Evaporation source cooling device for loadlock type ultra-high vacuum evaporation machine

Abstract

The utility model provides a kind of evaporating source cooling device of Loadlock type ultrahigh vacuum evaporation machine, including the thermal resistance electrode column body being symmetrically arranged in working chamber, tungsten boat fixing block is connected to its upper portion, axial cooling water flow channel is equipped in thermal resistance electrode column body, extends to near tungsten boat fixing block place;Water inlet pipe is inserted into cooling water flow channel to form annular interlayer, the top of water inlet pipe is inclined to constitute accommodating chamber;After cooling water enters accommodating chamber and is temporarily stored by water inlet adapter, rely on gravity and flow down along annular interlayer, realize the high-efficiency cooling of electrode column body;Cooling water enters equal-diameter tee joint valve by reducing joint, is discharged by water outlet adapter, tee joint valve integrates waterway and simplifies interface layout, gravity drives cooling water to cover electrode column high temperature area (near tungsten boat), cooling path is long, and uniformity is high;Accommodating chamber buffers water flow, improves heat exchange stability;Tee joint valve compact connection reduces the risk of leakage, and it is convenient to maintain;Overall structure significantly improves evaporating source heat dissipation efficiency, guarantees evaporation process stability.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum evaporation deposition technology, and more specifically, relates to an evaporation source cooling device for a Loadlock type ultra-high vacuum evaporation deposition machine. Background Technology

[0002] In ultra-high vacuum evaporation processes, the evaporation source (usually a tungsten boat carrying the film material) requires a large current to generate high temperatures to achieve material evaporation. Since the tungsten boat can operate at temperatures exceeding 1500℃, its connecting component—the thermal resistance electrode post—conducts a significant amount of heat. If the electrode post temperature becomes uncontrolled, it will lead to: seal failure: high temperatures cause the insulating ceramic between the electrode post and the chamber to expand and crack, compromising the vacuum level; arc discharge: increased electrode surface temperature induces gas ionization, triggering arc breakdown; film contamination: overheating causes the film material to melt and drip prematurely in non-evaporation areas, contaminating the chamber.

[0003] Traditional cooling solutions have significant drawbacks: forced circulating water cooling (such as external coils) results in a cooling path far from the high-temperature zone at the top of the electrode column (near the tungsten boat), leading to low heat dissipation efficiency; mechanical pump-driven internal circulation results in complex piping interfaces, pump vibration that can easily cause vacuum leaks, and high maintenance costs; and insufficient temperature uniformity leads to unstable cooling water flow rates, an axial temperature difference of >100℃ in the electrode column, and unavoidable local overheating. Especially in loadlock-type devices, frequent chamber switching exacerbates electrode thermal fatigue, and existing cooling structures are insufficient to meet the high stability requirements.

[0004] The existing patent, publication number CN213388865U, describes a cooling water flow within the electrode column at a right-angle turn, creating a cooling water circulation system. This more efficiently removes heat from the copper electrode, achieving thorough cooling and extending its lifespan. It also effectively evaporates high-melting-point metals, ensuring the performance of subsequent thin-film devices.

[0005] However, the cooling water flow rate is relatively small when it reaches the top of the structure, which can easily affect the cooling effect.

[0006] Therefore, there is an urgent need to develop a high-efficiency, zero-vibration, pump-free cooling solution for the near-heat source area of ​​the electrode post. Utility Model Content

