavity, a transfer cavity, a transition box connecting cavity, a sample feeding assembly mounting cavity and a sample transferring assembly mounting cavity; the test cavity and the transfer cavity are in communication with each other; and the transfer cavity, the transition box connecting cavity, the sample feeding assembly mounting cavity and the sample transferring assembly mounting cavity are in communication with each other.

7. A method for sample transfer for an ultrahigh vacuum magnetic force microscope, based on the sample transfer device for an ultrahigh vacuum magnetic force microscope according to any one of claims 1 to 6, characterized in that The sample transferring method comprises the following steps: The vacuumizing step: after the sample holder and the needle tip holder are installed on the first storage of the sample feeding assembly in the transition box, the first vacuum device is controlled to vacuumize the transition box to keep the same vacuum degree as the working box under the condition that the transition box is kept closed; The connecting step: the switch structure is controlled to open, so that the internal cavities of the working box and the transition box are connected; The sample feeding step: the sample feeding assembly is controlled to move the first storage to the transfer position of the working box; The needle tip holder sample transferring step: the gripper of the sample transferring assembly is controlled to take down the needle tip holder from the first storage of the sample feeding assembly and install it on the scanning head of the microscope at the test position; The sample holder sample transferring step: the gripper of the sample transferring assembly is controlled to take down the sample holder from the first storage of the sample feeding assembly and install it on the scanning head of the microscope at the test position.

8. The sample transfer method for ultrahigh vacuum magnetic force microscope according to claim 7, characterized in that, The step of controlling the gripper of the sample transferring assembly to take down the needle tip holder from the first storage of the sample feeding assembly and install it on the scanning head of the microscope at the test position comprises: The sample transferring assembly is controlled to move the gripper from the first initial position to the transfer position of the working box and obtain the needle tip holder; After obtaining the needle tip holder, the first storage of the sample feeding assembly is controlled to exit the transfer position; The sample transferring assembly is controlled to move the gripper obtaining the needle tip holder to the test position; The sample transferring assembly is controlled to install the needle tip holder on the scanning head of the microscope at the test position by the gripper; The sample transferring assembly is controlled to return to the first initial position.

9. The method for sample transmission for ultra-high vacuum magnetic force microscope according to claim 7, characterized in that, The step of controlling the gripper of the sample transferring assembly to take down the sample holder from the first storage of the sample feeding assembly and install it on the scanning head of the microscope at the test position comprises: The sample transferring assembly is controlled to move the gripper from the first initial position to the transfer position of the working box and obtain the sample holder; After obtaining the sample holder, the first storage of the sample feeding assembly is controlled to exit the transfer position; The sample transferring assembly is controlled to move the gripper obtaining the sample holder to the test position; The sample transferring assembly is controlled to install the sample holder on the scanning head of the microscope at the test position by the gripper; The sample transferring assembly is controlled to return to the first initial position.

10. The sample transfer method for ultrahigh vacuum magnetic force microscope according to claim 7, wherein, The sample transferring method further comprises: The sample holder temporary storage step: The sample transferring assembly is controlled to move the gripper from the first initial position to the test position; The sample transferring assembly is controlled to take down the sample holder installed on the scanning head by the gripper; The sample transferring assembly is controlled to move the gripper and the sample holder from the test position to the transfer position; The sample storing assembly is controlled to move the second storage from the temporary storage position to the transfer position; The sample transferring assembly is controlled to install the sample holder on the second storage by the gripper; The sample transferring assembly is controlled to move the gripper from the transfer position to the first initial position; The sample storing assembly is controlled to move the second storage and the sample holder from the transfer position to the temporary storage position; The needle tip holder temporary storage step: The sample transferring assembly is controlled to move the gripper from the first initial position to the test position; The sample transferring assembly is controlled to take down the needle tip holder installed on the scanning head by the gripper; The sample transferring assembly is controlled to move the gripper and the needle tip holder from the test position to the transfer position; The sample storing assembly is controlled to move the second storage from the temporary storage position to the transfer position; The sample transferring assembly is controlled to install the needle tip holder on the second storage by the gripper; controlling the sample delivery assembly to move the gripper from the intermediate position to the first initial position; controlling the sample storage assembly to move the second storage member and the needle tip holder from the intermediate position to the temporary storage position.

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