This invention relates to compositions comprising
borohydride coordination compounds, precursor containers comprising
borohydride coordination compounds, and methods and systems for vapor deposition, wherein
borohydride coordination compounds are used for depositing
metal borides or
metal films. The borohydride coordination compounds have the
chemical formula MH. 3‑x (BH4) x (NR 1 R 2 R 3 ), where M is a Group 13
metal, x has a value of 2 or 3, and R 1 and R 2 Each is independently selected from C1 to C8
alkyl groups, and wherein R 3 It is a C2 to C8
alkyl group, or wherein R 1 With R 2 Together with N, they form a four- to nine-membered ring, and R 3 Selected from C1 to C8
alkyl groups, or R 3 With R 2 Together with N, they form a four- to nine-membered ring.