[0007] Therefore, in order to solve the above-mentioned technical problems, this utility model proposes an evaporation source cooling device for a Loadlock type ultra-high vacuum evaporation deposition machine, including a thermal resistance electrode column body 2 symmetrically arranged in the working chamber 1, with a tungsten boat fixing block 4 connected to its upper part. An axial cooling water channel 5 is provided inside the thermal resistance electrode column body 2, extending to near the tungsten boat fixing block 4. A water inlet pipe 6 is inserted into the cooling water channel 5 to form an annular interlayer 7, and the top of the water inlet pipe 6 is inclined to form a receiving chamber 8. Cooling water enters the receiving chamber 8 through the water inlet adapter 10 and is temporarily stored. Then, it flows naturally down the annular interlayer 7 by gravity to achieve efficient cooling of the electrode column body. The cooling water enters the equal diameter three-way valve 9 through the reducing connector and is discharged through the water outlet adapter 12. The three-way valve integrates the water circuit to simplify the interface layout. Gravity drives the cooling water to cover the high temperature area of ​​the electrode column (near the tungsten boat), resulting in a long and highly uniform cooling path. The receiving chamber 8 buffers the water flow and improves the stability of heat exchange. The three-way valve 9 has a compact connection to reduce the risk of leakage and facilitate maintenance. The overall structure significantly improves the heat dissipation efficiency of the evaporation source and ensures the stability of the evaporation deposition process.

[0008] A cooling device for the evaporation source of a Loadlock type ultra-high vacuum evaporation machine includes a working chamber and thermal resistance electrode pillars symmetrically arranged within the working chamber. The upper part of each thermal resistance electrode pillar is located within the working chamber and connected to a tungsten boat fixing block for fixing a tungsten boat. The device is characterized in that: a cooling water channel is arranged axially within each thermal resistance electrode pillar, extending close to the tungsten boat fixing block; an inlet pipe is inserted into the cooling water channel, forming an annular sandwich between the outer wall of the inlet pipe and the inner wall of the cooling water channel; the top of the inlet pipe is an inclined end face, and the inclined end face is perpendicular to the... The top of the annular interlayer together forms a receiving chamber; the lower end of the water inlet pipe passes through the lower valve port of the equal-diameter three-way valve and is connected to the cooling water inlet adapter; the water outlet of the annular interlayer is connected to the upper valve port of the equal-diameter three-way valve through a reducing connector; the side valve port of the equal-diameter three-way valve is connected to a cooling water outlet adapter; external cooling water enters the receiving chamber through the cooling water inlet adapter and the water inlet pipe for temporary storage, and flows downward along the annular interlayer under the action of gravity to cool the thermal resistance electrode column body, and then the cooling water is discharged sequentially through the reducing connector, the upper valve port and the side valve port of the equal-diameter three-way valve, and the cooling water outlet adapter.

[0009] Furthermore, the lower part of the thermal resistance electrode post body extends through the working chamber, and a high-voltage power supply connection assembly is sleeved outside the working chamber.

[0010] In some embodiments, the high-voltage power supply connection assembly includes a connection plate and a resistive copper strip. One end of the connection plate is detachably sleeved on the outside of the thermal resistance electrode body, and the other end of the connection plate is connected to an external high-voltage power supply through the resistive copper strip.

[0011] Furthermore, the resistive copper strip is a flat-braided copper strip.

[0012] Furthermore, the connection between the thermal resistance electrode post body and the connecting plate is provided with external threads, and the connecting plate is locked and its vertical position is adjusted by screwing a nut on the external threads.

[0013] In some embodiments, the thermal resistance electrode post body is connected to the working chamber via an electrode flange assembly; the electrode flange assembly includes a first flange and a second flange, the upper extension end of the first flange is welded to the working chamber, a ceramic cylinder is sleeved inside the upper extension end of the first flange, the thermal resistance electrode post body is sleeved inside the ceramic cylinder and welded to the thermal resistance electrode post body, the bottom of the ceramic cylinder is welded to the second flange, and the first flange and the second flange are locked together by fasteners to achieve insulation and sealing.

[0014] In some embodiments, a liquid receiving box is provided between the two symmetrically arranged thermal resistance electrode pillars and below the tungsten boat to collect loose film material that falls off the tungsten boat during cooling after high-temperature evaporation, thus preventing contamination of the working chamber.

[0015] In some embodiments, a splash guard is provided at the bottom of the working chamber, the splash guard surrounding the exterior of the two symmetrically arranged thermal resistance electrode pillars, for protecting the thermal resistance electrode pillars from splash contamination.

