Taper-controllable laser micropore machining light beam scanning device and control method thereof

Abstract

The invention relates to a taper-controllable laser micropore machining light beam scanning device. The device comprises a laser device and a sample piece to be machined, wherein a beam expander is arranged on the emergent surface of the laser device; a 45-degree reflecting mirror is arranged on the emergent surface of the beam expander; a non-parallel double optical wedge group and a small-angle optical wedge are vertically distributed below the 45-degree reflecting mirror in sequence; a focusing mirror and the sample piece to be machined are vertically distributed below the small-angle optical wedge in sequence; and a laser beam is expanded and collimated by the beam expander, is emitted to the 45-degree reflecting mirror, is reflected by the 45-degree reflecting mirror, is vertically emitted to the non-parallel double optical wedge group below the 45-degree reflecting mirror and is translated and deflected to a certain degree through the non-parallel double optical wedge group, and the deflected beam is refracted to the focusing mirror through the small-angle optical wedge, and is focused on the sample piece to be machined by the focusing mirror. Compared with a galvanometric scanning micropore machining device, the device is high in accuracy; the number of the optical wedges is reduced by one, so that the device is convenient to mount; the number of driving motors and wedge mirrors is reduced by one, so that the device is easy to control; and the loss of laser energy is reduced, and cost is greatly reduced.

Description

technical field [0001] The invention belongs to the field of laser processing, and in particular relates to a beam scanning device capable of realizing microhole processing and adjustable control of taper. Background technique [0002] Microhole processing is one of the important applications in the field of laser processing. In microhole processing, the hole shape often has a certain taper requirement, and even requires an inverted taper hole. For example, in the micro-hole processing of fuel injectors, in order to improve the atomization effect of the small hole of the fuel injector, not only the aperture is required to be small, but also the hole shape is required to have a certain reverse taper; in the processing of aircraft blades, in order to improve the micro-pore The cooling effect requires the hole to be a positive cone. [0003] The existing methods of laser machining microholes include: single-pulse or multi-pulse processing of unit microholes with a fixed beam, ...

AI Technical Summary

Problems solved by technology

It can be combined with the parallel plate to realize the processing of the inverted cone hole, but because the beam translation amount of the parallel plate is fixed, the taper of the inverted cone hole can not be adjusted

Parallel double optical wedges can overcome the shortcomings of parallel flat plates, but the combination of rotating double optical wedges + parallel double optical wedges requires four motors to control, which is not only expensive, but also requires better coaxiality when four optical wedges are rotated, and requires higher installation accuracy. high

Moreover, the beam passes through four optical wedges, and the energy loss is large

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