2 results about "Small-angle scattering" patented technology

The application discloses an in-situ temperature and humidity control grazing entry type small-angle scattering sample table and a testing method, relates to the technical field of in-situ small-angle scattering experimental equipment, and comprises a main support assembly, a temperature regulation assembly, a protection assembly and an interface assembly.The main support assembly is formed by a structural frame spliced to surround a bearing structure with an inner containing space.The temperature regulation assembly is used for providing a target temperature field.The protection assembly comprises a Capton film shell.The interface assembly is used for transmitting temperature control medium and humidity medium to the temperature control console.The testing docking assembly is used for realizing multi-pose docking with an external grazing incidence testing module.The main support assembly is equipped with a six-degree-of-freedom sample table, the window grazing entry angle is realized to be-3 to 5°, the wide temperature range high-speed regulation is realized to be-150℃ to 600℃ and 30℃ / min, the high-precision humidity control is realized to be 1%-95%RH and ±1%RH, the detachable Capton film is installed to realize effective isolation of the cavity inner and outer vacuum, and the 0.02mbar-1bar normal pressure or negative pressure and the rapid switching and multi-modal mechanical coupling of inert gas are supported.

This invention discloses a method for reconstructing X-ray small-angle scattering (SAXS) patterns based on a physical information neural network, belonging to the field of nanostructure measurement. Through a differentiable physical information optimization framework driven by a physical information neural network, a given electron density template is used as input, and the output is a high-resolution, corrected electron density map. A loss function is calculated by comparing the SAXS pattern with an experimental X-ray small-angle scattering pattern, and the neural network structure is optimized based on the loss function to ensure physical realism and computational feasibility, thereby continuously optimizing the predicted electron density map and making it closer to the real sample. This invention eliminates the dependence on a pre-set geometric model, requiring only a single SAXS scattering pattern containing multi-angle information to faithfully reconstruct the true morphology of nanostructures containing arbitrarily complex and non-ideal features such as rounded corners, sidewall curvature, and chamfered edges. This fundamentally solves the model mismatch problem and significantly improves the accuracy, reliability, and applicability of X-ray small-angle scattering metrology.