The invention relates to a
silicon substrate structure. The
silicon substrate structure comprises a substrate, a first groove, a second groove and a third groove, the substrate comprises a first surface and a second surface, the first surface is formed on one side of a
silicon (111)
lattice plane, and the second surface is formed on the other opposite side of the silicon (111)
lattice plane; the first groove is arranged on the second surface of the substrate along a first direction; the second groove is arranged on the second surface of the substrate along a second direction; the third groove is arranged on the second surface of the substrate along a third direction; wherein the first direction is defined as a direction from a silicon (111)
lattice plane to a silicon (1-1-1) lattice plane, the second direction is defined as a direction from a silicon (-11-1) lattice plane to a silicon (1-11) lattice plane, and the third direction is defined as an axial direction of a silicon [1-10]
crystal orientation. According to the silicon substrate structure, cracks can be reduced in the epitaxial process, the uniformity is improved, and the production yield of an epitaxial film is further improved.