[0016] Furthermore, the end of the tungsten boat fixing block near the liquid receiving box is tilted upwards.

[0017] The beneficial effects of this utility model are as follows: This utility model proposes an evaporation source cooling device for a Loadlock type ultra-high vacuum evaporation deposition machine, including a thermal resistance electrode column body 2 symmetrically arranged in the working chamber 1, with a tungsten boat fixing block 4 connected to its upper part. An axial cooling water flow channel 5 is provided inside the thermal resistance electrode column body 2, extending to near the tungsten boat fixing block 4. A water inlet pipe 6 is inserted into the cooling water flow channel 5 to form an annular interlayer 7, and the top of the water inlet pipe 6 is inclined to form a receiving chamber 8. Cooling water enters the receiving chamber 8 through the water inlet adapter 10 and is temporarily stored. Then, it flows naturally down the annular interlayer 7 by gravity, achieving efficient cooling of the electrode column body. The cooling water enters the equal diameter three-way valve 9 through the reducing connector and is discharged through the water outlet adapter 12. The three-way valve integrates the water circuit, simplifying the interface layout. Gravity drives the cooling water to cover the high-temperature area of ​​the electrode column (near the tungsten boat), resulting in a long and highly uniform cooling path. The receiving chamber 8 buffers the water flow, improving the stability of heat exchange. The compact connection of the three-way valve 9 reduces the risk of leakage and facilitates maintenance. The overall structure significantly improves the heat dissipation efficiency of the evaporation source and ensures the stability of the evaporation deposition process. Attached Figure Description

[0018] Figure 1This is a schematic diagram of the overall structure of this utility model.

[0019] Figure 2 This is an assembly drawing of the present invention.

[0020] Figure 3 This is a cross-sectional view of the present invention.

[0021] Explanation of key component symbols:

[0022] Working chamber 1, thermal resistance electrode post body 2, tungsten boat 3, tungsten boat fixing block 4, cooling water flow channel 5, water inlet pipe 6, annular jacket 7, accommodating chamber 8, equal diameter three-way valve 9, lower valve port 91, upper valve port 92, side valve port 93, cooling water inlet adapter 10, cooling water outlet adapter 12, high voltage power supply connection assembly 13, connecting plate 131, resistance copper strip 132, nut 133, electrode flange assembly 14, first flange 141, second flange 142, ceramic cylinder 143, liquid receiving box 15, anti-stick plate 16.

[0023] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation

[0024] The following embodiments are described to aid in understanding this application. These embodiments are not, and should not be, construed in any way as limiting the scope of protection of this application.

[0025] In the following description, those skilled in the art will recognize that throughout this discussion, components may be described as individual functional units (which may include subunits), but those skilled in the art will recognize that various components or portions thereof may be divided into individual components or may be integrated together (including integrated within a single system or component).

[0026] Furthermore, the connection between components or systems is not intended to be limited to a direct connection; on the contrary, data between these components may be modified, reformatted, or otherwise altered by intermediate components. Additionally, other or fewer connections may be used. It should also be noted that the terms "connection," "link," or "input" should be understood to include direct connections, indirect connections via one or more intermediate devices, and wireless connections. Example 1:

