88 results about "Small-angle X-ray scattering" patented technology

Methods and systems for characterizing dimensions and material properties of high aspect ratio, vertically manufactured devices using transmission, small-angle x-ray scattering (T-SAXS) techniques are described herein. Exemplary structures include spin transfer torque random access memory (STT-RAM), vertical NAND memory (V-NAND), dynamic random access memory (DRAM), three dimensional FLASH memory (3D-FLASH), resistive random access memory (Re-RAM), and PC-RAM. In one aspect, T-SAXS measurements are performed at a number of different orientations that are more densely concentrated near the normal incidence angle and less densely concentrated at orientations that are further from the normal incidence angle. In a further aspect, T-SAXS measurement data is used to generate an image of a measured structure based on the measured intensities of the detected diffraction orders. In another further aspect, a metrology system is configured to generate models for combined x-ray and optical measurement analysis.

Methods and systems for performing simultaneous X-ray Fluorescence (XRF) and small angle x-ray scattering (SAXS) measurements over a desired inspection area of a specimen are presented. SAXS measurements combined with XRF measurements enables a high throughput metrology tool with increased measurement capabilities. The high energy nature of x-ray radiation penetrates optically opaque thin films, buried structures, high aspect ratio structures, and devices including many thin film layers. SAXS measurements of a particular location of a planar specimen are performed at a number of different out of plane orientations. This increases measurement sensitivity, reduces correlations among parameters, and improves measurement accuracy. In addition, specimen parameter values are resolved with greater accuracy by fitting data sets derived from both SAXS and XRF measurements based on models that share at least one material parameter. The fitting can be performed sequentially or in parallel.

This invention discloses a method and apparatus for x-ray techniques using structured x-ray illumination for examining material properties of an object. In particular, an object with one or more regions of interest (ROIs) having a particular shape, size, and pattern may be illuminated with an x-ray beam whose cross sectional beam profile corresponds to the shape, size and pattern of the ROIs, so that the x-rays of the beam primarily interact only with the ROIs. This allows a greater x-ray flux to be used, enhancing the signal from the ROI itself, while reducing unwanted signals from regions not in the ROI, improving signal-to-noise ratios and/or measurement throughput

This may be used with a number of x-ray measurement techniques, including x-ray fluorescence (XRF), x-ray diffraction (XRD), small angle x-ray scattering (SAXS), x-ray absorption fine-structure spectroscopy (XAFS), x-ray near edge absorption spectroscopy, and x-ray emission spectroscopy.

An ink jet ink is disclosed which includes water, a water-soluble organic solvent and a coloring material and has excellent properties. The coloring material is a specific phthalocyanine derivative and is contained in a specific amount in the ink. The water-soluble organic solvent includes a specific amount of 2-pyrrolidone. In addition, a d₇₅ value is in a specific range where the d₇₅ value corresponds to 75% of a dispersion distance distribution, measured by a small angle X-ray scattering method, of molecular aggregates in the ink jet ink whose coloring material concentration is adjusted to 0.5 mass %.

Methods and systems for reducing the effect of finite source size on illumination beam spot size for Transmission, Small-Angle X-ray Scatterometry (T-SAXS) measurements are described herein. A beam shaping slit having a slender profile is located in close proximity to the specimen under measurement and does not interfere with wafer stage components over the full range of angles of beam incidence. In one embodiment, four independently actuated beam shaping slits are employed to effectively block a portion of an incoming x-ray beam and generate an output beam having a box shaped illumination cross-section. In one aspect, each of the beam shaping slits is located at a different distance from the specimen in a direction aligned with the beam axis. In another aspect, the beam shaping slits are configured to rotate about the beam axis in coordination with the orientation of the specimen.

