Microfabricated elastomeric valve and pump systems

a technology of elastomeric valves and micro-elastomeric materials, applied in the direction of lift valves, multi-way valves, chemical vapor deposition coatings, etc., can solve the problems of large and complex designs, limited bulk and surface micro-machining methods, and each of these approaches suffers from its own limitations
US20050226742A1Inactive Publication Date: 2005-10-13CALIFORNIA INST OF TECH
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
CALIFORNIA INST OF TECH
Publication Date
2005-10-13
Estimated Expiration
Not applicable · inactive patent

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Abstract

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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Description

CROSS-REFERENCES TO RELATED APPLICATIONS

[0001] This is a continuation of U.S. nonprovisional patent application Ser. No. 09 / 605,520 filed Jun. 27, 2000. This nonprovisional patent application also claims the benefit of the following previously filed-U.S. provisional patent application No. 60 / 186,856 filed Mar. 3, 2000. The text of these prior patent applications is hereby incorporated by reference. The text of concurrently filed PCT Application No. PCT / US00 / 17740 filed Jun. 27, 2000 is also hereby incorporated by reference.STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY SPONSORED RESEARCH AND DEVELOPMENT

[0002] Work described herein has been supported, in part, by National Institute of Health grant HG-01642-02. The United States Government may therefore have certain rights in the invention.TECHNICAL FIELD

[0003] The present invention relates to microfabricated structures and methods for producing microfabricated structures, and to microfabricated systems for regulating fl...

Claims

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