[0027] like Figure 1-3As shown, an evaporation source cooling device for a Loadlock type ultra-high vacuum evaporation machine includes a working chamber 1 and thermal resistance electrode pillar bodies 2 symmetrically arranged within the working chamber 1. The upper part of each thermal resistance electrode pillar body 2 is located within the working chamber 1 and connected to a tungsten boat fixing block 4 for fixing a tungsten boat 3. A cooling water channel 5 is arranged axially within each thermal resistance electrode pillar body 2, extending close to the tungsten boat fixing block 4. An inlet pipe 6 is inserted into the cooling water channel 5, forming an annular interlayer 7 between the outer wall of the inlet pipe 6 and the inner wall of the cooling water channel 5. The top of the inlet pipe 6 is an inclined end face, which, together with the top of the annular interlayer 7, forms a receiving chamber 8. The lower end of the inlet pipe 6 passes through the lower valve port 91 of an equal-diameter three-way valve 9 and is connected to a cooling water inlet adapter 10. The outlet end of the annular interlayer 7 is connected to the equal-diameter three-way valve 9 via a reducing connector. The upper valve port 92 is connected; the side valve port 93 of the equal-diameter three-way valve 9 is connected to a cooling water outlet adapter 12; external cooling water enters the accommodating chamber 8 through the cooling water inlet adapter 10 and the inlet pipe 6 for temporary storage, and flows downward along the annular interlayer 7 under the action of gravity to cool the thermal resistance electrode post body 2. Subsequently, the cooling water is discharged sequentially through the reducing connector, the upper valve port 92 and the side valve port 93 of the equal-diameter three-way valve 9, and the cooling water outlet adapter 12. This structure utilizes gravity to drive the cooling water to flow naturally downward in the annular interlayer 7. The cooling path is long and covers the core area of ​​the thermal resistance electrode post body 2 (especially near the high-temperature tungsten boat fixing block 4), resulting in high cooling efficiency and good uniformity. The design of the accommodating chamber 8 allows the cooling water to stay briefly, which helps to stabilize the water flow and initially absorb heat. The compact connection of the equal-diameter three-way valve 9 simplifies the water interface, facilitates installation and maintenance, and ensures reliable inflow and outflow of cooling water.

[0028] The lower part of the thermal resistance electrode post body 2 extends through the working chamber 1, and a high-voltage power connection assembly 13 is sleeved outside the working chamber 1. Placing the high-voltage power connection assembly 13 outside the vacuum chamber avoids potential risks (such as discharge) of the high-voltage connection in a vacuum environment, improving the safety and reliability of the equipment. It also facilitates maintenance and replacement of the power connection. The high-voltage power connection assembly 13 includes a connecting plate 131 and a resistance copper strip 132. One end of the connecting plate 131 is detachably sleeved outside the thermal resistance electrode post body 2, and the other end of the connecting plate 131 is connected to an external high-voltage power source through the resistance copper strip 132. The combination of the detachable connecting plate 131 and the flexible resistance copper strip 132 ensures reliable transmission of high-voltage electrical energy and effectively absorbs the effects of thermal expansion or mechanical stress. Displacement stress caused by vibration prevents loosening or breakage of connection points, improving the stability and service life of electrical connections. The resistance copper strip 132 is a flat-braided copper strip, which has excellent conductivity, flexibility and heat dissipation, and can carry large currents. Its flat structure is conducive to heat dissipation and adapting to installation space constraints. At the same time, its braiding characteristics enhance fatigue resistance. The connection between the thermal resistance electrode post body 2 and the connecting plate 131 is provided with external threads. The connecting plate 131 is locked and its vertical position is adjusted by screwing the nut 133 on the external threads. The design of the threads and nut 133 realizes the adjustable locking of the connecting plate 131 on the thermal resistance electrode post body 2, allowing precise adjustment of the height position of the connecting plate 131 to adapt to different installation requirements or compensate for manufacturing tolerances, and ensuring good electrical contact and mechanical stability.

[0029] The thermal resistance electrode post body 2 is connected to the working chamber 1 via an electrode flange assembly 14. The electrode flange assembly 14 includes a first flange 141 and a second flange 142. The upper extension end of the first flange 141 is welded to the working chamber 1. A ceramic cylinder 143 is fitted inside the upper extension end of the first flange 141. The thermal resistance electrode post body 2 is fitted inside the ceramic cylinder 143. The bottom of the ceramic cylinder 143 is welded to the second flange 142. The first flange 141 and the second flange 142 are locked together by fasteners 144 to achieve insulation and sealing. This flange assembly structure achieves reliable high-voltage insulation between the thermal resistance electrode post body 2 and the working chamber 1 through the ceramic cylinder 143. The multi-layer flange and welding structure ensure ultra-high vacuum sealing, prevent gas leakage from affecting the vacuum level, and provide stable support for the electrode post.

