This application discloses a rotation angle
measurement device and method for a MEMS array, relating to the field of MEMS measurement. The device and method include: a
laser light source disposed on one side of an optical platform; an optical platform for placing and moving the MEMS array; a
projection plane disposed above the other side of the optical platform and capable of moving up and down; an industrial camera disposed in correspondence with the
projection plane; a
control unit connected to the optical platform, the MEMS array, and the industrial camera; and a
control unit connected to the optical platform, the MEMS array, and the industrial camera. The
control unit rotates the mirror to be measured in a certain direction by changing the
voltage of the pin corresponding to the mirror to be measured in the MEMS array. The control unit also controls the industrial camera to capture an image of the
projection plane and mark the coordinates of the
light spot on the image, thereby determining the correspondence between different pin voltages and the
light spot coordinates, and ultimately plotting a
voltage-angle response curve. This application does not require precise calibration of the angle of the incident light and can automatically and accurately measure the rotation angle of the MEMS array even when the angle of change is very small.