The invention relates to the technical field of semiconductors, in particular to a
processing technology of a
graphite piece with an inclined plane, which comprises the following steps of: placing a
raw material piece on the upper side of a first clamp and fixing, and performing primary
processing on a
surface plate, a vertical plate, a transverse plate and step parts on the surfaces of the
surface plate, the vertical plate and the transverse plate in a product piece; the first-time machined part is placed on the surface of a second clamp and fixed, and secondary
machining is conducted on the upper half portion of the inclined panel in the
product part; the secondary
machining part is vertically placed on the side face of a third clamp, one side of the
surface plate faces downwards and is fixed, and third-time
machining is conducted on the rear half part of the
counterbore in the
product part; after the position of the third-time machined part is adjusted, the third-time machined part is placed on the side face of a third clamp, one side of the surface plate is upward and fixed, and fourth-time machining is conducted on the front half part of the
counterbore, the
small hole and the
lettering part in the
product part; and the fourth-time machined part is placed on the surface of the fourth clamp, fifth-time machining is conducted on the
lower half portion of an inclined panel in the product part, the machining precision is improved, and the low machining cost is kept.