[0030] A liquid receiving box 15 is provided between the two symmetrically arranged thermal resistance electrode pillars 2 and below the tungsten boat 3. It is used to collect the loose film material that falls off the tungsten boat 3 during the cooling process after high-temperature evaporation, preventing contamination of the working chamber 1. The liquid receiving box 15 is directly below the high-temperature tungsten boat 3, which can effectively collect the loose particles that fall off due to shrinkage, breakage or sublimation of the film material during the cooling process after evaporation. This significantly reduces the dispersion and deposition of these contaminants in the vacuum chamber, greatly reducing the risk of contamination to the working chamber 1, the substrate and other key components, and extending the cleaning and maintenance cycle of the equipment.

[0031] A splash guard 16 is provided at the bottom of the working chamber 1. The splash guard 16 surrounds the two symmetrically arranged thermal resistance electrode pillar bodies 2 and is used to protect the thermal resistance electrode pillar bodies 2 from splash contamination. The splash guard 16 forms a physical barrier to prevent molten or solid film particles that may splash out during the evaporation process from directly impacting or adhering to the thermal resistance electrode pillar bodies 2 and their insulating components (such as ceramic cylinder 143). This prevents problems such as short circuits between electrodes, decreased insulation performance, or poor cooling effect caused by contamination, thereby improving the reliability and service life of the electrode system.

[0032] The end of the tungsten boat fixing block 4 near the liquid receiving box 15 is tilted upwards, so that the tungsten boat 3 fixed on it also presents a certain tilt angle. This helps to make the molten film material flow more concentratedly to the central heating area of ​​the tungsten boat 3 during the evaporation process, reducing the tendency to overflow to both ends (especially the end near the liquid receiving box 15), thereby reducing the possibility of film material dripping from both ends of the tungsten boat 3 or accumulating on the fixing block 4, further reducing the source of pollution, and improving the utilization rate of film material.

[0033] The beneficial effects of this utility model are as follows: This utility model proposes an evaporation source cooling device for a Loadlock type ultra-high vacuum evaporation deposition machine, including a thermal resistance electrode column body 2 symmetrically arranged in the working chamber 1, with a tungsten boat fixing block 4 connected to its upper part. An axial cooling water flow channel 5 is provided inside the thermal resistance electrode column body 2, extending to near the tungsten boat fixing block 4. A water inlet pipe 6 is inserted into the cooling water flow channel 5 to form an annular interlayer 7, and the top of the water inlet pipe 6 is inclined to form a receiving chamber 8. Cooling water enters the receiving chamber 8 through the water inlet adapter 10 and is temporarily stored. Then, it flows naturally down the annular interlayer 7 by gravity, achieving efficient cooling of the electrode column body. The cooling water enters the equal diameter three-way valve 9 through the reducing connector and is discharged through the water outlet adapter 12. The three-way valve integrates the water circuit, simplifying the interface layout. Gravity drives the cooling water to cover the high-temperature area of ​​the electrode column (near the tungsten boat), resulting in a long and highly uniform cooling path. The receiving chamber 8 buffers the water flow, improving the stability of heat exchange. The compact connection of the three-way valve 9 reduces the risk of leakage and facilitates maintenance. The overall structure significantly improves the heat dissipation efficiency of the evaporation source and ensures the stability of the evaporation deposition process.

[0034] Although this application discloses several aspects and embodiments, other aspects and embodiments will be obvious to those skilled in the art. Various modifications and improvements can be made without departing from the concept of this application, and all such modifications and improvements fall within the scope of protection of this application. The various aspects and embodiments disclosed in this application are for illustrative purposes only and are not intended to limit this application. The actual scope of protection of this application is determined by the claims.

