Microfabricated elastomeric valve and pump systems

Abstract

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Description

CROSS-REFERENCES TO RELATED APPLICATIONS [0001] This is a continuation of U.S. nonprovisional patent application Ser. No. 09 / 605,520 filed Jun. 27, 2000. This nonprovisional patent application also claims the benefit of the following previously filed-U.S. provisional patent application No. 60 / 186,856 filed Mar. 3, 2000. The text of these prior patent applications is hereby incorporated by reference. The text of concurrently filed PCT Application No. PCT / US00 / 17740 filed Jun. 27, 2000 is also hereby incorporated by reference.STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY SPONSORED RESEARCH AND DEVELOPMENT [0002] Work described herein has been supported, in part, by National Institute of Health grant HG-01642-02. The United States Government may therefore have certain rights in the invention.TECHNICAL FIELD [0003] The present invention relates to microfabricated structures and methods for producing microfabricated structures, and to microfabricated systems for regulating fl...

AI Technical Summary

Benefits of technology

The present invention is about creating microfabricated structures using elastomer bonded together, such as valves and pumps, which can be controlled and channel fluid movement. The invention is ideally suited for rapid prototyping and biocompatibility. The invention uses a multilayer soft lithography process to create monolithic elastomeric structures, which are reduced in size compared to silicon-based devices. The invention also allows for the creation of multilayer optical trains and the use of transparent elastomers for optical interrogation of microfluidic devices. The invention avoids interlayer adhesion failures and thermal stress problems, and is also more efficient than electro-osmotic flow systems.

Problems solved by technology

Unfortunately, each of these approaches suffers from its own limitations.

A limitation of the first approach of silicon-based micro-machining is that the stiffness of the semiconductor materials used necessitates high actuation forces, which in turn result in large and complex designs.

In fact, both bulk and surface micro-machining methods are limited by the stiffness of the materials used.

In addition, adhesion between various layers of the fabricated device is also a problem.

On the other hand, when surface micro-machining, thermal stresses between the various layers of the device limits the total device thickness, often to approximately 20 microns.

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