There is provided ink jet ink containing at least a coloring material, in which: the coloring material is a compound represented by the following general formula (I) or a salt thereof; a content (weight %) of the coloring material is 3.0 weight % or more with respect to a total weight of the ink jet ink; in a dispersion distance distribution, measured by a small-angle X-ray scattering method, of molecular aggregates in the ink jet ink whose coloring material concentration is adjusted to 3.0 weight %, a dispersion distance d₇₅ value corresponding to 75% of the distribution is 3.0 mass % is 6.50 nm or more and 7.10 nm or less:

A two-dimensional x-ray scattering camera includes a source, an optic, a detector, and a pair of collimating blocks. The source emits x-ray beams that are reflected by the optic towards a sample. The detector detects scattering from the sample, the pair of collimating blocks is positioned between the optic and the detector to collimate the beam. A bottom surface of one block is substantially parallel a top surface of the other block, and the blocks are rotatable relative to the beam about a pivot. The system forms a two-dimensional beam that is symmetric about the primary beam axis at the detector position, regardless how the beam is collimated by the collimating blocks. The system therefore eliminates smearing and can be used for anisotropic small angle scattering at high resolution and low Q_min.

Disclosed is a sodium secondary battery. The sodium secondary battery comprises a first electrode and a second electrode comprising a carbonaceous material. The carbonaceous material satisfies one or more requirements selected from the group consisting of requirements 1, 2, 3 and 4. Requirement 1: R value (=ID/IG) obtained by Raman spectroscopic measurement is 1.07 to 3. Requirement 2: A value and σ_A value obtained by small angle X-ray scattering measurement are −0.5 to 0 and 0 to 0.010, respectively. Requirement 3: for an electrode comprising an electrode mixture obtained by mixing 85 parts by weight of the carbonaceous material with 15 parts by weight of poly(vinylidene fluoride), the carbonaceous material in the electrode after being doped and dedoped with sodium ions is substantially free from pores having a size of not less than 10 nm. Requirement 4: Q₁ value obtained by a calorimetric differential thermal analysis is not more than 800 joules/g.

Provided is an automobile part comprising a 7000-series aluminum alloy sheet and provided with both strength and stress corrosion cracking resistance. The automobile part is configured from a 7000-series aluminum alloy sheet having a specific composition, and after artificial aging processing, the grain size distribution of precipitates evaluated by means of a small angle x-ray scattering among the crystal grains of the aluminum alloy plate and the normalized dispersion of the grain size distribution are controlled, resulting in being simultaneously provided with high strength in the form of an 0.2% proof stress of at least 350 MPa, high ductility, and SCC resistance. Also, the automobile part is configured from a 7000-series aluminum alloy sheet having a specific composition, and after artificial aging processing, a specific number density of nanosized precipitates are caused to be present as measured by a transmission electron microscope at 300,000× magnification in the crystal grains of the aluminum alloy plate, resulting in being simultaneously provided with high strength in the form of an 0.2% proof stress of at least 350 MPa, high ductility, and SCC resistance.

The invention discloses an in-situ device for small-angle X-ray scattering experiment. The in-situ device comprises a vacuum and atmosphere protection system, a stress load and measurement system and a temperature load and measurement system. Self-alignment of samples during stress load is realized in the stress load system by adopting design of pull-press stress transformation. Special design is adopted in the temperature load and measurement system, wide X-ray channels are realized while uniform of temperature field is guaranteed, and meanwhile, heating temperature of the samples can reach 1100 DEG C. By the arrangement, the in-situ device is simple in structure, reliable in performance, high in measurement accuracy and capable of loading in temperature and stress simultaneously on the samples under the vacuum or atmosphere protection environment. The in-situ device is used in cooperation with a synchrotron-radiation small-angle X-ray scattering line station, in-situ measurement of to-be-measured samples on microscopic deformation, damage and fracture process under the mechanics use environment can be performed, and an effective and reliable measurement method for discovering changes of deformation and microstructure of brittle material samples under the stress is provided.

An ultra-small angle X-ray scattering measuring apparatus includes a detector for detecting X-rays emitted from a sample, an X-ray collimating mirror arranged between the X-ray real focus and the sample, a monochromator arranged between the X-ray collimating mirror and the sample and an analyzer arranged between the sample and the detector. The X-ray collimating mirror includes a pair of X-ray mirrors that are arranged orthogonally relative to each other. The X-ray mirrors are multilayer film mirrors and their X-ray reflection surfaces are paraboloidal. The interplanar spacing of lattice planes of each of the multilayer films is continuously changed along the paraboloid so as to meet the Bragg's condition. The monochromator and the analyzer are formed by using a channel-cut crystal. The analyzer is driven to rotate for scanning around a 2θ-axial line and diffracted rays reduced to a spectrum by the analyzer are detected by the detector.