Claims

1. A cooling device for an evaporation source in a Loadlock type ultra-high vacuum evaporation machine, comprising a working chamber (1) and thermal resistance electrode pillar bodies (2) symmetrically arranged within the working chamber (1), wherein the upper part of each thermal resistance electrode pillar body (2) is located within the working chamber (1) and connected to a tungsten boat fixing block (4) for fixing a tungsten boat (3), characterized in that: Each of the thermal resistance electrode pillars (2) has a cooling water channel (5) arranged along its axial direction, the cooling water channel (5) extending to near the tungsten boat fixing block (4); a water inlet pipe (6) is inserted into the cooling water channel (5), an annular sandwich (7) is formed between the outer wall of the water inlet pipe (6) and the inner wall of the cooling water channel (5), the top of the water inlet pipe (6) is an inclined end face, the inclined end face and the top of the annular sandwich (7) together form a receiving chamber (8); the lower end of the water inlet pipe (6) passes through the lower valve port (91) of the equal diameter three-way valve (9) and is connected to the cooling water inlet adapter (10); The outlet of the annular jacket (7) is connected to the upper valve port (92) of the equal-diameter three-way valve (9) through a reducing connector; the side valve port (93) of the equal-diameter three-way valve (9) is connected to a cooling water outlet adapter (12); external cooling water enters the accommodating chamber (8) through the cooling water inlet adapter (10) and the inlet pipe (6) for temporary storage, and flows downward along the annular jacket (7) under the action of gravity to cool the thermal resistance electrode column body (2). Subsequently, the cooling water is discharged sequentially through the reducing connector, the upper valve port (92) and the side valve port (93) of the equal-diameter three-way valve (9), and the cooling water outlet adapter (12).

2. The evaporation source cooling device according to claim 1, characterized in that: The lower part of the thermal resistance electrode post body (2) extends through the working chamber (1), and a high-voltage power supply connection assembly (13) is sleeved outside the working chamber (1).

3. The evaporation source cooling device according to claim 2, characterized in that: The high-voltage power supply connection assembly (13) includes a connection plate (131) and a resistance copper strip (132). One end of the connection plate (131) is detachably sleeved on the outside of the thermal resistance electrode post body (2), and the other end of the connection plate (131) is connected to an external high-voltage power supply through the resistance copper strip (132).

4. The evaporation source cooling device according to claim 3, characterized in that: The resistance copper strip (132) is a flat braided copper strip.

5. The evaporation source cooling device according to claim 3 or 4, characterized in that: The thermal resistance electrode post body (2) is provided with an external thread at the connection between it and the connecting plate (131). The connecting plate (131) is locked and its vertical position is adjusted by screwing a nut (133) on the external thread.

6. The evaporation source cooling device according to claim 1, characterized in that: The thermal resistance electrode post body (2) is connected to the working chamber (1) through an electrode flange assembly (14); the electrode flange assembly (14) includes a first flange (141) and a second flange (142). The upper extension end of the first flange (141) is welded to the working chamber (1). A ceramic cylinder (143) is sleeved inside the upper extension end of the first flange (141). The thermal resistance electrode post body (2) is sleeved and welded inside the ceramic cylinder (143). The bottom of the ceramic cylinder (143) is welded to the second flange (142). The first flange (141) and the second flange (142) are locked together by fasteners (144) to achieve insulation and sealing.

7. The evaporation source cooling device according to claim 1, characterized in that: A liquid receiving box (15) is provided between the two symmetrically arranged thermal resistance electrode pillars (2) and below the tungsten boat (3) to collect the loose film material that falls off when the tungsten boat (3) cools down after high-temperature evaporation, so as to prevent contamination of the working chamber (1).

8. The evaporation source cooling device according to claim 7, characterized in that: A splash guard (16) is provided at the bottom of the working chamber (1). The splash guard (16) surrounds the two symmetrically arranged thermal resistance electrode pillar bodies (2) and is used to protect the thermal resistance electrode pillar bodies (2) from splash contamination.

9. The evaporation source cooling device according to claim 7 or 8, characterized in that: The end of the tungsten boat fixing block (4) near the liquid receiving box (15) is tilted upwards.

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