The invention discloses
edge detection equipment with an alignment function, and belongs to the field of
semiconductor manufacturing equipment.The equipment comprises an
edge detection module, a straightening mechanism of the
edge detection module comprises a suction cup, a rotating motor, a two-dimensional motion module and an edge searching camera, the two-dimensional motion module is composed of an X-axis guide rail, a Y-axis guide rail, a sliding plate and a motor, and
wafer translation and rotating alignment are achieved; the optical
assembly comprises a camera, a
prism assembly, a transverse movement module and a camera fine adjustment mechanism, the
prism assembly captures light rays at the upper edge and the lower edge of a
wafer through an upper
prism and a lower prism, and the light rays are integrated through a 90-degree turning prism to form a composite image containing multi-part information;
wafer alignment, edge detection and identification
code reading can be completed synchronously, the detection precision and efficiency are improved, and the problems that in an alignment and detection separation mode in existing
semiconductor manufacturing, independent detection equipment needs to be additionally configured, the wafer
processing time is long, damage is likely to happen after multiple times of transmission, and the yield is low are solved.