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Method for efficiently processing high-quality micro hole with large ratio of pit-depth to pit-diameter through femtosecond laser

A femtosecond laser, high-efficiency technology, applied in the field of laser applications, can solve the problems of poor quality, small aspect ratio, low efficiency of femtosecond laser processing of micro-holes, etc., achieve high-efficiency micro-hole processing, improve aspect ratio and quality effect

Inactive Publication Date: 2014-06-25
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for improving microholes processed by femtosecond laser as a whole by using visible light double pulse technology in order to overcome the shortcomings of low efficiency, small depth-to-diameter ratio, and poor quality during femtosecond laser machining of microholes

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  • Method for efficiently processing high-quality micro hole with large ratio of pit-depth to pit-diameter through femtosecond laser
  • Method for efficiently processing high-quality micro hole with large ratio of pit-depth to pit-diameter through femtosecond laser

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Embodiment

[0023] Taking the processing of micropores of PMMA polymer (polymethyl methacrylate) as an example, the femtosecond laser visible light double-pulse processing method of the present invention is adopted, and the specific application equipment is as follows:

[0024] Femtosecond laser 1 is a laser produced by Spectrum Physics in the United States. The laser wavelength is 800nm, the pulse width is 50fs, the repetition frequency is 1KHz, the maximum energy of a single pulse is 3mJ, and the light intensity distribution is Gaussian and linearly polarized.

[0025] The femtosecond laser optical parametric amplifier 2 is TOPAS-C produced by American Light Conversion Company, which can continuously adjust the 800nm ​​femtosecond laser pulse in the wavelength range of 290-2600nm with an adjustment accuracy of 0.1nm.

[0026] The structural components of the Michelson interferometer include: a dichroic prism 4 , a light combining prism 5 , a first reflector 6 , a second reflector 7 , a t...

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Abstract

The invention relates to the field of laser application, in particular to a method for efficiently processing a high-quality micro hole with a large ratio of pit-depth to pit-diameter through a femtosecond laser. According to the method, the wavelength of a near-infrared femtosecond laser monopulse is regulated by a femtosecond laser optical parameter amplifier, so that the near-infrared femtosecond laser monopulse becomes visible light. Afterwards, an optical path of a Michelson interferometer is used for modulating the visible light to be laser double impulses and the overall energy of the laser double impulses is regulated with a continuous attenuation sheet. The obtained visible light double impulses penetrate through an optical shutter and are perpendicularly focused on the upper surface of a sample to be processed through an objective lens. Finally, the optical shutter is used for controlling the exposure time of the visible light double impulses and therefore the number of laser impulses which irradiates the surface of the sample to be processed is regulated until the depth of the processed hole is saturated. According to the processing method, the ratio of pit-depth to pit-diameter and the quality in processing the micro hole can be effectively improved.

Description

technical field [0001] The invention relates to the field of laser applications, in particular to a method for high-efficiency processing of high-quality microholes with a large depth-to-diameter ratio by a femtosecond laser. Background technique [0002] Laser processing of large depth-to-diameter ratio microholes has a wide range of applications in the fields of micro-optical components, microelectronic devices, microbiology and microchemistry. Wide bandgap materials such as glass, ceramics and polymers have the advantages of low price, high transparency and easy shaping, especially PMMA materials, which have high light penetration in the visible light range and low ablation efficiency and glass Transformation temperature, very suitable for micro-hole processing in the field of micro-optics and other fields. [0003] Compared with continuous laser, pulsed laser can control the pulse duration and repetition frequency, which is more advantageous in microhole processing. In...

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Application Information

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IPC IPC(8): B23K26/382B23K26/0622
CPCB23K26/382B23K26/0622B23K2103/42B23K2103/50
Inventor 姜澜房巨强曹强
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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