X-ray diffraction apparatus and X-ray diffraction method
A diffraction device and X-ray technology, applied in measuring devices, material analysis using wave/particle radiation, instruments, etc., can solve the problem that X-ray detectors have complex structures, are difficult to apply X-ray diffraction methods, and cannot be used as X-ray beams and other problems, to achieve the effect of suppressing the reduction of X-ray intensity, suppressing the reduction of angular resolution, high angular resolution and X-ray intensity gain
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[0052] Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings. Fig. 1 is a schematic perspective view of a first type of X-ray diffraction apparatus of the present invention. This X-ray diffraction device has: an X-ray source with a linear (or point-like) X-ray focus 10, a multilayer mirror (mirror) 12 with a parabolic reflective surface, and a channel cut for selecting the characteristic X-ray Kα1. Channel cut monochromator 13 (channel cut monochromometer), sample holder 14, Soller slit 16 (solar slit) to limit the longitudinal divergence of diffracted X-rays, mirror 18 composed of a crystal analyzer, and 1-dimensional position-sensitive X-rays detector 20. FIG. 1 shows the case where a linear X-ray focus is used. Although the X-rays emitted from the X-ray focal point 10 are divergent beams 22, the divergent beams 22 are converted into parallel beams 24a via the multilayer film mirror 12 having a parabola-shaped refle...
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