Method and device for measuring five degrees of freedom of main shaft based on cylindrical surface capacitor sensor

Abstract

The invention discloses a method and device for measuring the motion error of five degrees of freedom of a main shaft based on a cylindrical surface capacitor sensor. A stator is arranged at small end of a stepped rotor; four radial electrodes are arranged in the inner cylindrical surface of the stator; four electrodes and the small end of a rotor form four capacitors; and four equally-distributed end face electrodes are arranged on the lateral surface of the stator on one side of the large end face close to the stepped rotor and form another four capacitors with the large end of the rotor. In the measurement process, the rotor and the main shaft to be measured are fixedly connected together and synchronously rotate along the main shaft; the stator is fixedly arranged by a strut member; and the electrodes arranged on the stator and the electrodes on the rotor form capacitors. In the rotating process, when the main shaft radially jumps, axially plays or deflects, parameters of corresponding capacitors are changed and the capacitor values are correspondingly changed; and the motion displacements of the main shaft in the direction of five degrees of freedom in the rotating process can be obtained by measuring the set capacitor values and correspondingly and mathematically calculating the capacitor values. The device has simple structure and low cost.

Description

technical field [0001] The invention relates to a method and device for measuring a spindle, in particular to a method and device for measuring five degrees of freedom of a spindle based on a cylindrical capacitive sensor. Background technique [0002] The high-precision spindle is a key component of ultra-precision equipment or large-scale basic equipment such as nano-diamond lathes, precision machining centers, hard disk drives, high-precision rotating motors, and large turbogenerators. Accuracy, performance has a direct impact. For example, the movement accuracy of the diamond lathe spindle directly affects the shape accuracy and surface roughness of the workpiece. About 30% to 70% of the roundness error of precision turning is caused by the rotation error of the spindle, and the higher the accuracy of the machine tool, the larger the proportion. [0003] The motion error of the main shaft includes the radial runout (δ X ,δ Y ), axial movement (δ Z ), inclination def...

AI Technical Summary

Problems solved by technology

Korean scholar Hyeong-Joon Ahn proposed a cylindrical capacitive displacement sensor to realize radial displacement (two degrees of freedom). At the same time, the scholar also carried out research on the method of measuring the geometric error of the five degrees of freedom of the rotation axis based on a disc-shaped planar capacitive sensor. Although it can Simultaneously measure the errors of the five degrees of freedom of the main shaft, but the capacitive sensor is distributed on a concentric plane, and its calculation model is complex and has serious nonlinearity

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