The invention discloses a
system and a method for lossless dynamic measurement of
microstructure characteristics of a material surface, and relates to the technical field of optical measurement, and the method comprises the following steps: S1, placing an object to be measured on a two-dimensional stepping motor platform, and adjusting the platform to be horizontal; and starting the
solid laser. According to the invention, an optical
system composed of a
solid laser, a
beam expander, an aperture diaphragm and a spectroscope generates an accurate detection
light beam, a
spatial filter designed according to a
confocal diffraction limit is matched to effectively suppress defocus
stray light interference, and a multi-parameter fusion judgment mechanism is combined to synchronously extract a
light intensity peak value and a
light spot centroid offset, so that the detection accuracy is improved. The focus is judged only when the
light intensity reaches the maximum value and the
mass center offset is smaller than the threshold value, the positioning precision is greatly improved, Z-axis coordinate errors are dynamically corrected through real-time
vibration compensation and thermal drift compensation, the problems of sample damage and optical method
noise interference in traditional contact measurement are solved, and undistorted data support is provided for
microstructure three-dimensional reconstruction.