A light conversion composite including a matrix resin and quantum dot-polymer beads dispersed within the matrix resin. The light conversion composite has a wave number q of 0.0056 Å⁻¹ to 0.045 Å⁻¹ at a peak point in a scattering intensity graph according to wave numbers measured by using small angle X-ray scattering.

A small angle x-ray diffraction scattering system has a vertical orientation, allowing for simplified analysis of liquid samples. The system may function in a beam-up or a beam-down configuration. An x-ray source provides an initial x-ray beam that is directed vertically along a primary beampath to a sample located on a sample support. The small angle scattered x-ray energy travels through a secondary beampath to a detector. The primary and secondary beampaths may be evacuated and separated from a sample chamber by fluid seals. Beam conditioning optics and a collimator may be used in the primary beampath, and a beamstop used in the secondary beampath. The sample chamber may have a microscope or camera, which may be movable, for observing the sample, and a translation stage for moving the sample in at least two dimensions.

An ink jet ink which can form images whose bleeding resistance is high and whose bronzing phenomenon is suppressed, is provided. The ink is an ink jet ink for use together with a pigment ink. The ink jet ink is characterized in that: the ink jet ink contains a coloring material, a polyvalent metal and a water-soluble organic solvent(s); the coloring material is at least a compound represented by the general formula (I); a content (mol/g) of the polyvalent metal is 2.0×10⁻⁶ mol/g or more and 4.0×10⁻⁴ mol/g or less; a total content (mass %) of the water-soluble organic solvent(s) is 25.0 mass % or more with respect to the total mass of the ink; and in a dispersion distance distribution, measured by a small angle X-ray scattering method, of molecular aggregates in the ink jet ink whose coloring material concentration is adjusted to 0.5 mass %, a dispersion distance d₇₅ value corresponding to 75% of a distribution is 12.60 nm or less.

General Formula (I):

The invention provides a composition comprising a first composition that comprises an ethylene-based polymer and an oil, and wherein the first composition has the following property as determined by small angle x-ray scattering: (L_oil−L_no-oil)/L_no-oil>10%, where L_oil is the long period of the polymer with oil, and L_no-oil is the long period of the polymer without oil.

To form the silicon oxide-based composite material having new structure as directly obtained by pyrolyzing polysilsesquioxane having specific structure under an inert gas atmosphere, and the formed silicon oxide-based composite material having scattering recognized in a region: 0.02Å⁻¹<q<0.21 Å⁻¹ in a spectrum measured by a small-angle X-ray scattering method, having graphite carbon in which scattering is recognized at 1,590 cm⁻¹ (G band/graphite structure) and 1,325 cm⁻¹ (D band/amorphous carbon), and a peak intensity ratio (I_D/I_G ratio) of amorphous carbon to crystalline carbon being in a range of 2.0 to 5.0 in a spectrum measured by Raman spectroscopy, and being represented by a general formula SiO_xC_y (0.5<x<1.8, 1<y<5).

Apparatus and methods for performing small angle X-ray scattering (SAXS) at low (cryogenic) temperatures for determining the structure of and changes in the structure of proteins, DNA, RNA, and other biological molecules and biomolecular assemblies and structures. A cryogenic, small angle X-ray scattering (SAXS) application sample holder, includes a sample cell including a base portion and at least two parallel walls disposed on the base, wherein the sample cell has a liquid volume capacity defined by the walls and the base portion of 0.001 to 10 microliters. A method for performing cryogenic SAXS on a sample includes the steps of providing a sample biomolecule solution containing an aqueous buffer, a biomolecule, and a cryoprotectant agent, wherein the cryoprotectant agent comprises up to 60% (w/w) of the biomolecule solution, and other known components as necessary to solubilize and stabilize the biomolecule, in a sample holder of claim 1 or 18, cryogenically cooling the sample solution in the sample holder at a rate equal to or greater than 100 K/sec without ice formation, and examining the cooled sample using small angle X-ray scattering by passing a beam of X-rays through the sample.